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Edge construction on optical devices

  • US 9,835,801 B1
  • Filed: 09/22/2016
  • Issued: 12/05/2017
  • Est. Priority Date: 09/22/2016
  • Status: Active Grant
First Claim
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1. A method of forming an optical device, comprising:

  • forming a waveguide mask on a device precursor,the device precursor including a waveguide positioned on a base;

    forming a facet mask on the device precursor such that at least a portion of the waveguide mask is between the facet mask and the base; and

    forming a recess in the base while a protective portion of the facet mask is over a facet of the waveguide, the protective portion of the facet mask also being over a facet shelf that extends from a side of the recess.

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