Semiconductor device and display device including the semiconductor device

• US 9,818,880 B2
• Filed: 02/01/2016
• Issued: 11/14/2017
• Est. Priority Date: 02/12/2015
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Miyake, Hiroyuki, Koezuka, Junichi, Okazaki, Kenichi, Kurosaki, Daisuke, Shima, Yukinori, Saito, Satoru
• Primary Examiner(s): P., D. E.
• Assistant Examiner(s): Haider, Wasiul
• Application Number:
  US15/012,403
• Publication Number:
  US 20160240683A1
• Time in Patent Office: 652 Days
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H01L 29/78696 characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel H01L29/78612 takes precedence; transistors having a drain offset region or a lightly doped drain [LDD] H01L29/78621

Abstract

To reduce parasitic capacitance in a semiconductor device having a transistor including an oxide semiconductor. The transistor includes a first gate electrode, a first gate insulating film over the first gate electrode, an oxide semiconductor film over the first gate insulating film, and source and drain electrodes electrically connected to the oxide semiconductor film. The oxide semiconductor film includes a first oxide semiconductor film on the first gate electrode side and a second oxide semiconductor film over the first oxide semiconductor film. The atomic proportion of In is larger than the atomic proportion of M (M is Ti, Ga, Sn, Y, Zr, La, Ce, Nd, or Hf) in the first oxide semiconductor film, and the atomic proportion of In in the second oxide semiconductor film is smaller than that in the first oxide semiconductor film.

Claims

1. A semiconductor device comprising:

a transistor comprising;

an oxide semiconductor film;

a first gate electrode, the oxide semiconductor film overlapping with the first gate electrode;

a first gate insulating film between the oxide semiconductor film and the first gate electrode;

a source electrode electrically connected to the oxide semiconductor film; and

a drain electrode electrically connected to the oxide semiconductor film,

wherein the oxide semiconductor film comprises;

a first oxide semiconductor film in contact with the first gate insulating film; and

a second oxide semiconductor film in contact with the first oxide semiconductor film,

wherein an atomic proportion of In in the first oxide semiconductor film is larger than an atomic proportion of M in the first oxide semiconductor film,

wherein M is Ti, Ga, Sn, Y, Zr, La, Ce, Nd, or Hf,

wherein an atomic proportion of In in the second oxide semiconductor film is smaller than the atomic proportion of In in the first oxide semiconductor film,

wherein the oxide semiconductor film comprises a first region overlapping with the first gate electrode, a second region overlapping with the source electrode, and a third region overlapping with the drain electrode,

wherein the first region does not comprise the second region and the third region,

wherein the first oxide semiconductor film has a first thickness,

wherein the second oxide semiconductor film has a second thickness overlapped with the first gate electrode and a third thickness overlapped with the source electrode and the drain electrode,

wherein the third thickness is larger than the first thickness, and

wherein the first thickness is larger than the second thickness.

2. The semiconductor device according to claim 1,

wherein the first gate insulating film is over the first gate electrode, and

wherein the oxide semiconductor film is over the first gate insulating film.

3. The semiconductor device according to claim 2, further comprising:

a second gate insulating film over the oxide semiconductor film; and

a second gate electrode over the second gate insulating film,

wherein the oxide semiconductor film further comprises a fourth region overlapping with the second gate electrode, and

wherein the fourth region does not comprise the second region and the third region.

4. The semiconductor device according to claim 1,

wherein the first gate insulating film is over the oxide semiconductor film, and

wherein the first gate electrode is over the first gate insulating film.

5. The semiconductor device according to claim 4, further comprising:

a second gate insulating film under the oxide semiconductor film; and

a second gate electrode under the second gate insulating film,

wherein the oxide semiconductor film further comprises a fourth region overlapping with the second gate electrode, and

wherein the fourth region does not comprise the second region and the third region.

6. The semiconductor device according to claim 1, further comprising:

a scan line; and

a data line,

wherein the first gate electrode is electrically connected to the scan line,

wherein the source electrode is electrically connected to the data line, and

wherein an insulating film having a larger thickness than the first gate insulating film is between the scan line and the data line in a region where the scan line and the data line overlap with each other with the insulating film therebetween.

