Semiconductor thin film structure and method of forming the same
First Claim
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1. A semiconductor thin film structure comprising:
- a sapphire substrate;
an inorganic thin film of alumina (Al2O3) formed on the substrate to define a plurality of cavities directly on the substrate such that the plurality of cavities separated from each other have a controlled shape, size and 2-dimensional arrangement, wherein the inorganic thin film is continuous, and the inorganic thin film is formed to a uniform thickness along topologies of the substrate and the cavities; and
a nitride semiconductor thin film formed on the substrate, wherein the nitride semiconductor thin film is upwardly grown from the substrate around the cavities to be combined on the cavities,wherein at least one of a shape, size and 2-dimensional arrangement of the plurality of cavities is adjusted to adjust at least one of stress applied to the nitride semiconductor thin film, a light extraction amount from the nitride semiconductor thin film and an emission pattern, andwherein portions of the inorganic thin film are directly contacted with the substrate, and the portions of the inorganic thin film which are directly contacted with the substrate are crystallized along a crystal direction of the substrate.
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Abstract
A method of forming a semiconductor thin film structure and a semiconductor thin film structure formed using the same is provided. A sacrificial layer is formed on a substrate and then patterned through various methods, an inorganic thin film is formed on the sacrificial layer and then the sacrificial layer is selectively removed to form a cavity defined by the substrate and the inorganic thin film on the substrate.
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Citations
18 Claims
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1. A semiconductor thin film structure comprising:
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a sapphire substrate; an inorganic thin film of alumina (Al2O3) formed on the substrate to define a plurality of cavities directly on the substrate such that the plurality of cavities separated from each other have a controlled shape, size and 2-dimensional arrangement, wherein the inorganic thin film is continuous, and the inorganic thin film is formed to a uniform thickness along topologies of the substrate and the cavities; and a nitride semiconductor thin film formed on the substrate, wherein the nitride semiconductor thin film is upwardly grown from the substrate around the cavities to be combined on the cavities, wherein at least one of a shape, size and 2-dimensional arrangement of the plurality of cavities is adjusted to adjust at least one of stress applied to the nitride semiconductor thin film, a light extraction amount from the nitride semiconductor thin film and an emission pattern, and wherein portions of the inorganic thin film are directly contacted with the substrate, and the portions of the inorganic thin film which are directly contacted with the substrate are crystallized along a crystal direction of the substrate. - View Dependent Claims (2, 3, 4, 5)
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6. A method of forming a semiconductor thin film structure, comprising:
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forming sacrificial layer patterns on a sapphire substrate; forming an inorganic thin film of alumina (Al2O3) on the sacrificial layer patterns, and the inorganic thin film is formed to a uniform thickness along topologies of the substrate and the sacrificial layer patterns; removing the sacrificial layer patterns from the substrate having the inorganic thin film formed thereon to form a plurality of cavities which are defined directly on the substrate and are separated from each other, wherein the inorganic thin film is continuous; heating the substrate such that solid phase epitaxy is started from an interface of the substrate and the inorganic thin film along a crystal direction of the substrate; and forming a nitride semiconductor thin film, wherein the nitride semiconductor thin film is formed using a portion of the substrate not having the cavities as a seed through an epitaxial lateral overgrowth (ELO) method and is upwardly grown from the substrate around the cavities to be combined on the cavities, wherein 2-dimensional arrangement of the plurality of cavities is adjusted to adjust at least one of a light extraction amount from the nitride semiconductor thin film and an emission pattern, wherein a shape, size and 2-dimensional arrangement of the sacrificial layer patterns are predetermined to define the plurality of cavities to have a controlled shape, size and 2-dimensional arrangement, wherein portions of the inorganic thin film are directly contacted with the substrate, and the portions of the inorganic thin film which are directly contacted with the substrate are crystallized along a crystal direction of the substrate, and wherein the cavities are spaces from which the sacrificial layer patterns are removed, and the sacrificial layer patterns are formed of a polymer. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A semiconductor device including a semiconductor thin film structure, comprising:
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a sapphire substrate; an inorganic thin film of alumina (Al2O3) formed on the substrate to define a plurality of cavities directly on the substrate such that the plurality of cavities separated from each other have a controlled shape, size and 2-dimensional arrangement, wherein the inorganic thin film is continuous, and the inorganic thin film is formed to a uniform thickness along topologies of the substrate and the cavities; and a nitride semiconductor thin film formed on the substrate, wherein the nitride semiconductor thin film is upwardly grown from the substrate around the cavities to be combined on the cavities, wherein at least one of a shape, size and 2-dimensional arrangement of the plurality of cavities is adjusted to adjust at least one of stress applied to the nitride semiconductor thin film, a light extraction amount from the nitride semiconductor thin film and an emission pattern, and wherein portions of the inorganic thin film are directly contacted with the substrate, and the portions of the inorganic thin film which are directly contacted with the substrate are crystallized along a crystal direction of the substrate.
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Specification