Optical scanner apparatus

• US 9,817,230 B2
• Filed: 10/20/2015
• Issued: 11/14/2017
• Est. Priority Date: 10/28/2014
• Status: Active Grant

• Current Assignee: Mitsumi Electric Co., Ltd. (Minebea Mitsumi, Inc.)
• Original Assignee: Mitsumi Electric Co., Ltd. (Minebea Mitsumi, Inc.)
• Inventors: Yamada, Tsukasa, Sekine, Hisamichi, Aga, Hisanori, Tanaka, Toyoki
• Primary Examiner(s): Won, Bumsuk
• Assistant Examiner(s): Beatty, Collin X
• Application Number:
  US14/887,557
• Publication Number:
  US 20160116733A1
• Time in Patent Office: 756 Days
• Field of Search: 3592131, 3591994, 3592241, 257 98, 257435, 438 27
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence

Abstract

An optical scanner apparatus that oscillates a mirror to scan incident light, includes an optical scanner unit that includes a sensor that detects an oscillation angle of the mirror, and an interconnect connected to the sensor; and a shading unit that shades the sensor and the interconnect from stray light of the incident light and ambient light.

Claims

1. An optical scanner apparatus that oscillates a mirror to scan incident light, comprising:

an optical scanner unit that includes a sensor that detects an oscillation angle of the mirror and an interconnect connected to the sensor; and

a cover that shades the sensor and the interconnect from stray light of the incident light and ambient light,

wherein the cover is provided with an open portion having a shape that does not block the incident light from reaching the mirror and that does not block scanning light from the mirror,

the open portion including, in a planar view,

a substantially semicircular opening portion at a side through which the incident light passes, and

a substantially rectangular opening portion at a side through which the scanning light passes.

2. The optical scanner apparatus according to claim 1, further comprising:

a package on which the optical scanner unit is mounted, and

wherein the cover is provided on the package and the optical scanner unit, and covering the optical scanner unit.

3. The optical scanner apparatus according to claim 1,

wherein at the open portion, the substantially semicircular opening portion at the side through which the incident light passes is made smaller than the substantially rectangular opening portion at the side through which the scanning light passes.

4. The optical scanner apparatus according to claim 1,

wherein the incident light is laser light, and the stray light of the incident light is outside light of the half width of the laser light.

5. The optical scanner apparatus according to claim 1, further comprising:

a heat buffer layer provided on the sensor and the interconnect.

6. The optical scanner apparatus according to claim 5, further comprising:

a reflection film provided on the heat buffer layer.

7. The optical scanner apparatus according to claim 1, further comprising:

a reflection film provided on the sensor and the interconnect via an insulating layer.

8. The optical scanner apparatus according to claim 1,

wherein the optical scanner unit includes a beam provided around the mirror,

wherein the sensor is provided at the beam, and

wherein the cover is provided on the beam, the sensor and the inter connect of the optical scanner unit.