Radial waveguide systems and methods for post-match control of microwaves

• US 9,837,249 B2
• Filed: 12/29/2016
• Issued: 12/05/2017
• Est. Priority Date: 03/20/2014
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kobayashi, Satoru, Park, Soonam, Lubomirsky, Dmitry, Sugai, Hideo
• Primary Examiner(s): Le, Tung X
• Application Number:
  US15/394,583
• Publication Number:
  US 20170110290A1
• Time in Patent Office: 341 Days
• Field of Search: 315 39, 315248, 31511121, 31511131, 31511141, 31511151, 31511171, 118723 E, 118723 R, 118728, 216 61, 216 68, 216 71
• CPC Class Codes: H01J 19/80 Structurally associated resonator having distributed inductance and capacitance
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/32201 Generating means
• CPC Class Codes: H01J 37/32229 Waveguides
• CPC Class Codes: H01J 37/32302 Plural frequencies
• CPC Class Codes: H01J 37/32311 Circuits specially adapted for controlling the microwave discharge
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H01J 7/24 Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
• CPC Class Codes: H05B 41/16 in which the lamp is fed by dc or by low-frequency ac, e.g. by 50 cycles/sec ac, or with network frequencies

Abstract

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.

Claims

1. A system that generates microwaves in a waveguide, comprising:

the waveguide;

one or more transmitters that transmit;

a first microwave signal into the waveguide at a first location, and

a second microwave signal into the waveguide at a second location,

at least one monitoring antenna within the waveguide that provides an analog signal responsive to microwaves at a location of the monitoring antenna; and

a controller that receives the analog signal, and in response to the analog signal, adjusts at least one of a phase and an amplitude of the first microwave signal or the second microwave signal, until the analog signal meets a predetermined condition.

2. The system as recited in claim 1, wherein in response to the analog signal, the controller that receives the analog signal adjusts both the phase and the amplitude of the first microwave signal or the second microwave signal, to achieve the predetermined condition.

3. The system as recited in claim 1, further comprising:

a target input device configured to provide a target parameter to the controller;

and wherein;

the controller adjusts the at least one of the phase and the amplitude of the first microwave signal or the second microwave signal, based on the analog signal and the target parameter.

4. The system as recited in claim 1, wherein at least one of the one or more transmitters includes an electronics set that receives and amplifies an input microwave signal to form one of the first and second microwave signals, and wherein the electronics set includes:

a tuner that matches an impedance of the electronics set to an impedance presented by the waveguide;

a dummy load; and

a circulator that shunts power reflected by the waveguide back to the electronics set, into the dummy load.

5. The system as recited in claim 4, wherein:

the controller adjusts the at least one of the phase and the amplitude of the first microwave signal by adjusting a corresponding one of the phase and the amplitude of the input microwave signal, and

the tuner matches the impedance, concurrently with the controller adjusting the at least one of the phase and the amplitude.

6. The system as recited in claim 1, wherein the monitoring antenna is disposed proximate to the first location or the second location.

7. The system as recited in claim 1,

comprising at least two of the monitoring antennas that provide respective analog signals responsive to microwaves at respective locations of each of the monitoring antennas;

and wherein

the controller receives the respective analog signals and adjusts at least the at least one of the phase and the amplitude of the first microwave signal or the second microwave signal, to achieve the predetermined condition at the respective locations of each of the monitoring antennas.

8. The system as recited in claim 7, wherein the waveguide is characterized by a circumference, and:

a first one of the monitoring antennas is disposed 90 degrees about the circumference from the first location; and

a second one of the monitoring antennas is disposed 90 degrees about the circumference from the second location.

9. The system as recited in claim 1, wherein the monitoring antenna comprises a loop antenna that measures a magnetic field to provide the analog signal.

10. The system as recited in claim 1, further comprising a signal generator that provides one or more input microwave signals to the controller and to the one or more transmitters, wherein:

the controller adjusts at least the at least one of the phase and the amplitude of the one or more input microwave signals to achieve the predetermined condition by providing a digital correction signal to the signal generator, and

the signal generator adjusts the at least one of the phase and the amplitude of one of the input microwave signals provided to one of the transmitters, relative to at least one of the phase and the amplitude of one of the input microwave signals provided to another one of the transmitters, in response to the digital correction signal.

11. The system as recited in claim 1, wherein the controller comprises:

a high frequency clock generator that produces a high frequency reference signal;

a control clock generator that produces a low frequency control signal;

an in-phase and quadrature-phase demodulator that produces a first digital in-phase signal and a first digital quadrature phase signal from the analog signal; and

a microcontroller that generates a correction signal based at least in part on the first digital in-phase signal and the first digital quadrature phase signal, the correction signal specifying adjustment information that, when utilized by the system to adjust the at least one of the phase and the amplitude of an input microwave signal provided to one or more of the plurality of transmitters, produces one or more changes in the analog signal toward the predetermined condition.

12. A signal corrector that provides a correction signal for a microwave generator that transmits microwaves, at a microwave frequency, into a microwave chamber from at least two locations, the signal corrector comprising:

a first clock generator that produces the microwave frequency;

a second clock generator that produces a control signal;

a decoder that produces one or more digital signals in response to at least one analog signal from a location within the microwave chamber, at each cycle of the control signal; and

a microcontroller that generates the correction signal based at least in part on the one or more digital signals, wherein the correction signal specifies an adjustment, by the microwave generator, for at least one of a phase and an amplitude of the microwaves transmitted into the microwave chamber.

13. The signal corrector of claim 12, wherein the decoder produces a first one of the one or more digital signals by:

mixing the at least one analog signal with the microwave frequency to produce an intermediate frequency signal;

converting the intermediate frequency signal to a digital sample at intervals determined from the control signal; and

multiplying the digital sample with a first value obtained from a read-only memory to produce the first one of the one or more digital signals.

14. The signal corrector of claim 13, wherein:

the first value obtained from the read-only memory corresponds to cos(ω

n), where ω

is defined as 2π

f_IF/f_s, where f_s is a sampling frequency of the control signal and f_IF is a frequency of the intermediate frequency signal,

such that the first one of the digital signals corresponds to a digital in-phase signal.

15. The signal corrector of claim 13, wherein the decoder produces a second one of the one or more digital signals by:

multiplying the digital sample with a second value obtained from the read-only memory to produce the second one of the one or more digital signals.

16. The signal corrector of claim 15, wherein:

the second value obtained from the read-only memory corresponds to −

sin(ω

n), where ω

is defined as 2π

f_IF/f_s, where f_s is a sampling frequency of the control signal and f_IF is a frequency of the intermediate frequency signal,

such that the second one of the digital signals corresponds to a digital quadrature phase signal.

17. The signal corrector of claim 12, further comprising a low pass filter that is used to eliminate high frequency digital noise from at least one of the one or more digital signals.

18. The signal corrector of claim 12, wherein the microcontroller provides phase adjustment information for the microwaves based at least in part on the one or more digital signals.

19. The signal corrector of claim 12, wherein the microcontroller provides amplitude adjustment information for the microwaves based at least in part on the one or more digital signals.

20. The signal corrector of claim 12, wherein:

the decoder produces the one or more digital signals in response to the at least one analog signal, and

the microcontroller generates the correction signal based at least in part on the one or more digital signals,

concurrently with one or more tuners of the microwave generator matching an impedance of the microwave generator to an impedance presented by the microwave chamber, as the microwaves are transmitted into the microwave chamber.