Angular velocity detection device and angular velocity sensor including the same
First Claim
1. An angular velocity detection device comprising:
- a first fixed portion,a second fixed portion,a first beam portion connected to the first fixed portion,a second beam portion connected to the second fixed portion,a sensing part connected to the first beam portion and the second beam portion,a detector portion disposed in the sensing portion,a first slit disposed between the sensing part and the first fixed portion,a second slit disposed between the sensing part and the second fixed portion,wherein the sensing part comprises;
a third beam portion connected to the first beam portion,a fourth beam portion connected to the second beam portion and extending along a same direction which the third beam portion extends along,a fifth beam portion connected to the third beam portion and the fourth beam portion and extending along a direction orthogonal to a direction which the third beam portion extends along,a sixth beam portion connected to the third beam portion and fourth beam portion and extending along a direction orthogonal to the direction which the third beam portion extends along and parallel to the fifth beam portion,a central beam portion connected to the fifth beam portion and the sixth beam portion, a seventh beam portion, an eighth beam portion, a ninth beam portion, and a tenth beam portion each connected to the central beam portion, anda first mass portion, a second mass portion, a third mass portion, and a fourth mass portion connected to a respective one of the seventh beam portion, the eighth beam portion, the ninth beam portion, and the tenth beam portion,wherein the detector portion comprises;
a first angular velocity detector portion, disposed on the third beam portion and the forth beam portion, that detects an angular velocity around a first axis, anda second angular velocity detector portion, disposed on the fifth beam portion and the sixth beam portion, that detects an angular velocity around a second axis orthogonal to the first axis.
0 Assignments
0 Petitions
Accused Products
Abstract
An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
19 Citations
25 Claims
-
1. An angular velocity detection device comprising:
-
a first fixed portion, a second fixed portion, a first beam portion connected to the first fixed portion, a second beam portion connected to the second fixed portion, a sensing part connected to the first beam portion and the second beam portion, a detector portion disposed in the sensing portion, a first slit disposed between the sensing part and the first fixed portion, a second slit disposed between the sensing part and the second fixed portion, wherein the sensing part comprises; a third beam portion connected to the first beam portion, a fourth beam portion connected to the second beam portion and extending along a same direction which the third beam portion extends along, a fifth beam portion connected to the third beam portion and the fourth beam portion and extending along a direction orthogonal to a direction which the third beam portion extends along, a sixth beam portion connected to the third beam portion and fourth beam portion and extending along a direction orthogonal to the direction which the third beam portion extends along and parallel to the fifth beam portion, a central beam portion connected to the fifth beam portion and the sixth beam portion, a seventh beam portion, an eighth beam portion, a ninth beam portion, and a tenth beam portion each connected to the central beam portion, and a first mass portion, a second mass portion, a third mass portion, and a fourth mass portion connected to a respective one of the seventh beam portion, the eighth beam portion, the ninth beam portion, and the tenth beam portion, wherein the detector portion comprises; a first angular velocity detector portion, disposed on the third beam portion and the forth beam portion, that detects an angular velocity around a first axis, and a second angular velocity detector portion, disposed on the fifth beam portion and the sixth beam portion, that detects an angular velocity around a second axis orthogonal to the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. An angular velocity detection device comprising:
-
a first mass portion, a second mass portion, a third mass portion and a fourth mass portion, a frame portion connected to the first mass portion, the second mass portion, the third mass portion and the fourth mass portion via a plurality of beam portions, a first angular velocity detector portion disposed on the frame portion that detects an angular velocity around a first axis, and a second angular velocity detector portion disposed on the frame portion that detects an angular velocity around a second axis orthogonal to the first axis, wherein the frame portion comprises a first slit, a second slit, a third slit and a fourth slit, wherein the first angular velocity detector portion comprises a first portion and a second portion, the first portion and the second portion of the first angular velocity detector portion disposed on opposite positions on the frame portion, and wherein the second angular velocity detector portion comprises a first portion and a second portion, the first portion and the second portion of the second angular velocity detector portion disposed on opposite positions on the frame portion. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. An angular velocity detection device comprising:
-
a first mass portion, a second mass portion, a third mass portion and a fourth mass portion, a frame portion connected to the first mass portion, the second mass portion, the third mass portion and the fourth mass portion via a plurality of beam portions, being capable of being moved by angular velocity applied to the angular velocity detection device, wherein the frame portion comprises a first slit, a second slit, a third slit and a fourth slit, and wherein a first angular velocity detector portion to detect an angular velocity around a first axis and a second angular velocity detector portion to detect an angular velocity around a second axis orthogonal to the first axis are disposed on the frame portion. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
-
Specification