Dry plasma etch method to pattern MRAM stack

• US 9,806,252 B2
• Filed: 06/24/2015
• Issued: 10/31/2017
• Est. Priority Date: 04/20/2015
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Tan, Samantha, Kim, Taeseung, Yang, Wenbing, Marks, Jeffrey, Lill, Thorsten
• Primary Examiner(s): OLSEN, ALLAN W
• Application Number:
  US14/749,291
• Publication Number:
  US 20160308112A1
• Time in Patent Office: 860 Days
• Field of Search: None
• CPC Class Codes: C23F 1/12 Gaseous compositions
• CPC Class Codes: C23F 4/00 Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma
• CPC Class Codes: H01J 37/32651 Shields, e.g. dark space shields, Faraday shields
• CPC Class Codes: H10B 61/00 Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
• CPC Class Codes: H10N 35/01 Manufacture or treatment
• CPC Class Codes: H10N 50/01 Manufacture or treatment

Abstract

Methods of etching metal by depositing a material reactive with a metal to be etched and a halogen to form a volatile species and exposing the substrate to a halogen-containing gas and activation gas to etch the substrate are provided. Deposited materials may include silicon, germanium, titanium, carbon, tin, and combinations thereof. Methods are suitable for fabricating MRAM structures and may involve integrating ALD and ALE processes without breaking vacuum.

Claims

1. A method of etching a substrate in a chamber, the method comprising:

(a) exposing the substrate comprising one or more layers to a halogen-containing gas to modify a surface of one or more layers on the substrate by adsorbing the halogen-containing gas onto the surface of the one or more layers,

(b) exposing the substrate to an activation gas and an activation source to etch the modified surface of the one or more layers on the substrate, and

(c) during (a) and (b), providing to the chamber a reactive material that is reactive with both the halogen-containing gas and a material of the one or more layers on the substrate to form a volatile species,

wherein performing (a) and (b) constitutes one cycle of atomic layer etching.

2. The method of claim 1, wherein the reactive material is selected from the group consisting of silicon-containing material, titanium-containing material, germanium-containing material, tin-containing material, carbon-containing material, and combinations thereof.

3. The method of claim 1, wherein the halogen-containing gas is selected from the group consisting of Cl₂, BCl₃, BBr₃, BI₃, F₂, BF₃, Br₂, I₂ and combinations thereof.

4. The method of claim 3, wherein the reactive material is the silicon-containing material and is selected from the group consisting of silicon nitride, silicon oxide, and silicon.

5. The method of claim 1, wherein (a) and (b) are repeated in two or more cycles of atomic layer etching.

6. The method of claim 5, wherein the two or more cycles etch a first set of metal layers and a dielectric layer, and wherein (c) is performed after etching the dielectric layer and before etching a second set of metal layers underlying the dielectric layer.

7. The method of claim 1, wherein (a)-(c) are performed without breaking vacuum.

8. The method of claim 1, wherein (c) mitigates re-deposition of metal-containing byproducts.

9. The method of claim 1, wherein the material of the one or more layers of the substrate is selected from the group consisting of Period IV transition metals, Period V transition metals, Period VI transition metals, and combinations thereof.

10. The method of claim 9, wherein the material of the one or more layers of the substrate comprises dielectric material.

11. The method of claim 10, wherein the metal selected from the group consisting of Period IV transition metals, Period V transition metals, Period VI transition metals, and combinations thereof and the dielectric material are adjacent layers on the substrate.

12. The method of claim 11, wherein the dielectric material is MgO and the dielectric material is adjacent to both a layer comprising CoFe and a layer comprising CoPt.

13. The method of claim 11, further comprising:

(d) etching the metal selected from the group consisting of Period IV transition metals, Period V transition metals, Period VI transition metals, and combinations thereof to a remaining thickness of between about 0 Å and

about 10 Å

; and

(e) after etching the metal layer, etching the dielectric material by exposing the substrate to the activation gas and the activation source without exposing the dielectric material to the halogen-containing gas.

14. The method of claim 1, wherein the reactive material is deposited by a self-limiting reaction.

15. The method of claim 1, further comprising applying a bias to the pedestal during (c) at a power less than about 100 V.

16. The method of claim 1, wherein the activation source is selected from the group consisting of plasma, ion-beam etching, and thermal activation.

17. The method of claim 1, further comprising:

(d) prior to performing (a) and (b), conformally depositing a silicon nitride layer by plasma enhanced chemical vapor deposition to form the reactive material over the substrate; and

(e) repeating (a) and (b) in two or more cycles,

wherein the halogen-containing gas in (a) is a combination of BCl₃ and Cl₂.

18. The method of claim 17, further comprising:

(f) performing (c) when a metal layer adjacent to a dielectric layer has been etched to a remaining thickness between about 0 Å and

about 10 Å

;

(g) sputtering the substrate with the activation gas without exposing the substrate to the halogen-containing gas to etch the dielectric layer comprising MgO; and

(h) after sputtering the substrate in (g), repeating (a) and (b) in two or more cycles to etch at least one of the one or more layers.

19. A method of etching a substrate in a chamber, the method comprising:

(a) providing a substrate comprising one or more layers to a chamber;

(b) depositing a first material over the one or more layers, the reactive material being reactive with a halide and a second material of the one or more layers to form a volatile species;

(c) after depositing the first material, exposing the substrate comprising the reactive material to a halogen-containing gas to modify a surface of the second material of one or more layers on the substrate by adsorbing the halogen-containing gas to the surface; and

(b) exposing the substrate to an activation gas and igniting a plasma to etch the modified surface of the second material of the one or more layers on the substrate by forming the volatile species.

20. The method of claim 19, wherein the first material is selected from the group consisting of silicon-containing material, titanium-containing material, germanium-containing material, tin-containing material, carbon-containing material, and combinations thereof, and wherein the second material is selected from the group consisting of Period IV transition metals, Period V transition metals, Period VI transition metals, and combinations thereof.