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Vertical output couplers for photonic devices

  • US 9,829,631 B2
  • Filed: 04/20/2016
  • Issued: 11/28/2017
  • Est. Priority Date: 04/20/2015
  • Status: Active Grant
First Claim
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1. A method of forming a vertical output coupler for a waveguide that propagates light, along a horizontal propagation direction, through a waveguide material that overlies a buried oxide layer, the method comprising:

  • etching the waveguide material to form the waveguide;

    etching the waveguide material to remove at least a first portion of the waveguide, wherein the etching forms;

    at least a first tilted plane in the waveguide material, anda space between an unetched portion of the waveguide and the first tilted plane;

    coating the first tilted plane with a reflective metal to form a tilted mirror; and

    depositing an index matching material into the space between the unetched portion of the waveguide and the tilted mirror so that light propagating through the waveguide into the space continues through the index matching material to the tilted mirror, and the tilted mirror reflects the light upwardly, wherein depositing the index matching material into the space between the unetched portion of the waveguide and the tilted mirror comprises depositing amorphous silicon.

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