Manufacturing method of semiconductor device with conductive film in opening through multiple insulating films

• US 9,818,849 B2
• Filed: 10/29/2014
• Issued: 11/14/2017
• Est. Priority Date: 06/17/2011
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Sasagawa, Shinya, Fujiki, Hiroshi, Ieda, Yoshinori
• Primary Examiner(s): Huber, Robert
• Assistant Examiner(s): SWAN, GARDNER W.S
• Application Number:
  US14/527,103
• Publication Number:
  US 20150056750A1
• Time in Patent Office: 1,112 Days
• Field of Search: None
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/02178 the material containing aluminium, e.g. Al2O3
• CPC Class Codes: H01L 21/02554 Oxides
• CPC Class Codes: H01L 21/02565 Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
• CPC Class Codes: H01L 21/47573 Etching the layer
• CPC Class Codes: H01L 29/41733 for thin film transistors with insulated gate
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A first insulating film in contact with an oxide semiconductor film and a second insulating film are stacked in this order over an electrode film of a transistor including the oxide semiconductor film, an etching mask is formed over the second insulating film, an opening portion exposing the electrode film is formed by etching a portion of the first insulating film and a portion of the second insulating film, the opening portion exposing the electrode film is exposed to argon plasma, the etching mask is removed, and a conductive film is formed in the opening portion exposing the electrode film. The first insulating film is an insulating film whose oxygen is partly released by heating. The second insulating film is less easily etched than the first insulating film and has a lower gas-permeability than the first insulating film.

Claims

1. A manufacturing method of a semiconductor device, comprising:

forming a semiconductor film that comprises a channel formation region comprising an oxide semiconductor, and an electrode film electrically connected to the semiconductor film;

forming a first insulating film in contact with the semiconductor film and over the electrode film, the first insulating film comprising one of a silicon oxide, a silicon oxynitride, and a silicon nitride oxide;

forming a second insulating film over the first insulating film, the second insulating film comprising an aluminum oxide;

forming an etching mask including a first opening portion over the second insulating film;

forming a second opening portion exposing the electrode film by etching a first portion of the first insulating film and a second portion of the second insulating film using an etching gas comprising carbon and fluorine, so that an angle between a side surface of the first insulating film and a bottom surface of the first insulating film at the second opening portion is larger than an angle between a side surface of the second insulating film and a bottom surface of the second insulating film at the second opening portion, wherein the first portion and the second portion overlap with the first opening portion;

reducing unevenness of a side surface of the second opening portion by argon plasma treatment;

removing the etching mask; and

after reducing the unevenness, forming a conductive film in the second opening portion,

wherein the first insulating film is an insulating film whose oxygen is partly released by heating,

wherein the second insulating film has a higher gas barrier property than the first insulating film, and

wherein an etching selectivity of the first insulating film is higher with respect to the second insulating film when etching with the same etching agent.

2. The manufacturing method of a semiconductor device according to claim 1, further comprising:

forming a gate electrode over the semiconductor film.

3. The manufacturing method of a semiconductor device according to claim 1, wherein the oxide semiconductor comprises an In—

Ga—

Zn-based oxide.

4. A manufacturing method of a semiconductor device, comprising:

forming a semiconductor film that comprises a channel formation region comprising an oxide semiconductor, and an electrode film electrically connected to the semiconductor film;

forming a first insulating film in contact with the semiconductor film and over the electrode film, the first insulating film comprising one of a silicon oxide, a silicon oxynitride, and a silicon nitride oxide;

forming a second insulating film over the first insulating film, the second insulating film comprising an aluminum oxide;

forming an etching mask including a first opening portion over the second insulating film;

forming a second opening portion exposing the electrode film by etching a first portion of the first insulating film and a second portion of the second insulating film using an etching gas comprising carbon and fluorine, so that an angle between a side surface of the first insulating film and a bottom surface of the first insulating film at the second opening portion is larger than an angle between a side surface of the second insulating film and a bottom surface of the second insulating film at the second opening portion, wherein the first portion and the second portion overlap with the first opening portion;

removing the etching mask;

reducing unevenness of a side surface of the second opening portion by argon plasma treatment; and

after reducing the unevenness, forming a conductive film in the second opening portion by a sputtering method,

wherein the first insulating film is an insulating film whose oxygen is partly released by heating,

wherein the second insulating film has a higher gas barrier property than the first insulating film, and

wherein an etching selectivity of the first insulating film is higher with respect to the second insulating film when etching with the same etching agent.

