Sapphire sensor for measuring pressure and temperature

• US 9,804,033 B2
• Filed: 04/25/2014
• Issued: 10/31/2017
• Est. Priority Date: 04/25/2013
• Status: Active Grant

• Current Assignee: Sentek Instrument, LLC
• Original Assignee: Sentek Instrument, LLC
• Inventors: Dong, Bo, Wang, Anbo
• Primary Examiner(s): CAPUTO, LISA M
• Assistant Examiner(s): Plumb, Nigel
• Application Number:
  US14/261,883
• Publication Number:
  US 20140318273A1
• Time in Patent Office: 1,285 Days
• Field of Search: 73862624, 73862621, 73862381, 73862
• CPC Class Codes: G01B 11/272 using photoelectric detection means
• CPC Class Codes: G01D 5/266 by interferometric means G01D5/353 takes precedence
• CPC Class Codes: G01D 5/268 using optical fibres G01D5/28 - G01D5/38 take precedence
• CPC Class Codes: G01K 11/3206 at discrete locations in the fibre, e.g. using Bragg scattering
• CPC Class Codes: G01L 19/0092 Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature G01L9/025, G01L9/045, G01L9/065, G01L9/085, G01L9/105, G01L9/125, G01L19/02, G01L19/04 take precedence; measuring two or more variable G01D21/02; temperature sensors with pressure compensation G01K1/26
• CPC Class Codes: G01L 9/0079 with Fabry-Perot arrangements

Abstract

A sensor for measuring pressure, temperature or both may be provided. The sensor may include a diaphragm that may respond to a change in temperature or pressure, a base connected to the diaphragm, a cavity, and an optical fiber that may conduct light reflected off of a surface of the diaphragm. The diaphragm and base may be sapphire elements. An interrogator may be provided for detecting a deflection of the diaphragm.

Claims

1. A sensor apparatus for measuring a pressure, a temperature, or both, the sensor comprising:

a diaphragm configured to respond to a change in temperature or pressure, the diaphragm comprising at least one sapphire element;

a base comprising at least one sapphire element;

a cavity defined between the diaphragm and the base by a sapphire spacer having a closed geometric shape and a thickness which is large relative to a thickness of said diaphragm, said diaphragm, said base and said sapphire spacer being bonded together; and

an optical fiber that is configured to conduct light reflected off boundaries of said cavity while reducing reflection from an end surface of said optical fiber.

2. The sensor apparatus of claim 1, wherein the at least two sapphire elements are connected via sapphire-to-sapphire direct bonds.

3. The sensor apparatus of claim 2, wherein the at least two sapphire elements are directly bonded such that the cavity is defined by a substantially homogenous sapphire structure.

4. The sensor apparatus of claim 1, wherein a portion of the sensor that substantially surrounds the cavity consists essentially of sapphire.

5. The sensor apparatus of claim 1, wherein the diaphragm has a diameter or width extending across a surface of the diaphragm, and a length of the base is greater than a bonded diameter or width of the diaphragm.

6. The sensor apparatus of claim 5, wherein the length of the base is at least twice the bonded diameter or width of the diaphragm.

7. The sensor apparatus of claim 5, wherein the length of the base is at least three times the bonded diameter or width of the diaphragm.

8. The sensor apparatus of claim 1, wherein the optical fiber terminates at a distal end thereof, and the optical fiber distal end is coupled to the base and is disposed proximal to the cavity.

9. The sensor apparatus of claim 8, wherein the cavity, base and optical fiber are arranged such that light reflected off of a surface of the diaphragm must pass through a portion of the base or a chamber defined in the base prior to reaching the optical fiber.

10. The sensor apparatus of claim 8, wherein the base is a solid sapphire element and the optical fiber is configured to transmit light that passes through the base.

11. The sensor apparatus of claim 10, wherein a lens is disposed at a proximal surface of the base, the lens being configured to collimate light passing between the base and the optical fiber.

12. The sensor apparatus of claim 10, wherein a light collimator or a fiber portion configured to act as a light collimator is provided at or near the distal end of the optical fiber.

13. The sensor apparatus of claim 8, wherein the optical fiber is arranged for conducting standoff interrogation.

14. The sensor apparatus of claim 8, wherein the base has a channel defined therein.

15. The sensor apparatus of claim 14, wherein the channel has a constant diameter along its length.

16. The sensor apparatus of claim 14, wherein the channel diameter narrows at a distal portion thereof.

17. The sensor apparatus of claim 16, wherein the optical fiber distal end is disposed adjacent to the narrowed portion of the channel.

