Fabrication of a strained region on a substrate
First Claim
1. A method of forming a strained channel for a field effect transistor, comprising:
- forming a sacrificial layer on a substrate;
forming a channel layer on the sacrificial layer;
forming a stressor layer on the channel layer, wherein the stressor layer applies a stress to the channel layer;
forming at least one etching trench by removing at least a portion of the stressor layer, channel layer, and sacrificial layer, wherein the etching trench exposes at least a portion of a sidewall of the sacrificial layer, and separates the stressor layer, channel layer, and sacrificial layer into two or more stressor islands, channel blocks, and sacrificial slabs; and
removing the sacrificial slabs to release the channel blocks from the substrate using a selective etch, wherein the channel blocks adhere to the substrate surface.
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Abstract
A method of forming a strained channel for a field effect transistor, including forming a sacrificial layer on a substrate, forming a channel layer on the sacrificial layer, forming a stressor layer on the channel layer, wherein the stressor layer applies a stress to the channel layer, forming at least one etching trench by removing at least a portion of the stressor layer, channel layer, and sacrificial layer, wherein the etching trench exposes at least a portion of a sidewall of the sacrificial layer, and separates the stressor layer, channel layer, and sacrificial layer into two or more stressor islands, channel blocks, and sacrificial slabs, and removing the sacrificial slabs to release the channel blocks from the substrate using a selective etch, wherein the channel blocks adhere to the substrate surface.
13 Citations
19 Claims
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1. A method of forming a strained channel for a field effect transistor, comprising:
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forming a sacrificial layer on a substrate; forming a channel layer on the sacrificial layer; forming a stressor layer on the channel layer, wherein the stressor layer applies a stress to the channel layer; forming at least one etching trench by removing at least a portion of the stressor layer, channel layer, and sacrificial layer, wherein the etching trench exposes at least a portion of a sidewall of the sacrificial layer, and separates the stressor layer, channel layer, and sacrificial layer into two or more stressor islands, channel blocks, and sacrificial slabs; and removing the sacrificial slabs to release the channel blocks from the substrate using a selective etch, wherein the channel blocks adhere to the substrate surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of forming a strained channel, comprising:
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forming a single crystal silicon-germanium sacrificial layer on a single crystal substrate surface; forming a single crystal silicon channel layer on the single crystal silicon-germanium sacrificial layer; forming a silicon nitride stressor layer on the single crystal silicon channel layer, wherein the silicon nitride stressor layer has a tensile or compressive stress; forming at least one etching trench by removing at least a portion of the silicon nitride stressor layer, single crystal silicon channel layer, and single crystal silicon-germanium sacrificial layer, wherein the etching trench exposes at least a portion of a sidewall of the single crystal silicon-germanium sacrificial layer, and separates the silicon nitride stressor layer, single crystal silicon channel layer, and single crystal silicon-germanium sacrificial layer into two or more silicon nitride stressor islands, single crystal silicon channel blocks, and single crystal silicon-germanium sacrificial slabs; and removing the single crystal silicon-germanium sacrificial slabs to release the single crystal silicon channel blocks from the substrate using a selective etch, wherein the single crystal silicon channel blocks adhere to the single crystal substrate surface. - View Dependent Claims (12, 13, 14, 15)
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16. An intermediate channel structure, comprising;
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a substrate with a single crystal surface; one or more silicon-germanium pillars, wherein each of the one or more silicon-germanium pillars supports a silicon channel block, and wherein the silicon channel block has a width in the range of about 250 nm to about 10 μ
m, and a length in the range of about 2 μ
m to about 100 μ
m; anda silicon nitride stressor island on each silicon channel block, wherein the stressor island applies a stress to a top surface of the silicon channel block. - View Dependent Claims (17, 18, 19)
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Specification