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Spectroscopic apparatus

  • US 9,829,380 B2
  • Filed: 06/20/2014
  • Issued: 11/28/2017
  • Est. Priority Date: 07/17/2013
  • Status: Active Grant
First Claim
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1. A spectroscopic apparatus using light having a first wavelength which has a predetermined absorptivity for a specific object, and light having a second wavelength which has a smaller absorptivity for the specific object than the first wavelength, the spectroscopic apparatus comprising:

  • a light radiating portion configured to radiate, to a target, collimated light with the first wavelength which is obtained by the light having the first wavelength being substantially collimated, and collimated light with the second wavelength which is obtained by the light having the second wavelength being substantially collimated;

    a light receiving portion configured to receive first scattered light obtained by the collimated light with the first wavelength transmitting through the target or being reflected by the target, and second scattered light obtained by the collimated light with the second wavelength transmitting through the target or being reflected by the target; and

    a measuring portion configured to generate information to be used for detection of the specific object at the target, based on a difference between the first scattered light and the second scattered light received by the light receiving portion,wherein the light radiating portion includes a scan processing portion configured to radiate the collimated light with the first wavelength directly to the target so as to scan in 2 dimensional directions by using reflection and diffraction, and then radiate the collimated light with the second wavelength directly to the target after radiating with the first wavelength so as to scan in the 2-dimensional directions by using reflection and diffraction.

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