Method of manufacturing MEMS switches with reduced voltage
First Claim
1. A method of fabricating a switch comprising:
- forming a first fixed electrode and a second fixed electrode;
forming a first cantilevered electrode aligned vertically over the first fixed electrode and the second fixed electrode, and operable to directly contact the second fixed electrode upon an application of a positive voltage to the first fixed electrode;
forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps and is parallel to an end of the first cantilevered electrode; and
forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode,wherein the forming the hermetically sealed volume comprises;
forming at least one hole in a nitride liner to gain access to a sacrificial resist;
etching the sacrificial resist; and
closing the at least one hole by deposition of additional liner material.
1 Assignment
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Accused Products
Abstract
An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode and the second fixed electrode, and operable to directly contact the second fixed electrode upon an application of a voltage to the first fixed electrode, forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps the first cantilevered electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
60 Citations
12 Claims
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1. A method of fabricating a switch comprising:
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forming a first fixed electrode and a second fixed electrode; forming a first cantilevered electrode aligned vertically over the first fixed electrode and the second fixed electrode, and operable to directly contact the second fixed electrode upon an application of a positive voltage to the first fixed electrode; forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps and is parallel to an end of the first cantilevered electrode; and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode, wherein the forming the hermetically sealed volume comprises; forming at least one hole in a nitride liner to gain access to a sacrificial resist; etching the sacrificial resist; and closing the at least one hole by deposition of additional liner material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a switch comprising:
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forming a first fixed electrode and a second fixed electrode; forming a first cantilevered electrode aligned vertically over the first fixed electrode and the second fixed electrode, and operable to directly contact the second fixed electrode upon an application of a voltage to the first fixed electrode; forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps the first cantilevered electrode; and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode, wherein the forming the hermetically sealed volume comprises; forming at least one hole in a nitride liner to gain access to a sacrificial resist; etching the sacrificial resist; and closing the at least one hole by deposition of additional liner material.
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Specification