Method and apparatus for depositing atomic layers on a substrate

• US 9,803,280 B2
• Filed: 03/21/2016
• Issued: 10/31/2017
• Est. Priority Date: 02/11/2010
• Status: Active Grant

• Current Assignee: Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
• Original Assignee: Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
• Inventors: Vermeer, Adrianus Johannes Petrus Maria, Roozeboom, Freddy, Van Deelen, Joop
• Primary Examiner(s): Miller, Jr., Joseph
• Application Number:
  US15/075,341
• Publication Number:
  US 20160201194A1
• Time in Patent Office: 589 Days
• Field of Search: None
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/45551 for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: C23C 16/545 for coating elongated substrates
• CPC Class Codes: H01L 21/67784 using air tracks

Abstract

Method of depositing an atomic layer on a substrate. The method comprises supplying a precursor gas from a precursor-gas supply of a deposition head that may be part of a rotatable drum. The precursor gas is provided from the precursor-gas supply towards the substrate. The method further comprises moving the precursor-gas supply by rotating the deposition head along the substrate which in its turn is moved along the rotating drum.

Claims

1. A method for depositing a plurality of atomic layers on a substrate, the method comprising:

supplying a precursor gas from an output face of a deposition head towards the substrate, the output face having a substantially rounded shape at least partly defining a movement path of the substrate;

rotating the deposition head, with a rotational frequency controlled by a driving controller, while supplying the precursor gas; and

moving the substrate along the movement path with a translational velocity controlled by a transportation controller to deposit the plurality of atomic layers while continuously rotating the deposition head in one direction of rotation,

wherein the driving controller and transportation controller impart, in conjunction, different rates and/or directions of movement between the deposition head and substrate.

2. The method of claim 1, wherein the movement path of the substrate is along an at least partly rounded circumference of a rotatable drum that comprises the deposition head.

3. The method according to claim 1, wherein the precursor gas is supplied along the output face, in a direction along or inclined with the axis of rotation of the deposition head through an elongated precursor gas supply formed along, or inclined with respect to, an axial direction of rotation of the deposition head.

4. The method of claim 3, further comprising supplying the precursor gas in a direction that is transverse with respect to the axial direction of rotation of the deposition head.

5. The method of claim 4, wherein a longitudinal direction of said elongated precursor gas supply form extends along a helical path over the output face.

6. The method of claim 5, wherein the elongated precursor gas supply form extends at least one full rotation about the deposition head.

7. The method of claim 1, wherein the movement path of the substrate is along a precursor gas supply on the output face of the deposition head, and wherein the substrate is moved along the movement path, subsequently to or simultaneously with supplying the precursor gas from the output face, for at least one full rotation of the deposition head.

8. The method of claim 1, wherein the movement path of the substrate is along a precursor gas supply on the output face of the deposition head, and wherein the substrate is moved along the movement path, subsequently to or simultaneously with supplying the precursor gas from the output face, for less than one full rotation of the deposition head.

9. The method of claim 1, wherein the movement path of the substrate is a helical path along a precursor gas supply on the output face of the deposition head, the method comprising moving the substrate along the helical path around the output face of the deposition head.

10. The method of claim 1, further comprising supplying a bearing gas between the deposition head and the substrate for forming a gas-bearing layer that separates the substrate and the deposition head.

11. The method of claim 10, wherein the gas-bearing layer provides a bearing stiffness to separate the substrate and the deposition head between 10³ and 10¹⁰ newtons per millimeter.

12. The method of claim 10, wherein the bearing gas is supplied from a bearing gas supply on the output face of the deposition head towards the substrate for providing the gas-bearing layer, and wherein the precursor gas is supplied from a precursor-gas supply in a cavity on the output face of the deposition head and faces the substrate, the method further comprising draining the precursor gas into a precursor gas drain on the output face of the deposition head from the cavity, thereby substantially preventing the precursor gas from escaping the cavity, wherein the bearing gas supply is at a distance from the cavity.

13. The method of claim 1, wherein the driving controller and transportation controller, in conjunction, impart a translational velocity of the deposition head that is greater than the translational velocity of the substrate.

14. The method of claim 13, wherein the driving controller and transportation controller, in conjunction, impart a translational velocity of the deposition head that is at least 5 times greater than the translational velocity of the substrate.

15. The method of claim 14, wherein the driving controller and transportation controller, in conjunction, impart a translational velocity of the deposition head that is at least 10 times greater than the translational velocity of the substrate.

16. The method of claim 15, wherein the driving controller and transportation controller, in conjunction, impart a translational velocity of the deposition head that is at least 10 times greater than the translational velocity of the substrate.

17. The method of claim 16, wherein the driving controller and transportation controller, in conjunction, impart a translational velocity of the deposition head that is at least 100 times greater than the translational velocity of the substrate.

18. The method of claim 1, wherein the rotational frequency, controlled by the driving controller, is 0.1 revolutions per second or more.

19. The method of claim 1, further comprising confining the precursor gas using a sealing element, wherein the sealing element faces the deposition head at locations outside of where the substrate faces the deposition head.