Electronic device, electronic apparatus, and moving object

• US 9,829,505 B2
• Filed: 03/16/2015
• Issued: 11/28/2017
• Est. Priority Date: 03/18/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Furuhata, Makoto
• Primary Examiner(s): Chapman, Jr., John
• Application Number:
  US14/658,364
• Publication Number:
  US 20150268266A1
• Time in Patent Office: 988 Days
• Field of Search: 73493
• CPC Class Codes: G01C 19/5783 Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48227 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/49109 outside the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/181 Encapsulation

Abstract

An electronic device includes an accommodation space formed between a first base material and a second base material so as to seal a space therebetween, and a functional element in the accommodation space. The accommodation space is formed in an inner region of a bonding portion between the first base material and the second base material. The electronic device includes wirings extending from the inner region through the bonding portion to the outside of the accommodation space. The bonding portion includes a first bonding region and a second bonding region. The wiring includes a first wiring portion having a first direction toward the outside through the first bonding region from the inner region and a second wiring portion having a second direction toward the outside through the second bonding region from the inner region. The first and the second directions are different.

Claims

1. An electronic device comprising:

a first base that has first peripheral edge and first center area;

a second base that has second peripheral edge and second center area, the first peripheral edge of the first base being bonded to the second peripheral edge of the second base at a bonding portion so as to provide first and second accommodation spaces between the first and second base;

a partition wall that is provided at the first center area of the first base and at the second center area of the second base so that the partition wall separates the first accommodation space from the second accommodation space, the partition wall extending in a first direction;

a first functional element that is accommodated in the first accommodation space, the first functional element is configured with first, second, and third members, the first, second, and third members being arranged along the first direction, the first, second, and third members detecting first physical quantities with respect to first, second, and third axes, the second member being sandwiched between the first and third members;

a second functional element that is accommodated in the second accommodation space, the second functional element is configured with fourth, fifth, and sixth members, the fourth, fifth, and sixth members being arranged along the first direction, the fourth, fifth, and sixth members detecting second physical quantities with respect to the first, second, and third axes, the fifth member being sandwiched between the fourth and sixth members;

a first wiring that is electrically and physically connected to each of the first and fourth members, the first wiring outwardly extending from each of the first and fourth members in a second direction parallel to the first direction and toward a first side of the first peripheral edge of the first base;

a second wiring that is electrically and physically connected to each of the third and sixth members, the second wiring outwardly extending from each of the third and sixth members in a third direction parallel to the first and second directions and toward a second side of the first peripheral edge of the first base, the second side of the first peripheral edge being opposite to the first side; and

third and fourth wirings that are electrically and physically connected to each of the second and fifth members, the third wiring outwardly extending from each of the second and fifth members in the second direction and toward the first side of the first peripheral edge of the first base, the fourth wiring outwardly extending from each of the second and fifth members in the third direction and toward the second side of the first peripheral edge of the first base,

wherein the first, second, third, and fourth wirings extend outside of each of the first accommodation space and the second accommodation space via the bonding portion, and

the first accommodation space and the second accommodation space have different internal environments.

2. The electronic device according to claim 1,

wherein at least one of the first, second, third, and fourth wirings includes a plurality of wirings that are provided in a plurality of grooves and sealed by a plurality of sealing members.

3. The electronic device according to claim 1,

wherein the first functional element is an angular velocity sensor, and the second functional element is an acceleration sensor, and

wherein the internal environment of the first accommodation space has a decompressed atmosphere, and the internal environment of the second accommodation space has a barometric atmosphere.

4. The electronic device according to claim 3, wherein the angular velocity sensor detects angular velocity around the first, second, and third axes.

5. The electronic device according to claim 3, wherein the acceleration sensor detects acceleration in directions along the first, second, and third axes.

6. The electronic device according to claim 1,

wherein the first and third wirings overlap with the bonding portion at a first extended area located in the first side of the first peripheral edge of the first base, and the second and fourth wirings overlap with the bonding portion at a second extended area located in the second side of the first peripheral edge of the first base, and

wherein the first extended area and the second extended area are disposed opposite to each other with respect to each of the first and second accommodation spaces.

7. The electronic device according to claim 1,

wherein each of the first, second, third, and fourth wirings configures with a plurality of wirings, and

wherein the number of wirings of the plurality of wirings in the first wiring is the same as the number of wirings of the plurality of wirings in the second wiring.

8. A digital still camera comprising:

a camera body having a lens; and

an electronic module that is provided in an inside of the camera body and that has the electronic device according to claim 1.

9. A digital still camera comprising:

a camera body having a lens; and

an electronic module that is provided in an inside of the camera body and that has the electronic device according to claim 2.

10. A digital still camera comprising:

a camera body having a lens; and

an electronic module that is provided in an inside of the camera body and that has the electronic device according to claim 3.

11. A digital still camera comprising:

a camera body having a lens; and

an electronic module that is provided in an inside of the camera body and that has the electronic device according to claim 6.

12. A digital still camera comprising:

a camera body having a lens; and

an electronic module that is provided in an inside of the camera body and that has the electronic device according to claim 7.

13. A vehicle comprising:

a vehicle body;

vehicle wheels; and

an electronic module that is provided in an inside of the vehicle body and that has the electronic device according to claim 1.

14. A vehicle comprising:

a vehicle body;

vehicle wheels; and

an electronic module that is provided in an inside of the vehicle body and that has the electronic device according to claim 2.

15. A vehicle comprising:

a vehicle body;

vehicle wheels; and

an electronic module that is provided in an inside of the vehicle body and that has the electronic device according to claim 3.

16. A vehicle comprising:

a vehicle body;

vehicle wheels; and

an electronic module that is provided in an inside of the vehicle body and that has the electronic device according to claim 6.

17. A vehicle comprising:

a vehicle body;

vehicle wheels; and

an electronic module that is provided in an inside of the vehicle body and that has the electronic device according to claim 7.