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Method and device for detecting the surface structure and properties of a probe

  • US 9,826,918 B2
  • Filed: 08/28/2015
  • Issued: 11/28/2017
  • Est. Priority Date: 08/28/2015
  • Status: Active Grant
First Claim
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1. A method for detecting the surface structure and composition of a sample by means of a scanning unit wherein the sample and the scanning unit are moved in relation to one another,whereina sample surface is irradiated line-by-line using a laser beam emitted from the scanning unit, having predefined laser beam diameter in a step width corresponding to the laser beam diameter, and the reflected laser beam is detected and analyzed coaxially in relation to the emitted laser beam, the laser beam reflected from the sample surface is detected and a digital image of the topography of the sample surface and the intensity of the reflected laser beam is generated from deviations of the reflected laser beam from the emitted laser beam and a run time, which is dependent on the distance of the scanning unit from the sample surface, of the laser beam, which is emitted from the scanning unit and reflected from the sample surface, is detected and analyzed to prepare a distance image corresponding to the topography of the sample surface.

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