Apparatus for producing a plasma and hand-held device having the apparatus

• US 9,788,404 B2
• Filed: 07/22/2015
• Issued: 10/10/2017
• Est. Priority Date: 01/22/2013
• Status: Active Grant

• Current Assignee: Epcos AG (TDK Corporation), Relyon Plasma GmbH (TDK Corporation)
• Original Assignee: Epcos AG (TDK Corporation), Relyon Plasma GmbH (TDK Corporation)
• Inventors: Nettesheim, Stefan, Korzec, Dariusz, Burger, Dominik, Kuegerl, Georg, Puff, Markus, Hoppenthaler, Florian
• Primary Examiner(s): Owens, Douglas W
• Assistant Examiner(s): Sathiraju, Srinivas
• Application Number:
  US14/806,241
• Publication Number:
  US 20150373824A1
• Time in Patent Office: 811 Days
• Field of Search: None
• CPC Class Codes: H05H 1/24 Generating plasma nuclear fusion reactors G21B1/00; gas-filled discharge reactors H01J37/32
• CPC Class Codes: H05H 1/2481 the plasma being activated using piezoelectric actuators
• CPC Class Codes: H05H 2240/10 at atmospheric pressure
• CPC Class Codes: H05H 2245/40 Surface treatments
• CPC Class Codes: H10N 30/40 with electrical input and electrical output, e.g. functioning as transformers
• CPC Class Codes: H10N 30/88 Mounts; Supports; Enclosures; Casings

Abstract

An apparatus for producing a plasma including a control circuit which is electrically connected to a piezoelectric transformer in order to excite the piezoelectric transformer. A hand-held device that uses the apparatus. The piezoelectric transformer is constructed of several layers. The control circuit is implemented on a circuit board, and the piezoelectric transformer is held over the circuit board by means of a region of a first end. A high voltage is applied to a second free end of the piezoelectric transformer. The plasma is produced at atmospheric pressure.

Claims

1. An apparatus for producing a plasma which can be ignited at atmospheric pressure, comprising:

a printed circuit board;

a control circuit embodied within said printed circuit board, which circuit is electrically connected to a piezoelectric transformer, to excite said piezoelectric transformer, wherein said piezo electric transformer comprises a fixed first end mounted to said printed circuit board; and

a free second end, said control circuit operatively arranged to impress a high voltage on said second free end of the piezoelectric transformer and to control a fan to create a current of a working gas for forming the plasma and for cooling the piezoelectric transformer, wherein;

the piezoelectric transformer is constructed from a plurality of layers of dielectric material, wherein the layers are connected to each other, each layer is provided at least partially with a conductor layer and the piezoelectric transformer is freely spaced apart from the printed circuit board by a gap in the region of the first end; and

an electrical connector is guided from the printed circuit board to each lateral face of the piezoelectric transformer and is connected to each terminal pad, which is provided at a vibrational nodal point on each lateral face of the piezoelectric transformer, wherein the vibrational nodal point is closer to the first end than to the second free end of the piezoelectric transformer.

2. The apparatus as recited in claim 1, wherein the piezoelectric transformer is parallel pipe-shaped, and a length and a width of the piezoelectric transformer are greater than one thickness of the piezoelectric transformer.

3. The apparatus as recited in claim 1, wherein an electrical terminal pad for an excitation voltage at a vibration nodal point of the piezoelectric transformer is mounted on opposite lateral faces of the piezoelectric transformer, said lateral faces being defined by a length and a thickness of the piezoelectric transformer.

4. The apparatus as recited in claim 3, wherein a holder bears the piezoelectric transformer above the printed circuit board at the vibration nodal point and the holder is made of an elastic material.

5. The apparatus as recited in claim 1, wherein the current of the working gas is formed in such a way that it is directed at least from the first end of the piezoelectric transformer, mounted on the printed circuit board, towards the second free end of the piezoelectric transformer.

6. The apparatus as recited in claim 5, wherein a fan is provided that supports the current of the working gas by way of the piezoelectric transformer towards the second free end of the piezoelectric transformer.

7. The apparatus as recited in claim 1, wherein at least two vibration nodal points, both of which are spaced apart from the first end or from the second free end, can be formed in the piezoelectric transformer, which is excited at a resonant frequency.

8. The apparatus as recited in claim 7, wherein a temperature sensor is assigned to at least one vibration nodal point of the piezoelectric transformer.

9. The apparatus as recited in claim 7, wherein the electrical connector, the holder for the piezoelectric transformer and the holder are made of a material that is elastic and electrically conductive.

10. The apparatus as recited in claim 1, wherein the printed circuit board and the piezoelectric transformer form a structural unit.

11. A hand-held device for plasma treatment of surfaces, said hand-held device comprising:

a housing;

a voltage source;

a printed circuit board, which is provided in the housing and which has a control circuit in order to excite a piezoelectric transformer wherein the piezoelectric transformer is guided with a first end with a holder above the printed circuit board and, thus, forms a structural unit, and wherein a second free end of the piezoelectric transformer is directed towards an opening in the housing, wherein a high voltage can be impressed on the second free end of the piezoelectric transformer, and the plasma can be ignited at atmospheric pressure;

a working gas for forming the plasma and for cooling the piezoelectric transformer;

wherein the piezoelectric transformer is constructed from a plurality of layers of dielectric material, wherein the layers are connected to each other; and

wherein each layer is provided at least partially with a conductor layer and the piezoelectric transformer is freely spaced apart from the printed circuit board by a gap in a region of the first end; and

,

an electrical connector is guided from the printed circuit board to each lateral face of the piezoelectric transformer and is connected to each terminal pad, which is provided at a vibrational nodal point on each lateral face of the piezoelectric transformer, wherein the vibrational nodal point is closer to the first end than to the second free end of the piezoelectric transformer.

12. The hand-held device as recited in claim 11, wherein a battery and/or a connector for a standard power supply is provided, so that a power supply of the hand-held device can be carried out.

13. The hand-held device as recited in claim 11, wherein the housing bears a fan, with which an air current can be produced towards the opening in the housing by way of the piezoelectric transformer.

14. The hand-held device as recited in claim 11, wherein an additional gas port is provided, by means of which a working gas other than air can be fed to the second free end of the piezoelectric transformer.