Microscopy imaging method and system

• US 9,812,290 B2
• Filed: 01/31/2017
• Issued: 11/07/2017
• Est. Priority Date: 05/13/2011
• Status: Active Grant

• Current Assignee: Fibics Incorporated
• Original Assignee: Fibics Incorporated
• Inventors: Phaneuf, Michael William, Lagarec, Ken Guillaume
• Primary Examiner(s): Patel, Jay
• Assistant Examiner(s): Habib, Irfan
• Application Number:
  US15/420,844
• Publication Number:
  US 20170140897A1
• Time in Patent Office: 280 Days
• CPC Class Codes: G06T 2207/10061 from scanning electron microscope
• CPC Class Codes: H01J 2237/226 Image reconstruction
• CPC Class Codes: H01J 2237/2811 Large objects
• CPC Class Codes: H01J 2237/3174 Etching microareas
• CPC Class Codes: H01J 2237/31749 Focused ion beam
• CPC Class Codes: H01J 37/222 Image processing arrangements associated with the tube image data processing or generation, in general G06T
• CPC Class Codes: H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence
• CPC Class Codes: H01J 37/3005 Observing the objects or the point of impact on the object
• CPC Class Codes: H01J 37/304 Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
• CPC Class Codes: H01J 37/3045 Object or beam position registration
• CPC Class Codes: H01J 37/3056 for microworking, e.g. etching of gratings, trimming of electrical components trimming of resistors H01C17/22

Abstract

Notches or chevrons with known angles relative to each other are formed on a surface of the sample, where each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

Claims

1. A method for cross-sectioning a sample with a preset thickness, comprising:

providing a sample having x, y and z dimensions with at least first and second line structures on a surface of the sample defined by the z-x plane, the at least first and second line structures each extending from the x-y plane at known angles and having ends electronically detectable on a first from a cross-section surface of the sample defined by the x-y plane;

exposing a second cross-section surface defined by the x-y plane with a material removal tool, where an x dimension distance between ends of the at least first and second line structures exposed in each cross-sectioned surface changes along the z-dimension;

electronically calculating a first distance in the z-dimension between the first cross-section surface and the second cross-section surface based on a change in the x dimension distance and the angles;

automatically adjusting parameters to advance the material removal tool in the z dimension for exposing a third cross-section surface at a second distance in the z dimension from the second cross-section surface that is closer to the preset thickness than the first distance.

2. The method of claim 1, wherein the at least first and second line structures include grooves formed in the surface of the sample defined by the z-x plane.

3. The method of claim 2, wherein the at least first and second line structures include protective layers formed over the grooves.

4. The method of claim 1, wherein the at least first and second line structures are formed as a first chevron, and the angles of the first and second line structures are the same.

5. The method of claim 4, wherein the at least first and second line structures include a second chevron aligned with the first chevron in the x-dimension and formed behind the first chevron in the z-dimension.

6. The method of claim 5, wherein the at least first and second line structures further includes a pair of parallel line structures extending in the z-dimension perpendicularly to the x-y plane.

7. The method of claim 1, wherein exposing a second cross-section surface includes operating a focused ion beam to mill the sample from the first cross-section surface of the sample up to a distance in the z-dimension where the second cross-section surface is exposed.

8. The method of claim 7, wherein automatically adjusting parameters includes adjusting a milling rate of the focused ion beam.

9. The method of claim 1, wherein exposing a second cross-section surface includes cutting the sample with an in-microscope ultramicrotome at a distance in the z-dimension where the second cross-section surface is exposed.

10. The method of claim 9, wherein automatically adjusting parameters includes advancing a position of the in-microscope ultramicrotome in the z-dimension.

11. The method of claim 1, further including acquiring and displaying a first image of the first cross-section surface at a first resolution on a display.

12. The method of claim 11, further including scanning at least one exact region of interest in the first image defined by an arbitrary outline positioned on the first image.

13. The method of claim 12, further including acquiring second image of the at least one exact region of interest at a second resolution greater than the first resolution, and,

further including overlaying the second image of the at least one exact region of interest at the second resolution, over the arbitrary outline positioned on the first image.

14. The method of claim 13, further including

scanning at the second cross-section surface, the same at least one exact region of interest defined by the arbitrary outline from the image,

acquiring a third image of the at least one exact region of interest at the second resolution, and

displaying the third image in the absence of the first image, on the display.

15. The method of claim 11, further including

scanning a first exact region of interest in the first image that includes at least one of the ends defined by an arbitrary outline positioned on the first image,

acquiring a second image of the first exact region of interest at a second resolution greater than the first resolution,

moving a stage supporting the sample by a predetermined amount in a predetermined direction,

scanning a second exact region of interest defined by the arbitrary outline at a position shifted by the predetermined amount in the predetermined direction,

acquiring a third image of the second exact region of interest at the second resolution,

computing a positional offset between the ends in the second image and the third image, and

applying the positional offset to shift a beam that executes the scanning.

16. An apparatus for cross-sectioning a sample with a preset thickness, comprising:

a stage for supporting the sample, the sample having x, y and z dimensions with at least first and second line structures on a surface of the sample defined by the z-x plane, the at least first and second line structures each extending from the x-y plane at known angles and having ends electronically detectable on a first cross-section surface of the sample defined by the x-y plane;

a material removal tool configured to expose a second cross-section surface defined by the x-y plane where an x dimension distance between ends of the at least first and second line structures exposed in each cross-sectioned surface changes along the z dimension; and

,

a computer workstation configured to calculate a first distance in the z-dimension between the first cross-section surface and the second cross-section surface based on a change in the x dimension distance and the angles, and automatically adjust parameters to advance the material removal tool in a z-dimension for exposing a third cross-section surface at a second distance in the z dimension from the second cross-section surface that is closer to the preset thickness than the first distance.

17. The apparatus of claim 16, wherein the material removal tool includes a focused ion beam controlled to mill the sample from the first cross-section surface of the sample up to a distance in the z-dimension where the second cross-section surface is exposed, and the computer workstation is configured to adjust a milling rate of the focused ion beam.

18. The apparatus of claim 17, further including a scanning electron microscope (SEM) configured to provide imaging data for the computer workstation, the computer workstation being configured to control the SEM to scan the first cross-section surface for display as a first image at a first resolution on the computer workstation, and

scan at least one exact region of interest in the first image defined by an arbitrary outline positioned on the first image at a second resolution greater than the first resolution.

19. The apparatus of claim 17, wherein the computer workstation is further configured to overlay the second image of the at least one exact region of interest at the second resolution, over the arbitrary outline positioned on the first image.