5. The manufacturing method of a semiconductor device according to claim 4, further comprising:

forming a gate electrode over the semiconductor film.

6. The manufacturing method of a semiconductor device according to claim 4, wherein the oxide semiconductor comprises an In—

Ga—

Zn-based oxide.

7. A manufacturing method of a semiconductor device, comprising:

forming a semiconductor film that comprises a channel formation region comprising an oxide semiconductor, and an electrode film electrically connected to the semiconductor film;

forming a first insulating film in contact with the semiconductor film and over the electrode film, the first insulating film comprising one of a silicon oxide, a silicon oxynitride, and a silicon nitride oxide;

forming a second insulating film over the first insulating film, the second insulating film comprising an aluminum oxide;

forming a third insulating film over the second insulating film, the third insulating film comprising one of a silicon oxide, a silicon oxynitride, and a silicon nitride oxide;

forming an etching mask including a first opening portion over the third insulating film;

forming a second opening portion exposing the electrode film by etching a first portion of the first insulating film, a second portion of the second insulating film, and a third portion of the third insulating film using an etching gas comprising carbon and fluorine, so that an angle between a side surface of the first insulating film and a bottom surface of the first insulating film at the second opening portion is larger than an angle between a side surface of the second insulating film and a bottom surface of the second insulating film at the second opening portion, wherein the first portion, the second portion, and the third portion overlap with the first opening portion;

reducing unevenness of a side surface of the second opening portion by argon plasma treatment;

removing the etching mask; and

after reducing the unevenness, forming a conductive film in the second opening portion,

wherein the first insulating film is an insulating film whose oxygen is partly released by heating,

wherein the second insulating film has a higher gas barrier property than the first insulating film, and

wherein an etching selectivity of the first insulating film is higher with respect to the second insulating film when etching with the same etching agent.

8. The manufacturing method of a semiconductor device according to claim 7, further comprising:

forming a gate electrode over the semiconductor film.

9. The manufacturing method of a semiconductor device according to claim 7,

wherein the third insulating film is thicker than the first insulating film.

10. The manufacturing method of a semiconductor device according to claim 7, wherein the oxide semiconductor comprises an In—

Ga—

Zn-based oxide.

11. A manufacturing method of a semiconductor device, comprising:

forming a semiconductor film that comprises a channel formation region comprising an oxide semiconductor, and an electrode film electrically connected to the semiconductor film;

forming a first insulating film in contact with the semiconductor film and over the electrode film, the first insulating film comprising one of a silicon oxide, a silicon oxynitride, and a silicon nitride oxide;

forming a second insulating film over the first insulating film, the second insulating film comprising an aluminum oxide;

forming a third insulating film over the second insulating film, the third insulating film comprising one of a silicon oxide, a silicon oxynitride, and a silicon nitride oxide;

forming an etching mask including a first opening portion over the third insulating film;

forming a second opening portion exposing the electrode film by etching a first portion of the first insulating film, a second portion of the second insulating film, and a third portion of the third insulating film using an etching gas comprising carbon and fluorine, so that an angle between a side surface of the first insulating film and a bottom surface of the first insulating film at the second opening portion is larger than an angle between a side surface of the second insulating film and a bottom surface of the second insulating film at the second opening portion, wherein the first portion, the second portion, and the third portion overlap with the first opening portion;

removing the etching mask;

reducing unevenness of a side surface of the second opening portion by argon plasma treatment; and

after reducing the unevenness, forming a conductive film in the second opening portion by a sputtering method,

wherein the first insulating film is an insulating film whose oxygen is partly released by heating,

wherein the second insulating film has a higher gas barrier property than the first insulating film, and

wherein an etching selectivity of the first insulating film is higher with respect to the second insulating film when etching with the same etching agent.

12. The manufacturing method of a semiconductor device according to claim 11, further comprising:

forming a gate electrode over the semiconductor film.

13. The manufacturing method of a semiconductor device according to claim 11,

wherein the third insulating film is thicker than the first insulating film.

14. The manufacturing method of a semiconductor device according to claim 11, wherein the oxide semiconductor comprises an In-Ga-Zn-based oxide.