Scratch-resistant materials and articles including the same

• US 9,790,593 B2
• Filed: 07/29/2015
• Issued: 10/17/2017
• Est. Priority Date: 08/01/2014
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Adib, Kaveh, Bellman, Robert Alan, Paulson, Charles Andrew, Price, James Joseph
• Primary Examiner(s): Bernshteyn, Michael M
• Application Number:
  US14/812,562
• Publication Number:
  US 20160083835A1
• Time in Patent Office: 811 Days
• Field of Search: 428446
• CPC Class Codes: C03C 17/34 with at least two coatings having different compositions C03C17/44 takes precedence
• CPC Class Codes: C03C 2217/734 comprising an alternation of high and low refractive indexes
• CPC Class Codes: C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
• CPC Class Codes: C23C 16/308 Oxynitrides
• CPC Class Codes: C23C 16/325 Silicon carbide
• CPC Class Codes: C23C 16/345 Silicon nitride
• CPC Class Codes: C23C 16/36 Carbonitrides
• CPC Class Codes: C23C 16/402 Silicon dioxide

Abstract

Embodiments of this disclosure pertain to a coating material comprising silicon and/or aluminum, hydrogen and any two or more of oxygen, nitrogen, carbon, and fluorine. The coating material exhibits a hardness of about 17 GPa or greater and an optical band gap of about 3.5 eV or greater. In some embodiments, the coating material includes, in atomic %, silicon and/or aluminum in an amount of about 40 or greater, hydrogen in an amount in the range from about 1 to about 25, nitrogen in an amount of about 30 or greater, oxygen in an amount in the range from about 0 to about 7.5, and carbon in an amount in the range from about 0 to about 10. The coating material may optionally include fluorine and/or boron. Articles including the coating material are also described and exhibit an average transmittance of about 85% or greater over an optical wavelength regime in the range from about 380 nm to about 720 nm and colorlessness.

Claims

1. A coating composition comprising, in atomic %:

silicon, aluminum or a combination thereof in an amount of about 35 or greater;

hydrogen in an amount in the range from about 1 to about 30;

nitrogen in an amount of about 30 or greater;

oxygen in an amount in the range from about 0 to about 7.5;

carbon in an amount in the range from about 0 to about 10; and

fluorine in an amount in the range from about 0 to about 5;

wherein the ratio of nitrogen (atomic %) to silicon (atomic %) is about 0.8 or greater.

2. The coating composition of claim 1, further comprising boron.

3. The coating composition of claim 1, wherein the silicon, aluminum or a combination thereof is present in an amount in the range from about 37 atomic % to about 50 atomic %.

4. The coating composition of claim 1, wherein hydrogen is present in an amount in the range from about 15 atomic % to about 28 atomic %.

5. The coating composition of claim 1, wherein nitrogen is present in an amount in the range from about 30 atomic % to about 45 atomic %.

6. The coating material composition of claim 1, further comprising an optical band gap in the range from about 3.5 eV to about 5.5 eV.

7. The coating material composition of claim 1, further comprising a Young'"'"'s modulus of about 150 GPa or greater and a compressive stress of about −

400 MPa or greater.

8. The coating material composition of claim 1, further exhibiting a maximum hardness of about 17 GPa or greater, as measured by a Berkovich Indenter Test along an indentation depth of about 50 nm or greater.

9. The coating material composition of claim 1, wherein oxygen is present in an amount in the range from about 0.1 atomic % to about 7.5 atomic %.

10. The coating material composition of claim 1, wherein carbon is present in an amount in the range from about 0.1 atomic % to about 10 atomic %.

11. The coating material composition of claim 1, wherein fluorine is present in an amount in the range from about 0.1 atomic % to about 5 atomic %.