Compensation and calibration for MEMS devices

• US 9,834,438 B2
• Filed: 11/20/2015
• Issued: 12/05/2017
• Est. Priority Date: 03/12/2013
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Dar, Tehmoor M., Debeurre, Bruno J., Sessego, Raimondo P., Deken, Richard A., Geisberger, Aaron A., Suryanarayanan, Krithivasan
• Primary Examiner(s): Gray, Francis
• Application Number:
  US14/947,812
• Publication Number:
  US 20160167961A1
• Time in Patent Office: 746 Days
• CPC Class Codes: B81C 99/003 Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

A sensor system includes a microelectromechanical systems (MEMS) sensor, processing circuitry, measurement circuitry, stimulus circuitry and memory. The system is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processing circuitry, which is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. Output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor is monitored and used to calculate MEMS sensor characteristics. Methods for monitoring and calibrating MEMS sensors are also provided.

Claims

1. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor, comprising:

generating an electronic stimulus signal in the system;

providing the electronic stimulus signal to the MEMS sensor;

providing an electronic output from the MEMS sensor corresponding to a physical displacement of a portion of the MEMS sensor responsive to the electronic stimulus signal;

monitoring, the electronic output from the MEMS sensor;

determining a characteristic of the MEMS sensor based on the electronic output;

comparing the monitored electronic output to an expected output to determine if the difference between the monitored output and expected output is less than a pre-determined threshold;

calculating a new trim value for the MEMS sensor when the difference is less than the pre-determined threshold.

2. A method as claimed in claim 1, further including the step of storing the new trim value for the MEMS sensor in the system.

3. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor, comprising:

generating an electronic stimulus signal in the system;

providing the electronic stimulus signal to the MEMS sensor;

providing an electronic output from the MEMS sensor corresponding to a physical displacement of a portion of the MEMS sensor responsive to the electronic stimulus signal;

monitoring, the electronic output from the MEMS sensor;

determining a characteristic of the MEMS sensor based on the electronic output;

comparing the monitored electronic output to an expected output to determine if the difference between the monitored output and expected output is less than a pre-determined threshold;

monitoring in the processor the amount of elapsed time that has passed without the difference falling below the pre-determined threshold; and

,

recognizing an error condition if the elapsed time reaches a pre-determined time limit.

4. A method as claimed in claim 3, further including the step of calculating a new trim value for the MEMS sensor when the difference is less than the pre-determined threshold.

5. A method as claimed in claim 3, further including the step of disabling the system if an error condition is recognized.

6. A method as claimed in claim 3, further including calculating a trim value for the MEMS sensor based on the determined characteristic.

7. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor, comprising:

generating an electronic stimulus signal;

providing the generated electronic stimulus signal to a MEMS sensor of the system to cause a physical displacement of a portion of the MEMs sensor;

providing an output signal from the MEMS sensor corresponding to the physical displacement;

monitoring, in the system, the output signal;

analyzing the output signal to determine a characteristic of the MEMS sensor;

disabling a function of the system based on the determined characteristic.

8. A method as claimed in claim 7, wherein the step of analyzing the output signal further includes the step of comparing the output signal to an expected output of a MEMS sensor responsive to the generated electronic stimulus signal to determine a difference between the output signal and expected output.

9. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor, comprising:

generating an electronic stimulus signal;

providing the generated electronic stimulus signal to a MEMS sensor of the system to cause a physical displacement of a portion of the MEMs sensor;

providing an output signal from the MEMS sensor corresponding to the physical displacement;

monitoring, in the system, the output signal;

analyzing the output signal to determine a characteristic of the MEMS sensor, wherein the step of analyzing the output signal further includes the step of comparing the output signal to an expected output of a MEMS sensor responsive to the generated electronic stimulus signal to determine a difference between the output signal and expected output;

determining if a new trim value is needed based on at least one of the determined characteristic and determined difference.

10. A method as claimed in claim 9, further including the step of disabling a function of the system based on the determined characteristic.

11. A method as claimed in claim 9, further including the step of determining the new trim value based on at least one of the determined characteristic and determined difference.

12. A method as claimed in claim 11, further including the step of storing the new trim value in the system.

13. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor and a processor, comprising:

generating a stimulus signal in a processor;

providing the stimulus signal to a MEMS sensor in electrical communication with the processor, wherein the MEMS sensor includes a portion that displaces responsive to the stimulus signal test pattern;

providing an indicator electronic output from the MEMS sensor corresponding to the displacement to the processor;

monitoring, as it is provided, the indicator electronic output from the MEMS sensor in the processor;

comparing, as it is provided, the value of the monitored electronic output to an expected output to determine if the difference between the monitored output and expected output is less than a pre-determined threshold;

storing the stimulus signal in memory of the system.

14. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor and a processor, comprising:

generating a stimulus signal in a processor;

providing the stimulus signal to a MEMS sensor in electrical communication with the processor, wherein the MEMS sensor includes a portion that displaces responsive to the stimulus signal test pattern;

providing an indicator electronic output from the MEMS sensor corresponding to the displacement to the processor;

monitoring, as it is provided, the indicator electronic output from the MEMS sensor in the processor;

comparing, as it is provided, the value of the monitored electronic output to an expected output to determine if the difference between the monitored output and expected output is less than a pre-determined threshold;

monitoring in the processor the amount of elapsed time that has passed without the difference falling below the pre-determined threshold; and

,

recognizing an error condition if the elapsed time reaches a pre-determined time limit.

15. A method as claimed in claim 14, further including the step of disabling the system if an error condition is recognized.

16. A method as claimed in claim 14, further including the step storing the stimulus signal in memory of the system.

17. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor and a processor, comprising:

generating a stimulus signal in a processor;

providing the stimulus signal to a MEMS sensor in electrical communication with the processor, wherein the MEMS sensor includes a portion that displaces responsive to the stimulus signal test pattern;

providing an indicator electronic output from the MEMS sensor corresponding to the displacement to the processor;

monitoring, as it is provided, the indicator electronic output from the MEMS sensor in the processor;

comparing, as it is provided, the value of the monitored electronic output to an expected output to determine if the difference between the monitored output and expected output is less than a pre-determined threshold;

calculating a new trim value for the MEMS sensor when the difference is less than the pre-determined threshold.

18. A method as claimed in claim 17, further including the step of storing the new trim value for the MEMS sensor in the system.

19. A method as claimed in claim 17, further including the step storing the stimulus signal in memory of the system.