Production method for group III nitride semiconductor and group III nitride semiconductor

• US 9,837,494 B2
• Filed: 03/18/2013
• Issued: 12/05/2017
• Est. Priority Date: 03/30/2012
• Status: Active Grant

• Current Assignee: Toyoda Gosei Company Limited (Toyota Motor Corporation)
• Original Assignee: Toyoda Gosei Company Limited (Toyota Motor Corporation)
• Inventors: Okuno, Koji, Oshio, Takahide, Shibata, Naoki, Amano, Hiroshi
• Primary Examiner(s): Wilczewski, Mary
• Assistant Examiner(s): CHIU, TSZ K
• Application Number:
  US13/845,453
• Publication Number:
  US 20130256743A1
• Time in Patent Office: 1,723 Days
• Field of Search: 117952, 117 90, 117 94, 117 95, 117106
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02609 Crystal orientation
• CPC Class Codes: H01L 29/04 characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes characterised by physical imperfections H01L29/30
• CPC Class Codes: H01L 29/2003 Nitride compounds
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/16 with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
• CPC Class Codes: H01L 33/32 containing nitrogen

Abstract

A method for producing a Group III nitride semiconductor comprising forming mesas on a main surface of a substrate, and growing Group III nitride semiconductor in a c-axis direction thereof, wherein the plane most parallel to the side surfaces of the mesas or the dents among the low-index planes of growing Group III nitride semiconductor is a m-plane (1-100), and when a projected vector obtained by orthogonally projecting a normal vector of the processed side surface to the main surface is defined as a lateral vector, an angle between the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of the m-plane of the growing Group III nitride semiconductor to the main surface is 0.5° or more and 6° or less.

Claims

1. A method for producing a Group III nitride semiconductor comprising:

forming mesas and dents on a main surface of a substrate by processing the substrate, the mesas and dents being made of material of the substrate as one body; and

growing Group III nitride semiconductor in a c-axis direction of the Group III nitride semiconductor on the top surfaces of the mesas and the bottom surfaces of the dents, wherein

the substrate consists of one member selected from a group consisting of sapphire, SiC, Si and ZnO, and

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions;

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of the m-plane of the growing Group III nitride semiconductor to the main surface is 0.5°

or more and 6°

or less.

7. A method for producing a Group III nitride semiconductor according to claim 1, wherein the mesas or the dents are formed in a periodic structure where a stripe extending in a first direction is repeated in a second direction perpendicular to the first direction on the main surface.

10. A method for producing a Group III nitride semiconductor according to claim 1, wherein the mesa or the dent has a shape selected from a group consisting of regular triangular prism, rhombic prism, regular hexagonal prism, regular triangular pyramid, rhombic pyramid, and regular hexagonal pyramid, and a plurality of dents or mesas are arranged in a honeycomb pattern at regular intervals.

11. A method for producing a Group III nitride semiconductor according to claim 1, wherein the angle is 1°

or more and 5°

or less.

12. A method for producing a Group III nitride semiconductor according to claim 1, wherein the angle is 1°

or more and 2.5°

or less.

13. A method for producing a Group III nitride semiconductor according to claim 1, wherein a buffer layer is formed on the substrate having the mesas and the dents thereon, and thereafter, the Group III nitride semiconductor is grown.

14. A method for producing a Group III nitride semiconductor according to claim 13, wherein the buffer layer is formed by a sputtering method.

2. A method for producing a Group III nitride semiconductor comprising:

forming mesas and dents on a main surface of a substrate by processing the substrate, the mesas and dents being made of material of the substrate as one body; and

growing Group III nitride semiconductor in a c-axis direction of the Group III nitride semiconductor on the top surfaces of the mesas and the bottom surfaces of the dents, wherein the substrate comprises a hexagonal crystal structure comprising different material from the Group III nitride semiconductor,

the main surface of the substrate is a c-plane (0001) of hexagonal crystal, and

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions;

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of an a-plane (11-20) of the hexagonal crystal structure of the substrate to the main surface is 0.5°

or more, and 6°

or less.

