Tightly fitted ceramic insulator on large area electrode
First Claim
1. A showerhead assembly comprising:
- a gas distribution plate;
an insulative frame assembly circumscribing a perimeter edge of the gas distribution plate; and
a conducting element disposed in the insulative frame assembly electrically coupled to the gas distribution plate.
1 Assignment
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Accused Products
Abstract
Embodiments of the invention generally include shield frame assembly for use with a showerhead assembly, and a showerhead assembly having a shield frame assembly that includes an insulator that tightly fits around the perimeter of a showerhead in a vacuum processing chamber. In one embodiment, a showerhead assembly includes a gas distribution plate and a multi-piece frame assembly that circumscribes a perimeter edge of the gas distribution plate. The multi-piece frame assembly allows for expansion of the gas distribution plate without creating gaps which may lead to arcing. In other embodiments, the insulator is positioned to be have the electric fields concentrated at the perimeter of the gas distribution plate located therein, thereby reducing arcing potential.
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Citations
18 Claims
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1. A showerhead assembly comprising:
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a gas distribution plate; an insulative frame assembly circumscribing a perimeter edge of the gas distribution plate; and a conducting element disposed in the insulative frame assembly electrically coupled to the gas distribution plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A processing chamber, comprising:
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a chamber body having a plurality of walls and a lid which define a processing volume within the chamber body; a substrate support disposed in the processing volume, configured to support a substrate for processing; a backing plate disposed on the lid; an insulator disposed between the backing plate and the lid; and a showerhead assembly disposed between the backing plate and the substrate support, wherein the showerhead assembly further comprises; a gas distribution plate; an insulative frame assembly circumscribing a perimeter edge of the gas distribution plate; and a conducting element disposed in the insulative frame assembly electrically coupled to the gas distribution plate. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification