Display device

• US 9,786,689 B2
• Filed: 03/08/2016
• Issued: 10/10/2017
• Est. Priority Date: 07/31/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Ohara, Hiroki, Sasaki, Toshinari, Noda, Kosei, Kuwabara, Hideaki
• Primary Examiner(s): YUSHIN, NIKOLAY K
• Application Number:
  US15/063,664
• Publication Number:
  US 20160190175A1
• Time in Patent Office: 581 Days
• CPC Class Codes: G02F 1/133345 Insulating layers G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence
• CPC Class Codes: G02F 1/1337 Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
• CPC Class Codes: G02F 1/134309 characterised by their geometrical arrangement
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136277 formed on a semiconductor substrate, e.g. of silicon
• CPC Class Codes: G02F 1/1368 in which the switching element is a three-electrode device G02F1/136277 takes precedence
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
• CPC Class Codes: H01L 29/24 including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22 including organic materials H10K99/00
• CPC Class Codes: H01L 29/517 the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate H01L29/518 takes precedence
• CPC Class Codes: H01L 29/78609 for preventing leakage current H01L29/78618 takes precedence
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

An object is to provide a semiconductor device having a structure with which parasitic capacitance between wirings can be sufficiently reduced. An oxide insulating layer serving as a channel protective layer is formed over part of an oxide semiconductor layer overlapping with a gate electrode layer. In the same step as formation of the oxide insulating layer, an oxide insulating layer covering a peripheral portion of the oxide semiconductor layer is formed. The oxide insulating layer which covers the peripheral portion of the oxide semiconductor layer is provided to increase the distance between the gate electrode layer and a wiring layer formed above or in the periphery of the gate electrode layer, whereby parasitic capacitance is reduced.

Claims

1. A display device comprising:

a driver circuit and a pixel portion,

wherein the driver circuit includes;

a first conductive layer;

a first insulating layer over the first conductive layer;

a first semiconductor layer over the first insulating layer, the first semiconductor layer overlapping with the first conductive layer;

a second insulating layer over the first semiconductor layer, the second insulating layer including a first contact hole and a second contact hole, wherein the second insulating layer covers a periphery of the first semiconductor layer;

a second conductive layer over the second insulating layer, the second conductive layer electrically connected to the first semiconductor layer through the first contact hole;

a third conductive layer over the second insulating layer, the third conductive layer electrically connected to the first semiconductor layer through the second contact hole; and

a fourth conductive layer over the second insulating layer, the fourth conductive layer overlapping with the first semiconductor layer,

wherein the pixel portion includes;

a fifth conductive layer;

a third insulating layer over the fifth conductive layer;

a second semiconductor layer over the third insulating layer, the second semiconductor layer overlapping with the fifth conductive layer;

a fourth insulating layer over the second semiconductor layer, the fourth insulating layer including a third contact hole and a fourth contact hole, wherein the fourth insulating layer covers a periphery of the second semiconductor layer;

a sixth conductive layer over the fourth insulating layer, the sixth conductive layer electrically connected to the second semiconductor layer through the third contact hole; and

a seventh conductive layer over the fourth insulating layer, the seventh conductive layer electrically connected to the second semiconductor layer through the fourth contact hole,

wherein the fourth conductive layer is electrically connected to the first conductive layer, and

wherein the fourth conductive layer is a same material with the seventh conductive layer.

2. The display device according to claim 1,

wherein the pixel portion further comprising:

an eighth conductive layer over the fourth insulating layer, the eighth conductive layer being in contact with the second semiconductor layer through the fourth contact hole.

3. The display device according to claim 2, wherein the seventh conductive layer is electrically connected to the second semiconductor layer through the eighth conductive layer.

4. The display device according to claim 1, further comprising:

a fifth insulating layer over the second conductive layer, the third conductive layer, and sixth conductive layer,

wherein the fourth conductive layer and the seventh conductive layer is positioned on the fifth insulating layer.

5. The display device according to claim 1, wherein an entirety of the first semiconductor layer overlaps with the first conductive layer.

6. The display device according to claim 1, wherein an entirety of the second semiconductor layer overlaps with the fifth conductive layer.

7. The display device according to claim 1, wherein the first contact hole overlaps with the first conductive layer, and wherein the second contact hole overlaps with the first conductive layer.

8. The display device according to claim 1, wherein the third contact hole overlaps with the fifth conductive layer, and wherein the fourth contact hole overlaps with the fifth conductive layer.

