Semiconductor device

• US 9,806,099 B2
• Filed: 09/26/2016
• Issued: 10/31/2017
• Est. Priority Date: 09/13/2012
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Miyake, Hiroyuki, Shishido, Hideaki, Koyama, Jun
• Primary Examiner(s): Tran, Thien F
• Application Number:
  US15/275,687
• Publication Number:
  US 20170012062A1
• Time in Patent Office: 400 Days
• Field of Search: 247 43, 247 59, 247 72
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A semiconductor device including a capacitor whose charge capacity is increased while improving the aperture ratio is provided. Further, a semiconductor device which consumes less power is provided. A transistor which includes a light-transmitting semiconductor film, a capacitor in which a dielectric film is provided between a pair of electrodes, an insulating film which is provided over the light-transmitting semiconductor film, and a first light-transmitting conductive film which is provided over the insulating film are included. The capacitor includes the first light-transmitting conductive film which serves as one electrode, the insulating film which functions as a dielectric, and a second light-transmitting conductive film which faces the first light-transmitting conductive film with the insulating film positioned therebetween and functions as the other electrode. The second light-transmitting conductive film is formed over the same surface as the light-transmitting semiconductor film of the transistor and is a metal oxide film containing a dopant.

Claims

1. A display device comprising:

a transistor comprising;

a gate electrode;

a gate insulating film over the gate electrode; and

a semiconductor film comprising a channel formation region over the gate electrode with the gate insulating film therebetween,

a conductive layer, wherein a portion of the gate insulating film is formed over the conductive layer; and

a metal oxide layer over the gate insulating film,

wherein the metal oxide layer contacts the conductive layer through an opening of the gate insulating film,

wherein the channel formation region comprises an oxide semiconductor, and

wherein the metal oxide layer contains hydrogen at a higher concentration than the semiconductor film.

2. The display device according to claim 1, wherein the semiconductor film and the metal oxide layer are over and in contact with a surface.

3. The display device according to claim 2, wherein the gate insulating film includes the surface.

4. The display device according to claim 1, further comprising a capacitor line, wherein the metal oxide layer is in direct contact with the capacitor line.

5. An electronic device comprising the display device according to claim 1.

6. A display device comprising:

a transistor comprising;

a gate electrode;

a gate insulating film over the gate electrode; and

a semiconductor film comprising a channel formation region over the gate electrode with the gate insulating film therebetween,

a conductive layer, wherein a portion of the gate insulating film is formed over the conductive layer;

a metal oxide layer over the gate insulating film; and

a nitride insulating film over and in contact with the metal oxide layer,

wherein the metal oxide layer contacts the conductive layer through an opening of the gate insulating film,

wherein the channel formation region comprises an oxide semiconductor, and

wherein the metal oxide layer contains hydrogen at a higher concentration than the semiconductor film.

7. The display device according to claim 6, wherein the semiconductor film and the metal oxide layer are over and in contact with a surface.

8. The display device according to claim 7, wherein the gate insulating film includes the surface.

9. The display device according to claim 6, further comprising a capacitor line, wherein the metal oxide layer is in direct contact with the capacitor line.

10. An electronic device comprising the display device according to claim 6.

11. A display device comprising:

a transistor comprising;

a gate electrode;

a gate insulating layer over the gate electrode; and

a semiconductor layer comprising a channel formation region over the gate electrode with the gate insulating layer therebetween,

a conductive layer, wherein a portion of the gate insulating layer is over the conductive layer; and

a metal oxide layer over the gate insulating layer,

wherein the metal oxide layer contacts the conductive layer through an opening of the gate insulating layer,

wherein the channel formation region comprises an oxide semiconductor, and

wherein the metal oxide layer contains hydrogen at a higher concentration than the semiconductor layer.

12. The display device according to claim 11, wherein the semiconductor layer and the metal oxide layer are over and in contact with a surface.

13. The display device according to claim 12, wherein the gate insulating layer includes the surface.

14. The display device according to claim 11, further comprising a capacitor line, wherein the metal oxide layer is in direct contact with the capacitor line.

15. An electronic device comprising the display device according to claim 11.