Display device including transistor and manufacturing method thereof
First Claim
1. A semiconductor device comprising:
- a first conductive layer;
a first insulating layer over the first conductive layer;
an oxide semiconductor layer over the first insulating layer;
a second insulating layer over the oxide semiconductor layer;
a second conductive layer and a third conductive layer over the second insulating layer;
a third insulating layer over the second conductive layer and the third conductive layer;
a fourth conductive layer over the third insulating layer;
a fourth insulating layer over the fourth conductive layer; and
a pixel electrode electrically connected to the second conductive layer,wherein each of the fourth conductive layer and the pixel electrode comprises a light-transmitting conductive material,wherein the fourth conductive layer extends beyond both side edges of the oxide semiconductor layer in a channel width direction, andwherein the fourth conductive layer overlaps a light-blocking layer.
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Accused Products
Abstract
An object is to provide a display device which operates stably with use of a transistor having stable electric characteristics. In manufacture of a display device using transistors in which an oxide semiconductor layer is used for a channel formation region, a gate electrode is further provided over at least a transistor which is applied to a driver circuit. In manufacture of a transistor in which an oxide semiconductor layer is used for a channel formation region, the oxide semiconductor layer is subjected to heat treatment so as to be dehydrated or dehydrogenated; thus, impurities such as moisture existing in an interface between the oxide semiconductor layer and the gate insulating layer provided below and in contact with the oxide semiconductor layer and an interface between the oxide semiconductor layer and a protective insulating layer provided on and in contact with the oxide semiconductor layer can be reduced.
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Citations
18 Claims
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1. A semiconductor device comprising:
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a first conductive layer; a first insulating layer over the first conductive layer; an oxide semiconductor layer over the first insulating layer; a second insulating layer over the oxide semiconductor layer; a second conductive layer and a third conductive layer over the second insulating layer; a third insulating layer over the second conductive layer and the third conductive layer; a fourth conductive layer over the third insulating layer; a fourth insulating layer over the fourth conductive layer; and a pixel electrode electrically connected to the second conductive layer, wherein each of the fourth conductive layer and the pixel electrode comprises a light-transmitting conductive material, wherein the fourth conductive layer extends beyond both side edges of the oxide semiconductor layer in a channel width direction, and wherein the fourth conductive layer overlaps a light-blocking layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A semiconductor device comprising:
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a first conductive layer; a first insulating layer over the first conductive layer; an oxide semiconductor layer over the first insulating layer; a second insulating layer over the oxide semiconductor layer; a second conductive layer and a third conductive layer over the second insulating layer; a third insulating layer over the second conductive layer and the third conductive layer; a fourth conductive layer over the third insulating layer; a fourth insulating layer over the fourth conductive layer; and a pixel electrode electrically connected to the second conductive layer, wherein each of the fourth conductive layer and the pixel electrode comprises a light-transmitting conductive material, wherein the fourth conductive layer extends beyond both side edges of the oxide semiconductor layer in a channel width direction, wherein the fourth conductive layer overlaps a light-blocking layer, wherein the first conductive layer is electrically connected to a first line, and wherein the fourth conductive layer is electrically connected to a second line. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification