Chemical sensor with protruded sensor surface
First Claim
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1. A chemical sensor, comprising:
- a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface;
a conductive element protruding from the upper surface of the floating gate conductor;
a dielectric material defining a reaction region, the reaction region overlying and extending below an upper surface of the conductive element.
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Abstract
In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A conductive element protrudes from the upper surface of the floating gate conductor into an opening. A dielectric material defines a reaction region. The reaction region overlies and extends below an upper surface of the conductive element.
562 Citations
17 Claims
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1. A chemical sensor, comprising:
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a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface; a conductive element protruding from the upper surface of the floating gate conductor; a dielectric material defining a reaction region, the reaction region overlying and extending below an upper surface of the conductive element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for manufacturing a chemical sensor, the method comprising:
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forming a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface; forming a conductive element protruding from the upper surface of the floating gate conductor; and forming a dielectric material defining a reaction region overlying and extending below an upper surface of the conductive element. - View Dependent Claims (13, 14, 15, 16, 17)
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Specification