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Sensors, methods of making and devices

  • US 9,835,595 B2
  • Filed: 05/23/2014
  • Issued: 12/05/2017
  • Est. Priority Date: 05/23/2013
  • Status: Active Grant
First Claim
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1. A sensor comprising:

  • at least a first resonator, the at least first resonator having a first surface and an opposing second surface and the first resonator comprising;

    a bottom electrode;

    a piezoelectric layer; and

    a top electrode,wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode;

    a metal oxide layer positioned on at least the second surface of the first resonator, the metal oxide layer having a thickness from about 10 Å

    to about 500 Å and

    the metal oxide layer comprising oxygen atoms;

    a coupling layer comprising silicon atoms, the silicon atoms of the coupling layer bound to oxygen atoms in the metal oxide layer; and

    a molecular recognition component layer, the molecular recognition layer comprising molecular recognition components and the molecular recognition components bound to the coupling layer.

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