×

Method for manufacturing active-matrix display panel, and active-matrix display panel

  • US 9,799,687 B2
  • Filed: 06/10/2015
  • Issued: 10/24/2017
  • Est. Priority Date: 06/19/2014
  • Status: Active Grant
First Claim
Patent Images

1. A method of manufacturing an active-matrix display panel, comprising:

  • forming a thin film transistor (TFT) layer on a substrate;

    forming a planarizing layer on the TFT layer; and

    forming a display element unit on the planarizing layer, whereinthe forming of the TFT layer includes forming a passivation layer that covers one electrode and that comes into contact with the planarizing layer after forming of the planarizing layer, the one electrode being one of;

    (i) a source electrode;

    (ii) a drain electrode; and

    (iii) a connection electrode connected to the source electrode or the drain electrode,the forming of the display element unit includes forming a lower electrode that is in contact with the planarizing layer and connects to the one electrode,connecting the one electrode and the lower electrode involves;

    forming, in the planarizing layer, a contact hole that exposes a surface of the passivation layer at the bottom thereof;

    forming, in the passivation layer, a contact hole that connects to the contact hole in the planarizing layer and exposes the one electrode at the bottom thereof, through dry-etching the passivation layer exposed at the bottom of the contact hole in the planarizing layer by using a gas containing fluorine;

    after forming the contact hole in the passivation layer, forming a liquid-repellent film containing fluorine on an inner wall surface of the passivation layer facing the contact hole in the passivation layer; and

    forming the lower electrode along an inner wall surface of the planarizing layer facing the contact hole in the planarizing layer and the inner wall surface of the passivation layer facing the contact hole in the passivation layer.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×