5. A method for producing a Group III nitride semiconductor according to claim 2, wherein the substrate comprises a sapphire substrate.

8. A method for producing a Group III nitride semiconductor according to claim 2, wherein the mesas or the dents are formed in a periodic structure where a stripe extending in a first direction is repeated in a second direction perpendicular to the first direction on the main surface.

3. A method for producing a Group III nitride semiconductor comprising:

forming mesas and dents on a main surface of a substrate by processing the substrate, the mesas and dents being made of material of the substrate as one body; and

growing Group III nitride semiconductor in a c-axis direction of the Group III nitride semiconductor on the top surfaces of the mesas and the bottom surfaces of the dents, wherein

the substrate comprises a hexagonal crystal structure comprising different material from the Group III nitride semiconductor,

the main surface of the substrate is an a-plane (11-20) of hexagonal crystal, and

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions;

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of a c-plane (0001) of the hexagonal crystal structure of the substrate to the main surface is 0.5°

or more, and 6°

or less.

6. A method for producing a Group III nitride semiconductor according to claim 3, wherein the substrate comprises a sapphire substrate.

9. A method for producing a Group III nitride semiconductor according to claim 3, wherein the mesas or the dents are formed in a periodic structure where a stripe extending in a first direction is repeated in a second direction perpendicular to the first direction on the main surface.

4. A method for producing a Group III nitride semiconductor comprising:

forming mesas and dents on a main surface of a substrate by etching the substrate, the mesas and dents being made of material of the substrate as one body; and

growing Group III nitride semiconductor in a c-axis direction of the Group III nitride semiconductor on the top surfaces of the mesas and the bottom surfaces of the dents, wherein

at least a portion on which the mesas and the dents are formed on the main surface of the substrate comprises a Group III nitride semiconductor,

the main surface of the substrate is a c-plane (0001) of the Group III nitride semiconductor, and

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions;

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of a m-plane (1-100) of the Group III nitride semiconductor of the substrate to the main surface is 0.5°

or more, and 6°

or less, and

wherein the growing of the Group III nitride semiconductor comprises facet growing the Group III nitride semiconductor on the substrate on the top surface of the mesa and the bottom surface of the dent and burying a space among the facets.

15. A Group III nitride semiconductor having a substrate with mesas and dents formed on a main surface thereof by processing the substrate, and grown on the top surfaces of the mesas and the bottom surfaces of the dents in a c-axis direction of the Group III nitride semiconductor, the mesas and dents being made of material of the substrate as one body, wherein

the substrate consists of one member selected from a group consisting of sapphire, SiC, Si and ZnO,

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions:

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of the m-plane of the growing Group III nitride semiconductor to the main surface is 0.5°

or more and 6°

or less.

19. A Group III nitride semiconductor according to claim 15, wherein the substrate comprises a sapphire substrate.

20. A Group III nitride semiconductor according to claim 15, wherein the mesas or the dents are formed in a periodic structure where a stripe extending in a first direction is repeated in a second direction perpendicular to the first direction on the main surface.

21. A Group III nitride semiconductor according to claim 15, wherein the dent or the mesa has a shape selected from a group consisting of regular triangular prism, rhombic prism, regular hexagonal prism, regular triangular pyramid, rhombic pyramid, and regular hexagonal pyramid, and a plurality of dents or mesas are arranged in a honeycomb pattern at regular intervals.

22. A Group III nitride semiconductor according to claim 15, wherein the angle is 1°

or more and 5°

or less.

23. A Group III nitride semiconductor according to claim 15, wherein the angle is 1°

or more and 2.5°

or less.

24. A light-emitting device comprising:

the Group III nitride semiconductor according to claim 15.

16. A Group III nitride semiconductor having a substrate with mesas and dents formed on a main surface thereof by processing the substrate, the mesas and dents being made of material of the substrate as one body, and grown on the top surfaces of the mesas and the bottom surfaces of the dents in a c-axis direction of the Group III nitride semiconductor, wherein,

the substrate comprises a hexagonal crystal substrate comprising different material from the Group III nitride semiconductor,

the main surface of the substrate is a c-plane (0001) of hexagonal crystal, and

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions:

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of an a-plane (11-20) of the hexagonal crystal structure of the substrate to the main surface is 0.5°

or more, and 6°

or less.