9. A display device comprising:

a driver circuit and a pixel portion,

wherein the driver circuit includes;

a first conductive layer;

a first insulating layer over the first conductive layer;

a first oxide semiconductor layer over the first insulating layer, the first oxide semiconductor layer overlapping with the first conductive layer;

a second insulating layer over the first oxide semiconductor layer, the second insulating layer including a first contact hole and a second contact hole, wherein the second insulating layer covers a periphery of the first oxide semiconductor layer;

a second conductive layer over the second insulating layer, the second conductive layer electrically connected to the first oxide semiconductor layer through the first contact hole;

a third conductive layer over the second insulating layer, the third conductive layer electrically connected to the first oxide semiconductor layer through the second contact hole; and

a fourth conductive layer over the second insulating layer, the fourth conductive layer overlapping with the first oxide semiconductor layer,

wherein the pixel portion includes;

a fifth conductive layer;

a third insulating layer over the fifth conductive layer;

a second oxide semiconductor layer over the third insulating layer, the second oxide semiconductor layer overlapping with the fifth conductive layer;

a fourth insulating layer over the second oxide semiconductor layer, the fourth insulating layer including a third contact hole and a fourth contact hole, wherein the fourth insulating layer covers a periphery of the second oxide semiconductor layer;

a sixth conductive layer over the fourth insulating layer, the sixth conductive layer electrically connected to the second oxide semiconductor layer through the third contact hole; and

a seventh conductive layer over the fourth insulating layer, the seventh conductive layer electrically connected to the second oxide semiconductor layer through the fourth contact hole,

wherein the fourth conductive layer is electrically connected to the first conductive layer, and

wherein the fourth conductive layer is a same material with the seventh conductive layer.

10. The display device according to claim 9,

wherein the pixel portion further comprising:

an eighth conductive layer over the fourth insulating layer, the eighth conductive layer being in direct contact with the second oxide semiconductor layer through the fourth contact hole.

11. The display device according to claim 10, wherein the seventh conductive layer is electrically connected to the second oxide semiconductor layer through the eighth conductive layer.

12. The display device according to claim 9, further comprising:

a fifth insulating layer over the second conductive layer, the third conductive layer, and sixth conductive layer,

wherein the fourth conductive layer and the seventh conductive layer is positioned on the fifth insulating layer.

13. The display device according to claim 9, wherein an entirety of the first oxide semiconductor layer overlaps with the first conductive layer.

14. The display device according to claim 9, wherein an entirety of the second oxide semiconductor layer overlaps with the fifth conductive layer.

15. The display device according to claim 9,

wherein the first contact hole overlaps with the first conductive layer, and

wherein the second contact hole overlaps with the first conductive layer.

16. The display device according to claim 9,

wherein the third contact hole overlaps with the fifth conductive layer, and

wherein the fourth contact hole overlaps with the fifth conductive layer.

17. A display device comprising:

a driver circuit and a pixel portion,

wherein the driver circuit includes;

a first conductive layer;

a first insulating layer over the first conductive layer;

a first semiconductor layer over the first insulating layer, the first semiconductor layer overlapping with the first conductive layer;

a second insulating layer over the first semiconductor layer, the second insulating layer including a first contact hole and a second contact hole, wherein the second insulating layer covers a periphery of the first semiconductor layer;

a second conductive layer over the second insulating layer, the second conductive layer electrically connected to the first semiconductor layer through the first contact hole;

a third conductive layer over the second insulating layer, the third conductive layer electrically connected to the first semiconductor layer through the second contact hole; and

a fourth conductive layer over the second insulating layer, the fourth conductive layer overlapping with the first semiconductor layer,

wherein the pixel portion includes;

a fifth conductive layer;

a third insulating layer over the fifth conductive layer;

a second semiconductor layer over the third insulating layer, the second semiconductor layer overlapping with the fifth conductive layer;

a fourth insulating layer over the second semiconductor layer, the fourth insulating layer including a third contact hole and a fourth contact hole, wherein the fourth insulating layer covers a periphery of the second semiconductor layer;

a sixth conductive layer over the fourth insulating layer, the sixth conductive layer electrically connected to the second semiconductor layer through the third contact hole;

a seventh conductive layer over the fourth insulating layer, the seventh conductive layer electrically connected to the second semiconductor layer through the fourth contact hole;

a fifth insulating layer over and in contact with the fourth insulating layer in an entire region in which the second semiconductor layer overlaps with the fifth conductive layer,

wherein the fourth conductive layer is electrically connected to the first conductive layer, and

wherein the fourth conductive layer is a same material with the seventh conductive layer.