7. The semiconductor device according to claim 1,

wherein the first oxide semiconductor film comprises In, M, and Zn, and

wherein M is Ga.

8. The semiconductor device according to claim 1,

wherein each of the first oxide semiconductor film and the second oxide semiconductor film comprise a crystal portion, and

wherein the crystal portion comprises a portion where a c-axis of the crystal portion is parallel to a normal vector of a surface where the oxide semiconductor film is formed.

9. The semiconductor device according to claim 8,

wherein the first oxide semiconductor film comprises a portion in which a proportion of the crystal portion is larger than a proportion of the crystal portion in the second oxide semiconductor film.

10. The semiconductor device according to claim 1,

wherein the first oxide semiconductor film comprises a portion in which a hydrogen concentration is lower than a hydrogen concentration in the second oxide semiconductor film.

11. An electronic device comprising:

the semiconductor device according to claim 1; and

an operation key or a battery.

12. A semiconductor device comprising:

a transistor comprising;

a first gate electrode;

a first gate insulating film over the first gate electrode;

an oxide semiconductor film over the first gate insulating film;

a source electrode electrically connected to the oxide semiconductor film;

a drain electrode electrically connected to the oxide semiconductor film;

a second gate insulating film over the oxide semiconductor film; and

a second gate electrode over the second gate insulating film,

wherein the oxide semiconductor film comprises;

a first oxide semiconductor film; and

a second oxide semiconductor film over the first oxide semiconductor film,

wherein an atomic proportion of In in the first oxide semiconductor film is larger than an atomic proportion of M in the first oxide semiconductor film,

wherein M is Ti, Ga, Sn, Y, Zr, La, Ce, Nd, or Hf,

wherein an atomic proportion of In in the second oxide semiconductor film is smaller than the atomic proportion of In in the first oxide semiconductor film,

wherein the oxide semiconductor film comprises a first region overlapping with the first gate electrode, a second region overlapping with the source electrode, a third region overlapping with the drain electrode, and a fourth region overlapping with the second gate electrode,

wherein the first region or the fourth region does not comprise the second region and the third region,

wherein the first oxide semiconductor film has a first thickness,

wherein the second oxide semiconductor film has a second thickness overlapped with the first gate electrode and a third thickness overlapped with the source electrode and the drain electrode,

wherein the third thickness is larger than the first thickness, and

wherein the first thickness is larger than the second thickness.

13. The semiconductor device according to claim 12, further comprising:

a scan line; and

a data line,

wherein the first gate electrode is electrically connected to the scan line,

wherein the source electrode is electrically connected to the data line, and

wherein an insulating film having a larger thickness than the first gate insulating film is between the scan line and the data line in a region where the scan line and the data line overlap with each other with the insulating film therebetween.

14. The semiconductor device according to claim 12,

wherein the first oxide semiconductor film comprises In, M, and Zn, and

wherein M is Ga.

15. The semiconductor device according to claim 12,

wherein each of the first oxide semiconductor film and the second oxide semiconductor film comprises a crystal portion, and

wherein the crystal portion comprises a portion where a c-axis of the crystal portion is parallel to a normal vector of a surface where the oxide semiconductor film is formed.

16. The semiconductor device according to claim 15,

wherein the first oxide semiconductor film comprises a portion in which a proportion of the crystal portion is larger than a proportion of the crystal portion in the second oxide semiconductor film.

17. The semiconductor device according to claim 12,

wherein the first oxide semiconductor film comprises a portion in which a hydrogen concentration is lower than a hydrogen concentration in the second oxide semiconductor film.

18. An electronic device comprising:

the semiconductor device according to claim 12; and

an operation key or a battery.