18. The sensor apparatus of claim 14, wherein the channel is a partial hole that terminates at a distal end that is disposed proximal to the cavity.

19. The sensor apparatus of claim 18, wherein the optical fiber distal end is disposed adjacent to the distal end of the channel.

20. The sensor apparatus of claim 14, wherein the distal end of the optical fiber is disposed within the channel, remote from the cavity such that light may pass along a length of the channel prior to reaching the distal end of the optical fiber.

21. The sensor apparatus of claim 14, wherein at least a distal portion of the optical fiber comprises a sapphire optical fiber.

22. The sensor apparatus of claim 14, wherein the optical fiber comprises a length of glass fiber spliced to a length of sapphire fiber.

23. The sensor apparatus of claim 14, wherein the optical fiber comprises a length of graded-index fiber.

24. The sensor apparatus of claim 23, wherein the graded-index fiber is configured to collimate light that passes through the optical fiber.

25. The sensor apparatus of claim 23, wherein the optical fiber comprises a length of glass fiber spliced to a length of graded-index fiber.

26. The sensor apparatus of claim 14, wherein a portion of the optical fiber is disposed within a ferrule assembly that is mounted within the channel.

27. The sensor apparatus of claim 14, wherein a portion of the optical fiber is coupled to a fiber collimator that is mounted within or outside the channel.

28. The sensor apparatus of claim 1, wherein the optical fiber, the base, the diaphragm and the cavity are arranged such that when light is transmitted through the fiber toward the diaphragm, at least four reflections, R1, R2, R3 and R4, are generated within the sensor apparatus.

29. The sensor apparatus of claim 28, wherein R1 and R2 are respectively generated at the distal and proximal surfaces of the diaphragm, and wherein R3 and R4 are generated by respective surfaces of the base.

30. The sensor apparatus according to claim 29 wherein and end of said optical fiber is spaced from a surface of said base and has an anti-reflection coating thereon.

31. The sensor apparatus of claim 1, wherein said base has a length sufficient to isolate said cavity from stresses at a bottom of said base.

32. A system for measuring a pressure, a temperature, or both, the system comprising:

a diaphragm configured to respond to a change in temperature or pressure, the diaphragm comprising at least one sapphire element;

a base comprising at least one sapphire element;

a cavity defined between the diaphragm and the base by a sapphire spacer having a closed geometric shape and a thickness which is large relative to a thickness of said diaphragm, said diaphragm, said base and said sapphire spacer being bonded together;

an optical fiber that is configured to conduct light reflected off of a surface of the diaphragm and a boundary of said cavity; and

an interrogator for detecting a deflection and an OPD of the diaphragm, or the base, respectively.

33. The system of claim 32, wherein the system is configured to demodulate one or more signals received by the interrogator.

34. The system of claim 32, wherein a whitelight interferometry unit is provided, the whitelight interferometry unit being configured to demodulate one or more signals received by the interrogator.

35. The system of claim 34, wherein the system further comprises a tunable laser.

36. The system of claim 34, wherein the system further comprises a broadband light source and an optical spectrometer.

37. The system according to claim 32 wherein and end of said optical fiber is spaced from a surface of said base and has an anti-reflection coating thereon.

38. The system according to claim 32, wherein said base has a length sufficient to isolate said cavity from stresses at a bottom of said base.

39. A sensor apparatus for measuring a pressure, a temperature, or both, the sensor comprising:

a diaphragm configured to respond to a change in temperature or pressure, the diaphragm comprising at least one sapphire element;

a base connected to the diaphragm, the base comprising at least one sapphire element;

a cavity defined between the diaphragm and the optical fiber by a sapphire spacer having a thickness which is large relative to a thickness of said diaphragm, and

an optical fiber configured to conduct light reflected off a surface of said diaphragm or boundary of said cavity.

40. The apparatus of claim 39, further comprising a fiber ferrule, wherein the fiber is mounted in the fiber ferrule, which is secured in a center hole of the base.

41. The apparatus of claim 40, wherein the fiber ferrule is separated from the diaphragm by a distance, such that the space between the ferrule and the diaphragm defines a Fabry-Perot cavity.

42. The apparatus of claim 40, further comprising a well disposed in the surface of the ferrule facing the diaphragm.

43. The sensor apparatus according to claim 39 wherein and end of said optical fiber is spaced from a surface of said base and has an anti-reflection coating thereon.

44. The sensor apparatus according to claim 39, wherein said base has a length sufficient to isolate said cavity from stresses at a bottom of said base.