Optimized wavelength photon emission microscope for VLSI devices

• US 9,817,060 B2
• Filed: 04/10/2014
• Issued: 11/14/2017
• Est. Priority Date: 04/10/2013
• Status: Active Grant

• Current Assignee: FEI EFA, Inc. (Thermo Fisher Scientific Incorporated)
• Original Assignee: FEI EFA, Inc. (Thermo Fisher Scientific Incorporated)
• Inventors: Deslandes, Herve
• Primary Examiner(s): Koval, Melissa
• Assistant Examiner(s): McDonnough, Courtney
• Application Number:
  US14/250,361
• Publication Number:
  US 20150091602A1
• Time in Patent Office: 1,314 Days
• Field of Search: 32476201
• CPC Class Codes: G01R 15/246 based on the Faraday, i.e. linear magneto-optic, effect
• CPC Class Codes: G01R 31/2648 Characterising semiconductor materials testing of materials or semi-finished products G01R31/2831; testing during manufacture H01L22/00
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

A method for emission testing of a semiconductor device (DUT), by mounting the DUT onto an test bench of an emission tester, the emission tester having an optical detector; electrically connecting the DUT to an electrical tester; applying electrical test signals to the DUT while keeping test parameters constant; serially inserting one of a plurality of shortpass filters into an optical path of the emission tester and collecting emission test signal from the optical detector until all available shortpass filters have been inserted into the optical path; determining appropriate shortpass filter providing highest signal to noise ratio of the emission signal; inserting the appropriate shortpass filter into the optical path; and, performing emission testing on the DUT.

Claims

1. A system, comprising:

a detector sensitive to electromagnetic radiation having wavelengths of at least from 1000 nm to 2200 nm;

a plurality of shortpass optical filters;

a selector for selectively placing one of said shortpass optical filters in an optical path that couples a semiconductor device under test (DUT) to the detector; and

,

a controller connected to said detector and to said selector, the controller configured to selectively operate in a calibration mode and in a test mode, and wherein;

during calibration mode, the controller operates the selector to successively insert each of said shortpass optical filters within said optical path as the controller records emission signals received by the detector from the DUT, and compares the signal-to-noise ratios of the recorded emission signals; and

,

during test mode, the controller operates said selector to insert the shortpass optical filter associated with the highest signal-to-noise ratio of the plurality of shortpass optical filters for a selected test voltage of a plurality of test voltages into the optical path while the controller records emission signals received by the detector from the DUT.

2. The system of claim 1, wherein the controller is further configured to generate a plot of signal-to-noise ratio versus wavelength.

3. The system of claim 2, wherein the controller is further configured to generate a plot of signal-to-noise ratio versus wavelength for each of the test voltages.

4. The system of claim 1, wherein said plurality of shortpass filters comprises shortpass filters having cutoffs at 1550 nm, 1800 nm, 1900 nm, and 2000 nm.

5. The system of claim 1, wherein said shortpass filters provide spectrum coverage of wavelengths from 900 nm to 2200 nm.

6. The system of claim 1, further comprising a solid immersion lens situated on the optical path adjacent the DUT so as to direct emission signals from the DUT to the detector.

7. The system of claim 6, further comprising a collection objective lens and a relay lens situated to direct emission from the DUT to the detector.

8. The system of claim 7, wherein the relay lens is configured to be selectively insertable into and removable from the optical path.

9. The system of claim 7, further comprising a plurality of cold apertures configured to be selectively insertable into the optical path.

10. The system of claim 1, further comprising a temperature control mechanism that maintains the DUT at a constant temperature during the calibration mode.

11. The system of claim 9, further comprising a thermal enclosure housing the cold aperture, the plurality of shortpass optical filters and the detector.

12. The system of claim 1, further comprising a plurality of cold apertures insertable into the optical path.

13. The system of claim 1, further comprising a plurality of objective lenses and a plurality of cold apertures, each cold aperture matching one of the plurality of lenses.

14. The system of claim 13, wherein the plurality of objective lenses includes at least one macro lens and one micro lens.

15. The system of claim 1, wherein the selector is configured for selectively placing one of said shortpass optical filters with a corresponding cold aperture in said optical path.