19. A semiconductor device comprising:

a transistor comprising;

a first gate electrode;

a first gate insulating film over the first gate electrode;

an oxide semiconductor film over the first gate insulating film;

a source electrode electrically connected to the oxide semiconductor film;

a drain electrode electrically connected to the oxide semiconductor film;

a second gate insulating film over the oxide semiconductor film; and

a second gate electrode over the second gate insulating film,

wherein the oxide semiconductor film comprises;

a first oxide semiconductor film; and

a second oxide semiconductor film over the first oxide semiconductor film,

wherein an atomic proportion of In in the first oxide semiconductor film is larger than an atomic proportion of M in the first oxide semiconductor film,

wherein M is Ti, Ga, Sn, Y, Zr, La, Ce, Nd, or I-If,

wherein an atomic proportion of In in the second oxide semiconductor film is smaller than the atomic proportion of In in the first oxide semiconductor film,

wherein the oxide semiconductor film comprises a first region overlapping with the first gate electrode, a second region overlapping with the source electrode, a third region overlapping with the drain electrode, and a fourth region overlapping with the second gate electrode,

wherein the first region or the fourth region does not comprise the second region or the third region,

wherein the first oxide semiconductor film has a first thickness,

wherein the second oxide semiconductor film has a second thickness overlapped with the first gate electrode and a third thickness overlapped with the source electrode and the drain electrode,

wherein the third thickness is larger than the first thickness, and

wherein the first thickness is larger than the second thickness.

20. The semiconductor device according to claim 19, further comprising:

a scan line; and

a data line,

wherein the first gate electrode is electrically connected to the scan line,

wherein the source electrode is electrically connected to the data line, and

wherein an insulating film having a larger thickness than the first gate insulating film is between the scan line and the data line in a region where the scan line and the data line overlap with each other with the insulating film therebetween.

21. The semiconductor device according to claim 19,

wherein the first oxide semiconductor film comprises In, M, and Zn, and

wherein M is Ga.

22. The semiconductor device according to claim 19,

wherein each of the first oxide semiconductor film and the second oxide semiconductor film comprises a crystal portion, and

wherein the crystal portion comprises a portion where a c-axis of the crystal portion is parallel to a normal vector of a surface where the oxide semiconductor film is formed.

23. The semiconductor device according to claim 22,

wherein the first oxide semiconductor film comprises a portion in which a proportion of the crystal portion is larger than a proportion of the crystal portion in the second oxide semiconductor film.

24. The semiconductor device according to claim 19,

wherein the first oxide semiconductor film comprises a portion in which a hydrogen concentration is lower than a hydrogen concentration in the second oxide semiconductor film.

25. An electronic device comprising:

the semiconductor device according to claim 19; and

an operation key or a battery.

26. A display device comprising:

an oxide semiconductor film;

a first gate electrode, the oxide semiconductor film overlapping with the first gate electrode;

a first gate insulating film between the oxide semiconductor film and the first gate electrode;

a source electrode electrically connected to the oxide semiconductor film; and

a drain electrode electrically connected to the oxide semiconductor film,

wherein the oxide semiconductor film comprises;

a first oxide semiconductor film in contact with the first gate insulating film;

a second oxide semiconductor film in contact with the first oxide semiconductor film; and

a conductive film electrically connected to one of the source electrode and the drain electrode,

wherein an atomic proportion of In in the first oxide semiconductor film is larger than an atomic proportion of M in the first oxide semiconductor film,

wherein M is Ti, Ga, Sn, Y, Zr, La, Ce, Nd, or Hf,

wherein the oxide semiconductor film comprises a first region overlapping with the first gate electrode, a second region overlapping with the source electrode, and a third region overlapping with the drain electrode,

wherein the first oxide semiconductor film has a first thickness,

wherein the second oxide semiconductor film has a second thickness overlapped with the first gate electrode and a third thickness overlapped with the source electrode and the drain electrode,

wherein the third thickness is larger than the first thickness, and

wherein the first thickness is larger than the second thickness.

27. The display device according to claim 26, further comprising an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode,

wherein the conductive film is over the insulating film, and

wherein the conductive film is in contact with the one of the source electrode and the drain electrode through an opening provided in the insulating film.

28. The display device according to claim 26, further comprising a liquid crystal layer over the conductive film.

29. The display device according to claim 26,

wherein an atomic proportion of In in the second oxide semiconductor film is smaller than the atomic proportion of in in the first oxide semiconductor film.

30. The display device according to claim 26,

wherein the first oxide semiconductor film comprises In, M, and Zn, and

wherein M is Ga.