Touch display panel structure, method for forming the same, and touch display device

• US 9,798,405 B2
• Filed: 02/01/2016
• Issued: 10/24/2017
• Est. Priority Date: 04/01/2015
• Status: Active Grant

• Current Assignee: Shanghai Tianma Micro-Electronics Company Limited (Tianma Microelectronics Company Limited), Tianma Microelectronics Company Limited
• Original Assignee: Shanghai Tianma Micro-Electronics Company Limited (Tianma Microelectronics Company Limited), Tianma Microelectronics Company Limited
• Inventors: Ding, Hong, Du, Lingxiao, Lu, Feng
• Primary Examiner(s): PARDO, THUY N
• Application Number:
  US15/011,874
• Publication Number:
  US 20160291757A1
• Time in Patent Office: 631 Days
• Field of Search: 345173, 345205, 345214, 345 92, 345212, 349123, 257 71, 257 72, 216 17
• CPC Class Codes: G02F 1/13338 Input devices, e.g. touch panels
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: G06F 2203/04103 Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
• CPC Class Codes: G06F 2203/04111 Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
• CPC Class Codes: G06F 3/0412 Digitisers structurally integrated in a display
• CPC Class Codes: G06F 3/04164 Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads
• CPC Class Codes: G06F 3/0443 using a single layer of sensing electrodes
• CPC Class Codes: G06F 3/0446 using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes

Abstract

A touch display panel structure, a method for forming the touch display panel structure, and a touch display device are provided. The touch display panel structure includes: a substrate, scan lines each including a plurality of scan line segments, touch electrode lines each disposed at an interval between adjacent scan line segments; a first dielectric layer and data lines; a second dielectric layer and a first interconnection structure; a first via hole through the first dielectric layer and the second dielectric layer; a third dielectric layer a common electrode layer; a second via hole through the first dielectric layer and the second dielectric layer; and a plurality of third via holes through the third dielectric layer, wherein each touch electrode is connected to a touch electrode line via the second via hole and the third via hole.

Claims

1. A touch display panel structure, comprising:

a substrate;

a plurality of scan lines extending in a first direction on the substrate, wherein each scan line comprises a plurality of scan line segments arranged in the first direction, with an interval between adjacent scan line segments;

a plurality of touch electrode lines disposed in a same layer as the plurality of scan lines on the substrate, wherein the plurality of touch electrode lines extend in a second direction, each touch electrode line is disposed at the interval between the adjacent scan line segments, and the touch electrode line does not contact the adjacent scan line segments;

a first dielectric layer disposed on both of the plurality of scan lines and the plurality of touch electrode lines;

a plurality of data lines disposed on the first dielectric layer, each of the plurality of data lines are disposed correspondingly above the touch electrode lines;

a second dielectric layer disposed on the plurality of data lines;

a plurality of first interconnection structures disposed on the second dielectric layer;

a plurality of first via holes through the first dielectric layer and the second dielectric layer respectively, wherein the first interconnection structure is connected to adjacent scan line segments via the first via hole;

a third dielectric layer disposed on the plurality of the first interconnection structures;

a common electrode layer disposed on the third dielectric layer;

a plurality of second via holes through the first dielectric layer and the second dielectric layer respectively; and

a plurality of third via holes through the third dielectric layer,

wherein each touch electrode is connected to a touch electrode line via a second via hole and a third via hole.

2. The touch display panel structure according to claim 1, further comprising a conductive underlay disposed in a same layer as the first interconnection structures, wherein the conductive underlay is disposed on the touch electrode line 130 via the second via hole 142.

3. The touch display panel structure according to claim 1, wherein the first interconnection structure spans the interval between the adjacent scan line segments, and two ends of the first interconnection structure are respectively connected to the adjacent scan line segments via the first via hole.

4. The touch display panel structure according to claim 1, further comprising a pixel electrode array disposed in a same layer as the plurality of first interconnection structures.

5. The touch display panel structure according to claim 1, further comprising a pixel electrode array disposed in the same layer as the common electrode layer.

6. The touch display panel structure according to claim 4, wherein the material of the pixel electrode array is the same as the material of the plurality of first interconnection structures.

7. The touch display panel structure according to claim 6, wherein both the material of the pixel electrode array and the material of the plurality of first interconnection structures are indium tin oxide.

8. The touch display panel structure according to claim 1, wherein the first direction in which the scan lines extend is perpendicular to the second direction in which the touch electrode lines extend.

9. The touch display panel structure according to claim 1, wherein the material of the scan line is the same as the material of the touch electrode line.

10. The touch display panel structure according to claim 1, further comprising an organic layer disposed between the second dielectric layer and the plurality of first interconnection structures, wherein the first via holes and the second via holes are further through the organic layer.

11. A touch display device comprising a touch display panel structure, wherein the touch display panel structure comprises:

a substrate;

a plurality of scan lines extending in a first direction on the substrate, wherein each scan line comprises a plurality of scan line segments arranged in the first direction, with an interval between adjacent scan line segments;

a plurality of touch electrode lines disposed in a same layer as the plurality of scan lines on the substrate, wherein the plurality of touch electrode lines extend in a second direction, each touch electrode line is disposed at the interval between the adjacent scan line segments, and the touch electrode line does not contact the adjacent scan line segments;

a first dielectric layer disposed on both of the plurality of scan lines and the plurality of touch electrode lines;

a plurality of data lines disposed on the first dielectric layer, each of the plurality of data lines are disposed correspondingly above the touch electrode lines;

a second dielectric layer disposed on the plurality of data lines;

a plurality of first interconnection structures disposed on the second dielectric layer;

a plurality of first via holes through the first dielectric layer and the second dielectric layer respectively, wherein the first interconnection structure is connected to adjacent scan line segments via the first via hole;

a third dielectric layer disposed on the plurality of the first interconnection structures;

a common electrode layer disposed on the third dielectric layer;

a plurality of second via holes through the first dielectric layer and the second dielectric layer respectively; and

a plurality of third via holes through the third dielectric layer,

wherein each touch electrode is connected to a touch electrode line via a second via hole and a third via hole.

12. A method for forming a touch display panel structure, comprising:

providing a substrate,

forming a plurality of scan lines extending in a first direction and a plurality of touch electrode lines extending in a second direction on the substrate, wherein each scan line comprises a plurality of scan line segments arranged in the first direction, with an interval between adjacent scan line segments, each touch electrode line is disposed at the interval between the adjacent scan line segments, and the touch electrode line does not contact the adjacent scan line segments;

forming a first dielectric layer on both of the plurality of scan lines and the plurality of touch electrode lines;

forming a plurality of data lines on the first dielectric layer, wherein each of the plurality of data lines are disposed correspondingly above the touch electrode lines;

forming a second dielectric layer on the plurality of data lines;

forming a plurality of first via holes and a plurality of second via holes through the first dielectric layer and the second dielectric layer respectively;

forming a plurality of first interconnection structures on the second dielectric layer, wherein each of the first interconnection structures is connected to adjacent scan line segments via the first via hole;

forming a third dielectric layer on the plurality of first interconnection structures;

forming a plurality of third via holes through the third dielectric layer; and

forming a common electrode layer on the third dielectric layer, wherein the common electrode layer comprises a plurality of touch electrodes separated from each other, and each of the touch electrodes is connected to a touch electrode line via a second via hole and a third via hole.

13. The method for forming a touch display panel structure according to claim 12, wherein the forming process of the scan lines and the touch electrode lines comprises:

depositing a first conductive material layer on the substrate;

forming a first photoresist layer on the first conductive material layer;

providing a first mask with a pattern, exposing the first photoresist layer through the first mask to form the pattern in the first photoresist layer, wherein a part of the first conductive material layer is uncovered owing to the pattern in the first photoresist layer; and

taking the first photoresist layer with the formed pattern as an etching mask, etching and removing the uncovered part of the first conductive material layer, forming the scan lines and the touch electrode lines by the remaining part of the first conductive material layer.

14. The method for forming a touch display panel structure according to claim 12, wherein a plurality of conductive underlays are further formed in a same layer as the first interconnection structures in the forming process of the first interconnection structures, the conductive underlay is deposited on the touch electrode line via the second via hole.

15. The method for forming a touch display panel structure according to claim 12, wherein the forming process of the first interconnection structures further comprises forming a pixel electrode array in a same layer as the first interconnection structures.

16. The method for forming a touch display panel structure according to claim 15, wherein the process of forming a pixel electrode array in a same layer as the first interconnection structures comprises:

forming a second conductive material layer on the second dielectric layer;

forming a second photoresist layer on the second conductive material layer;

providing a second mask with a pattern, exposing the second photoresist layer through the second mask to form the pattern in the second photoresist layer, wherein a part of the second conductive material layer is uncovered owing to the pattern in the second photoresist layer; and

taking the second photoresist layer with the formed pattern as an etching mask, etching and removing the uncovered part of the second conductive material layer, forming the first interconnection structures and the pixel electrode array by the remaining part of the second conductive material layer.

17. The method for forming a touch display panel structure according to claim 12, wherein the forming process of the common electrode layer on the third dielectric layer further comprises:

forming a pixel electrode array in a same layer as the common electrode layer.

18. The method for forming a touch display panel structure according to claim 12, further comprising:

forming an organic layer on the second dielectric layer after forming the second dielectric layer on the plurality of data lines; and

forming a plurality of first via holes and a plurality of second via holes through the first dielectric layer, the second dielectric layer and the organic layer.