Sensor system including two inertial sensors
First Claim
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1. A sensor system, comprising:
- a substrate;
at least two micromechanical inertial sensors that are movably connected to the substrate, wherein;
each inertial sensor includes a functional layer,the functional layers of the at least two inertial sensors vary in thickness along a direction perpendicular to the substrate,the at least two inertial sensors are situated next to one another on the substrate,a difference in a layer thickness of the at least two inertial sensors is at least 1 μ
m; and
a plurality of fixed electrodes that extend perpendicular to the substrate, wherein;
a first fixed electrode located directly below a first inertial sensor along the direction perpendicular to the substrate extends to a first height from the substrate along the direction perpendicular to the substrate;
a second fixed electrode located directly below a second inertial sensor along the direction perpendicular to the substrate extends to a second height from the substrate along the direction perpendicular to the substrate;
the first height and the second height are different;
the first fixed electrode extends up from the substrate to the first height towards the functional layer of the first inertial sensor; and
the second fixed electrode extends up from the substrate to the second height towards the functional layer of the second inertial sensor.
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Abstract
A sensor system is described as including at least two micromechanical inertial sensors, which are movably connected to a substrate, each inertial sensor including a functional layer, the functional layers of the two inertial sensors varying in thickness, and the two inertial sensors being situated next to one another on the substrate.
12 Citations
16 Claims
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1. A sensor system, comprising:
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a substrate; at least two micromechanical inertial sensors that are movably connected to the substrate, wherein; each inertial sensor includes a functional layer, the functional layers of the at least two inertial sensors vary in thickness along a direction perpendicular to the substrate, the at least two inertial sensors are situated next to one another on the substrate, a difference in a layer thickness of the at least two inertial sensors is at least 1 μ
m; anda plurality of fixed electrodes that extend perpendicular to the substrate, wherein; a first fixed electrode located directly below a first inertial sensor along the direction perpendicular to the substrate extends to a first height from the substrate along the direction perpendicular to the substrate; a second fixed electrode located directly below a second inertial sensor along the direction perpendicular to the substrate extends to a second height from the substrate along the direction perpendicular to the substrate; the first height and the second height are different; the first fixed electrode extends up from the substrate to the first height towards the functional layer of the first inertial sensor; and the second fixed electrode extends up from the substrate to the second height towards the functional layer of the second inertial sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification