Sensors, methods of making and devices
First Claim
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1. A sensor comprising:
- at least a first resonator, the at least first resonator having a first surface and an opposing second surface and the first resonator comprising;
a bottom electrode;
a piezoelectric layer; and
a top electrode,wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode;
a metal oxide layer positioned on at least the second surface of the first resonator, the metal oxide layer having a thickness from about 10 Å
to about 500 Å and
the metal oxide layer comprising oxygen atoms;
a coupling layer comprising silicon atoms, the silicon atoms of the coupling layer bound to oxygen atoms in the metal oxide layer; and
a molecular recognition component layer, the molecular recognition layer comprising molecular recognition components and the molecular recognition components bound to the coupling layer.
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Abstract
Disclosed sensors can include at least one resonator (in some embodiments, at least two resonators) and various other structures that may be formed in association with the resonators. The at least one resonator in embodiments can include a bottom electrode, a piezoelectric layer, and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode.
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Citations
13 Claims
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1. A sensor comprising:
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at least a first resonator, the at least first resonator having a first surface and an opposing second surface and the first resonator comprising; a bottom electrode; a piezoelectric layer; and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode; a metal oxide layer positioned on at least the second surface of the first resonator, the metal oxide layer having a thickness from about 10 Å
to about 500 Å and
the metal oxide layer comprising oxygen atoms;a coupling layer comprising silicon atoms, the silicon atoms of the coupling layer bound to oxygen atoms in the metal oxide layer; and a molecular recognition component layer, the molecular recognition layer comprising molecular recognition components and the molecular recognition components bound to the coupling layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification