Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
First Claim
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1. A physical quantity sensor comprising:
- a substrate;
a support section which is fixed to the substrate;
a movable section which is connected to the support section through a connection portion and can oscillate with respect to the support section; and
a fixed electrode which is disposed on the substrate to face the movable section,wherein the movable section includes a first mass portion which is provided on one side with respect to the connection portion, a second mass portion which is provided on the other side and has larger mass than the first mass portion, a first movable electrode disposed in the first mass portion, and a second movable electrode disposed in the second mass portion,the fixed electrode includes a first fixed electrode which is disposed to face the first mass portion, a second fixed electrode which is disposed to face the second mass portion, and a dummy electrode which is disposed to face the movable section so as not to come into contact with the first fixed electrode and the second fixed electrode and has the same potential as potential of the movable section,the dummy electrode includes a first dummy electrode provided between the first fixed electrode and the second fixed electrode, a second dummy electrode provided on the side opposite to the first dummy electrode, of the first fixed electrode, and a third dummy electrode provided on the side opposite to the first dummy electrode, of the second fixed electrode, and the fixed electrode and the dummy electrode are disposed such that a capacity offset is smaller than a capacity offset in a case where distances between the first fixed electrode and the first and second dummy electrodes and distances between the second fixed electrode and the first and third dummy electrodes are the same.
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Abstract
A physical quantity sensor includes: an oscillating body having a support section and a movable section which is connected to the support section through connection portions, in which the movable section has a first movable portion and a second movable portion; a first fixed electrode which is disposed to face the first movable portion; a second fixed electrode which is disposed to face the second movable portion; and a dummy electrode which is disposed to face the second movable portion so as not to overlap the second fixed electrode and has the same potential as potential of the oscillating body, in which the first fixed electrode is disposed such that a portion thereof overlaps the support section when viewed in a plan view.
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Citations
6 Claims
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1. A physical quantity sensor comprising:
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a substrate; a support section which is fixed to the substrate; a movable section which is connected to the support section through a connection portion and can oscillate with respect to the support section; and a fixed electrode which is disposed on the substrate to face the movable section, wherein the movable section includes a first mass portion which is provided on one side with respect to the connection portion, a second mass portion which is provided on the other side and has larger mass than the first mass portion, a first movable electrode disposed in the first mass portion, and a second movable electrode disposed in the second mass portion, the fixed electrode includes a first fixed electrode which is disposed to face the first mass portion, a second fixed electrode which is disposed to face the second mass portion, and a dummy electrode which is disposed to face the movable section so as not to come into contact with the first fixed electrode and the second fixed electrode and has the same potential as potential of the movable section, the dummy electrode includes a first dummy electrode provided between the first fixed electrode and the second fixed electrode, a second dummy electrode provided on the side opposite to the first dummy electrode, of the first fixed electrode, and a third dummy electrode provided on the side opposite to the first dummy electrode, of the second fixed electrode, and the fixed electrode and the dummy electrode are disposed such that a capacity offset is smaller than a capacity offset in a case where distances between the first fixed electrode and the first and second dummy electrodes and distances between the second fixed electrode and the first and third dummy electrodes are the same. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification
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Current AssigneeSeiko Epson Corporation (Seiko Group)
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Original AssigneeSeiko Epson Corporation (Seiko Group)
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InventorsTanaka, Satoru
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Primary Examiner(s)Chapman, Jr., John
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Application NumberUS14/822,041Publication NumberTime in Patent Office820 DaysField of SearchUS Class CurrentCPC Class CodesG01C 19/5755 the devices having a single...G01C 19/5769 Manufacturing; Mounting; Ho...G01P 15/125 by capacitive pick-upG01P 2015/0831 the mass being of the paddl...
