High efficiency on-chip 3D transformer structure

• US 9,831,026 B2
• Filed: 07/24/2013
• Issued: 11/28/2017
• Est. Priority Date: 07/24/2013
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Barry, Robert L., Vanukuru, Venkata Nr.
• Primary Examiner(s): Talpalatski, Alexander
• Assistant Examiner(s): BAISA, JOSELITO SASIS
• Application Number:
  US13/950,027
• Publication Number:
  US 20150028979A1
• Time in Patent Office: 1,588 Days
• Field of Search: 336170, 336182, 336183, 336199, 336200, 336208, 257531
• CPC Class Codes: H01F 19/04 Transformers or mutual inductances suitable for handling frequencies considerably beyond the audio range resonant circuits H03H
• CPC Class Codes: H01F 2027/2819 Planar transformers with printed windings, e.g. surrounded by two cores and to be mounted on printed circuit
• CPC Class Codes: H01F 27/2804 Printed windings

Abstract

A transformer structure includes at least three sections, each corresponding to metal layers of an integrated circuit. A first section of the at least three sections is electrically coupled to a third section with a second section disposed between the first and third sections. The at least three sections includes inductor coils, all of which are wound in a same direction and voltage phase starting at an outer terminal and continuing to an inner terminal of each inductor coil. At least one radial wiring channel passes through a portion of a coil in one of the three sections to provide an external connection to an internal terminal of the coil in at least one of the three sections.

Claims

1. A transformer structure, comprising:

at least three sections, each corresponding to metal layers of an integrated circuit, the at least three sections including;

a first section of the at least three sections being electrically coupled to a third section with a second section disposed between the first and third sections,

wherein the at least three sections including inductor coils, all of which are wound in a same direction and voltage phase starting at an outer terminal and continuing to an inner terminal of each inductor coil;

a first wire electrically coupling an inner terminal of the inductor coil of the first section to a first intermediate terminal of the third section;

a second wire electrically coupling an inner terminal of the inductor coil of the second section to a second intermediate terminal of the third section, the second intermediate terminal of the third section distinct from the first intermediate terminal of the third section;

a break formed through a portion of the inductor coil of the third section of the at least three sections; and

a plurality of radial connections positioned within the break formed through the portion of the inductor coil of the third section, the plurality of radial connections including;

a first radial connection extending between the first intermediate terminal of the third section to the outer terminal of the inductor coil of the third section, the first radial connection electrically coupling the inner terminal of the inductor coil of the first section to the outer terminal of the inductor coil of the third section; and

a second radial connection extending from the second intermediate terminal of the third section to an exterior of the transformer structure, the second radial connection providing electrical accessibility to the inner terminal of the inductor coil of the second section from the exterior of the transformer structure.

2. The structure as recited in claim 1, wherein the inductor coils in the first and third sections form a primary coil and the inductor coil in the second section forms a secondary coil.

3. The structure as recited in claim 1, wherein the inductor coils in the first and third sections form a secondary coil and the inductor coil in the second section forms a primary coil.

4. The structure as recited in claim 1, wherein the first section includes a plurality of metal layers and the inductor coil in the first section includes a folded or multi-layered solenoid shape.

5. The structure as recited in claim 1, wherein the third section includes a plurality of metal layers and the inductor coil in the third section includes a parallel stacked spiral having two or more metal layers connected with a via pattern.

6. The structure as recited in claim 1, wherein the second section includes multiple adjacent layers of inductor coils connected in parallel.

7. The structure as recited in claim 1, wherein the inductor coils of the second section are reduced in number and wider than the adjacent inductor coils in the first and third sections to increase turns ratio, reduce series losses and increase current handling.

8. The structure as recited in claim 1, wherein the inductor coils of the first section are decreased in width and increased in spacing, as compared to the inductor coils of the second section, from an outermost tum to an innermost tum to reduce series losses.

9. The structure as recited in claim 1, wherein the inductor coils of the third section include a finer spacing then one or the inductor coils in the first section or the second section to increase the turns ratio.

10. The structure as recited in claim 1, wherein the inductor coils of the third section include a wider track width than the inductor coils in the first section to reduce series losses and increase current handling.

11. The structure as recited in claim 1, wherein the inductor coils of the third section are offset from the inductor coils of the second section to increase performance.

12. The structure as recited in claim 1, wherein the first section includes a plurality of metal layers, and the inductor coil in the first section includes a folded conical shape that comprises a direction reversal.

13. The structure as recited in claim 12, wherein the direction reversal is of a coil shape.

14. The structure as recited in claim 12, wherein the folded conical shape comprises a cone having a reversed apex, and the inductor coil in the first section initially follows the cone and subsequently follows the reversed apex.

15. The structure as recited in claim 1, wherein the plurality of radial connections further includes:

a third radial connection extending from the inner terminal of the inductor coil of the third section to the exterior of the transformer structure, the third radial connection providing electrical accessibility to the inner terminal of the inductor coil of the third section from the exterior of the transformer structure.

16. The structure as recited in claim 1, further comprising:

a first via formed through the at least three sections, the first via receiving the first wire electrically coupling the inner terminal of the inductor coil of the first section to the first intermediate terminal of the third section; and

a second via, formed through the second section and the third section of the at least three sections, the second via receiving the second wire electrically coupling the inner terminal of the inductor coil of the second section to the second intermediate terminal of the third section.