Gas characterization system having a preconcentrator

• US 9,823,211 B1
• Filed: 03/27/2015
• Issued: 11/21/2017
• Est. Priority Date: 09/09/2014
• Status: Active Grant

• Current Assignee: Maxim Integrated Products, Inc. (Analog Devices, Inc.)
• Original Assignee: Maxim Integrated Products, Inc. (Analog Devices, Inc.)
• Inventors: Allen, Dan G.
• Primary Examiner(s): Dinh, Bach
• Application Number:
  US14/670,839
• Time in Patent Office: 970 Days
• Field of Search: 204409-412, 204416-429, 204431-432
• CPC Class Codes: G01N 2033/0019 by preconcentration
• CPC Class Codes: G01N 27/31 Half-cells with permeable membranes, e.g. semi-porous or perm-selective membranes
• CPC Class Codes: G01N 27/40 Semi-permeable membranes or partitions
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27

Abstract

Disclosed herein are embodiments of a gas sensor system and methods of analyzing data therefrom. In embodiments, a gas sensor system includes one or more gas preconcentrator modules and one or more gas sensor modules. Each gas preconcentrator module includes a substrate that has a top surface having a gas adsorbent material attached to the top surface and has an electrical heater element for heating each preconcentrator module to release adsorb gases to the sensor. The gas sensor modules and the gas preconcentrator modules are in fluid communication with each other. The gas sensor modules responses are readout in parallel multiple times as the preconcentrators are heated yielding a 2-dimensional gas spectrum. The gas sensor output data is analyzed and compared to a library of known data to analyze the gas composition.

Claims

1. A gas sensor system, comprising:

one or more gas preconcentrator modules, each gas preconcentrator module including a substrate having a top surface with a gas adsorbent material attached to the top surface and further including an integral electrical heater element; and

a plurality of gas sensor modules in fluid communication with the one or more gas preconcentrator modules, wherein the plurality of gas sensor modules includes at least a first gas sensor module with a first chemical responsiveness and a second gas sensor module with a second chemical responsiveness different from the first chemical responsiveness,

wherein the one or more gas preconcentrator modules are in a first package having an input gas port exposed to ambient air and having a gas permeable membrane attached to the input gas port, wherein the plurality of gas sensor modules are in a second package having an output gas port exposed to ambient air and having a second gas permeable membrane attached to the output gas port.

2. The gas sensor system of claim 1, wherein the gas adsorbent material is a molecular sieve.

3. The gas sensor system of claim 1, further comprising an integrated circuit in electrical communication with the preconcentrator and gas sensor modules.

4. The gas sensor system of claim 1, wherein the different chemical responsivities are obtained by operating similar metal oxide gas sensors at different temperatures.

5. The gas sensor system of claim 1 wherein the different chemical responsivities are obtained from metal oxide sensors with different metal oxide materials.

6. The gas sensor system of claim 1, wherein the one or more gas preconcentrator modules are mounted in a cavity of the first package and the plurality of gas sensor modules are mounted in a cavity of the second package, and wherein an exit port of the cavity of the first package is in fluid communication with an input port of the cavity of the second package.

8. The gas sensor system of claim 1, wherein the plurality of gas sensor modules comprise electrochemical gas sensors with differing chemical responsivities provided by differing working electrode potentials, filters, electrolytes or electrode materials.

9. The gas sensor system of claim 8, wherein at least one electrochemical gas sensor includes:

a substrate having a top surface and a bottom surface, wherein a first part of the top surface has a gas adsorbent material attached thereto and a first electrical heater element attached to a first part of the bottom surface opposite the first part of the top surface, wherein a second part of the top surface has an interdigitated array of electrodes attached thereto and a metal oxide coating attached to the second part of the top surface and covering the interdigitated array of electrodes, and wherein a second electrical heater element is attached to a second part of the bottom surface opposite the second part of the top surface.

7. The gas sensor of system 1, wherein the first package and second package are the same package.

10. A gas sensor system, comprising:

one or more gas preconcentrator modules, each gas preconcentrator module including a substrate having a top surface with a gas adsorbent material attached to the top surface and further including an integral electrical heater element; and

a plurality of gas sensor modules in fluid communication with the one or more gas preconcentrator modules, wherein the plurality of gas sensor modules includes at least a first gas sensor module with a first chemical responsiveness and a second gas sensor module with a second chemical responsiveness different from the first chemical responsiveness,

wherein the plurality of gas sensor modules comprise electrochemical gas sensors with differing chemical responsivities provided by differing working electrode potentials, filters, electrolytes or electrode materials, and

wherein at least one electrochemical gas sensor includes;

a substrate having a top surface and a bottom surface, wherein a first part of the top surface has a gas adsorbent material attached thereto and a first electrical heater element attached to a first part of the bottom surface opposite the first part of the top surface, wherein a second part of the top surface has an interdigitated array of electrodes attached thereto and a metal oxide coating attached to the second part of the top surface and covering the interdigitated array of electrodes, and wherein a second electrical heater element is attached to a second part of the bottom surface opposite the second part of the top surface.

11. The gas sensor system of claim 10, wherein the gas adsorbent material is a molecular sieve.

12. The gas sensor system of claim 10, wherein the one or more gas preconcentrator modules and the plurality of gas sensor modules are mounted in a cavity of a combination package.

13. The gas sensor system of claim 10, further comprising an integrated circuit in electrical communication with the preconcentrator and gas sensor modules.

14. The gas sensor system of claim 10, wherein the different chemical responsivities are obtained by operating similar metal oxide gas sensors at different temperatures.

15. The gas sensor system of claim 10 wherein the different chemical responsivities are obtained from metal oxide sensors with different metal oxide materials.

16. The gas sensor system of claim 10, wherein the one or more gas preconcentrator modules are mounted in a first cavity of a combination package and the plurality of gas sensor modules are mounted in a second cavity of the combination package, wherein the cavities are in fluid communication with one another.

17. The gas sensor system of claim 10, wherein the one or more gas preconcentrator modules are mounted in a cavity of a first package and the plurality of gas sensor modules are mounted in a cavity of a second package, and wherein an exit port of the cavity of the first package is in fluid communication with an input port of the cavity of the second package.

18. The gas sensor system of claim 10, wherein the one or more gas preconcentrator modules are in a first package having an input gas port exposed to ambient air and having a gas permeable membrane attached to the input gas port, wherein the plurality of gas sensor modules are in a second package having an output gas port exposed to ambient air and having a second gas permeable membrane attached to the output gas port.

19. The gas sensor of system 18, wherein the first package and second package are the same package.