Tightly fitted ceramic insulator on large area electrode

• US 9,827,578 B2
• Filed: 05/29/2015
• Issued: 11/28/2017
• Est. Priority Date: 05/21/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kudela, Jozef, Baek, Jonghoon, White, John M., Tiner, Robin, Anwar, Suhail, Furuta, Gaku
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US14/726,067
• Publication Number:
  US 20150273490A1
• Time in Patent Office: 914 Days
• CPC Class Codes: B05B 1/185 characterised by their outlet element; Mounting arrangements therefor
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/509 using internal electrodes
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32532 Electrodes
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32651 Shields, e.g. dark space shields, Faraday shields
• CPC Class Codes: Y10T 137/6851 With casing, support, protector or static constructional installations

Abstract

Embodiments of the invention generally include shield frame assembly for use with a showerhead assembly, and a showerhead assembly having a shield frame assembly that includes an insulator that tightly fits around the perimeter of a showerhead in a vacuum processing chamber. In one embodiment, a showerhead assembly includes a gas distribution plate and a multi-piece frame assembly that circumscribes a perimeter edge of the gas distribution plate. The multi-piece frame assembly allows for expansion of the gas distribution plate without creating gaps which may lead to arcing. In other embodiments, the insulator is positioned to be have the electric fields concentrated at the perimeter of the gas distribution plate located therein, thereby reducing arcing potential.

Claims

1. A showerhead assembly comprising:

a gas distribution plate;

an insulative frame assembly circumscribing a perimeter edge of the gas distribution plate; and

a conducting element disposed in the insulative frame assembly electrically coupled to the gas distribution plate.

2. The showerhead assembly of claim 1, wherein the conducting element is part of the gas distribution plate.

3. The showerhead assembly of claim 2, wherein the conducting element extends from the gas distribution plate into a slot formed in the insulative frame assembly.

4. The showerhead assembly of claim 1, wherein the insulative frame assembly further comprises:

a first frame member having a free end; and

a second frame member having an orientation perpendicular to the first frame member, the second frame member having a fixed end abutting the free end of the first frame member.

5. The showerhead assembly of claim 4, wherein the first frame member is longer than the second frame member and the conducting element electrically couples the gas distribution plate to the first frame member.

6. The showerhead assembly of claim 5, wherein the first frame member has a slot which accepts the conducting element.

7. The showerhead assembly of claim 1, wherein the conducting element is part of the insulative frame assembly.

8. The showerhead assembly of claim 7, wherein the conducting element extends into a slot formed in the gas distribution plate.

9. The showerhead assembly of claim 1, further comprising:

a static pin configured to secure the insulative frame assembly to the gas distribution plate.

10. A processing chamber, comprising:

a chamber body having a plurality of walls and a lid which define a processing volume within the chamber body;

a substrate support disposed in the processing volume, configured to support a substrate for processing;

a backing plate disposed on the lid;

an insulator disposed between the backing plate and the lid; and

a showerhead assembly disposed between the backing plate and the substrate support, wherein the showerhead assembly further comprises;

a gas distribution plate;

an insulative frame assembly circumscribing a perimeter edge of the gas distribution plate; and

a conducting element disposed in the insulative frame assembly electrically coupled to the gas distribution plate.

11. The processing chamber of claim 10, wherein the conducting element of the showerhead assembly is part of the gas distribution plate.

12. The processing chamber of claim 11, wherein the conducting element extends into a slot formed in the insulative frame assembly.

13. The processing chamber of claim 10, wherein the insulative frame assembly further comprises:

a first frame member having a free end; and

a second frame member having an orientation perpendicular to the first frame member, the second frame member having a fixed end abutting the free end of the first frame member.

14. The processing chamber of claim 13, wherein the first frame member is longer than the second frame member and the conducting element electrically couples the gas distribution plate to the first frame member.

15. The processing chamber of claim 14, wherein the first frame member has a slot which accepts the conducting element.

16. The processing chamber of claim 10, wherein the conducting element is part of the insulative frame assembly.

17. The processing chamber of claim 16, wherein the conducting element extends into a slot formed in the gas distribution plate.

18. The processing chamber of claim 10, wherein the showerhead assembly further comprises:

a static pin configured to secure the insulative frame assembly to the gas distribution plate.