Display device and method for manufacturing display device
First Claim
Patent Images
1. A display device comprising:
- a bonding layer over a flexible substrate;
an oxide semiconductor film having a light-transmitting property over the flexible substrate;
a source electrode and a drain electrode in direct contact with the oxide semiconductor film;
an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode; and
a capacitor over the flexible substrate, the capacitor comprising a first electrode on a same surface as the oxide semiconductor film, a dielectric film in direct contact with the first electrode, and a second electrode over the dielectric film,wherein the first electrode is electrically connected to one of the source electrode and the drain electrode,wherein a portion of the dielectric film is over the insulating film, andwherein a portion of the second electrode is over the insulating film.
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Abstract
A highly flexible display device and a method for manufacturing the display device are provided. A transistor including a light-transmitting semiconductor film, a capacitor including a first electrode, a second electrode, and a dielectric film between the first electrode and the second electrode, and a first insulating film covering the semiconductor film are formed over a flexible substrate. The capacitor includes a region where the first electrode and the dielectric film are in contact with each other, and the first insulating film does not cover the region.
125 Citations
30 Claims
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1. A display device comprising:
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a bonding layer over a flexible substrate; an oxide semiconductor film having a light-transmitting property over the flexible substrate;
a source electrode and a drain electrode in direct contact with the oxide semiconductor film;an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode; and a capacitor over the flexible substrate, the capacitor comprising a first electrode on a same surface as the oxide semiconductor film, a dielectric film in direct contact with the first electrode, and a second electrode over the dielectric film, wherein the first electrode is electrically connected to one of the source electrode and the drain electrode, wherein a portion of the dielectric film is over the insulating film, and wherein a portion of the second electrode is over the insulating film. - View Dependent Claims (2, 3, 4, 5)
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6. A display device comprising:
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a bonding layer over a flexible substrate; an oxide semiconductor film having a light-transmitting property over the flexible substrate;
a source electrode and a drain electrode in direct contact with the oxide semiconductor film;an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode; a capacitor over the flexible substrate, the capacitor comprising a first electrode being electrically connected to one of the source electrode and the drain electrode, a dielectric film in direct contact with the first electrode, and a second electrode over the dielectric film; and a light-emitting element over the flexible substrate, wherein a portion of the dielectric film is over the insulating film, wherein a portion of the second electrode is over the insulating film, and wherein the first electrode is on a same surface as the oxide semiconductor film. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
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15. A display device comprising:
- a bonding layer over a flexible substrate;
a transistor comprising; a first gate electrode over the flexible substrate; a gate insulating film over the first gate electrode; an oxide semiconductor film over the first gate electrode with the gate insulating film interposed therebetween; a source electrode and a drain electrode in direct contact with the oxide semiconductor film; and an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode; a capacitor comprising; a first electrode over the flexible substrate, the first electrode having a light-transmitting property and being electrically connected to one of the source electrode and the drain electrode of the transistor; a dielectric film in direct contact with the first electrode, the dielectric film over the insulating film and comprising silicon, nitride, and hydrogen; and a second electrode over the insulating film and the dielectric film;
a planarization film over the insulating film and the second electrode, the planarization film having a contact hole; anda third electrode over the planarization film and in the contact hole, wherein the first electrode is on a same surface as the oxide semiconductor film. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
- a bonding layer over a flexible substrate;
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26. A display device comprising:
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a transistor over a flexible substrate, the transistor comprising an oxide semiconductor film having a light-transmitting property, a source electrode, and a drain electrode; a capacitor over the flexible substrate, the capacitor comprising a first electrode on a same surface as the oxide semiconductor film, a dielectric film in direct contact with the first electrode, and a second electrode over the dielectric film; and an insulating film covering the oxide semiconductor film, the source electrode, and the drain electrode, wherein the flexible substrate includes a polyimide resin, wherein the first electrode is electrically connected to one of the source electrode and the drain electrode of the transistor, wherein a portion of the dielectric film is over the insulating film, and wherein a portion of the second electrode is over the insulating film. - View Dependent Claims (27, 28, 29, 30)
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Specification