25. A Group III nitride semiconductor according to claim 16, wherein the substrate comprises a sapphire substrate.

27. A Group III nitride semiconductor according to claim 16, wherein the mesas or the dents are formed in a periodic structure where a stripe extending in a first direction is repeated in a second direction perpendicular to the first direction on the main surface.

30. A Group III nitride semiconductor according to claim 16, wherein the dent or the mesa includes a shape selected from a group consisting of regular triangular prism, rhombic prism, regular hexagonal prism, regular triangular pyramid, rhombic pyramid, and regular hexagonal pyramid, and a plurality of dents or mesas are arranged in a honeycomb pattern at regular intervals.

33. A Group III nitride semiconductor according to claim 16, wherein the angle is 1°

or more and 5°

or less.

17. A Group III nitride semiconductor having a substrate with mesas and dents formed on a main surface thereof by processing the substrate, the mesas and dents being made of material of the substrate as one body, and grown on the top surfaces of the mesas and the bottom surfaces of the dents in a c-axis direction of the Group III nitride semiconductor, wherein,

the substrate comprises a hexagonal crystal substrate comprising different material from the Group III nitride semiconductor,

a main surface of the substrate is an a-plane (11-20) of hexagonal crystal, and

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions:

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of a c-plane (0001) of the hexagonal crystal structure of the substrate to the main surface is 0.5°

or more, and 6°

or less.

26. A Group III nitride semiconductor according to claim 17, wherein the substrate comprises a sapphire substrate.

28. A Group III nitride semiconductor according to claim 17, wherein the mesas or the dents are formed in a periodic structure where a stripe extending in a first direction is repeated in a second direction perpendicular to the first direction on the main surface.

31. A Group III nitride semiconductor according to claim 17, wherein the dent or the mesa includes a shape selected from a group consisting of regular triangular prism, rhombic prism, regular hexagonal prism, regular triangular pyramid, rhombic pyramid, and regular hexagonal pyramid, and a plurality of dents or mesas are arranged in a honeycomb pattern at regular intervals.

34. A Group III nitride semiconductor according to claim 17, wherein the angle is 1°

or more and 5°

or less.

18. A Group III nitride semiconductor having a substrate with mesas and dents formed on a main surface thereof by etching the substrate, the mesas and dents being made of material of the substrate as one body, and grown on the top surfaces of the mesas and the bottom surfaces of the dents in a c-axis direction of the Group III nitride semiconductor, wherein

at least a portion on which the mesas and the dents are formed on the main surface of the substrate comprises a Group III nitride semiconductor,

the main surface of the substrate is a c-plane (0001) of the Group III nitride semiconductor of the substrate, and

side surfaces of the mesas and the dents are formed so as to satisfy the following conditions:

a plane, which is most parallel to the side surfaces among low-index planes of the growing Group III nitride semiconductor, is a m-plane (1-100); and

when a projected vector obtained by orthogonally projecting a normal vector of the side surface to the main surface is defined as a lateral vector, an angle formed by the lateral vector and a projected vector obtained by orthogonally projecting a normal vector of a m-plane (1-100) of the Group III nitride semiconductor of the substrate to the main surface is 0.5°

or more, and wherein

the Group III nitride semiconductor on the substrate comprises facet parts facet grown on the top surface of the mesa and the bottom surface of the dent and buried parts in a space among the facets.

29. A Group III nitride semiconductor according to claim 18, wherein the mesas or the dents are formed in a periodic structure where a stripe extending in a first direction is repeated in a second direction perpendicular to the first direction on the main surface.

32. A Group III nitride semiconductor according to claim 18, wherein the dent or the mesa includes a shape selected from a group consisting of regular triangular prism, rhombic prism, regular hexagonal prism, regular triangular pyramid, rhombic pyramid, and regular hexagonal pyramid, and a plurality of dents or mesas are arranged in a honeycomb pattern at regular intervals.