MEMS magnetic field sensor
First Claim
1. A magnetic field sensor for sensing a magnetic field caused by a current to be measured, the magnetic field sensor comprising:
- a substrate;
a first drive electrode having a path, which flows a reference current supplied from the substrate, to be movable by the magnetic field of the current to be measured; and
a second drive electrode having a path, which flows the reference current supplied from the substrate, to be movable by the magnetic field of the current to be measured,wherein variation of a capacitance is measured by movement of the first drive electrode and the second drive electrode.
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Abstract
The disclosure provides a magnetic field sensor for sensing the magnetic field caused by a current to be measured, which includes: substrate; a first drive electrode with a path for flowing a reference current supplied from the substrate arranged so as to be moveable by the magnetic field of the current to be measured; and a second drive electrode with a path for flowing a reference current supplied from the substrate arranged so as to be moveable by the magnetic field of the current to be measured, thus measuring the variation of a capacitance caused by the movement of the first drive electrode and the second drive electrode. Hence, the sensing is achieved by the two drive electrodes with no reference electrode, thus maximizing the mechanical displacement to improve the sensing capability.
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Citations
15 Claims
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1. A magnetic field sensor for sensing a magnetic field caused by a current to be measured, the magnetic field sensor comprising:
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a substrate; a first drive electrode having a path, which flows a reference current supplied from the substrate, to be movable by the magnetic field of the current to be measured; and a second drive electrode having a path, which flows the reference current supplied from the substrate, to be movable by the magnetic field of the current to be measured, wherein variation of a capacitance is measured by movement of the first drive electrode and the second drive electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification