Method of growing carbon nanotube using reactor

• US 9,840,771 B2
• Filed: 06/10/2015
• Issued: 12/12/2017
• Est. Priority Date: 12/29/2012
• Status: Active Grant

• Current Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Original Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Inventors: Wu, Yang, Liu, Peng, Wei, Yang, Wang, Jia-Ping, Jiang, Kai-Li, Fan, Shou-Shan
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US14/735,153
• Publication Number:
  US 20150274528A1
• Time in Patent Office: 916 Days
• CPC Class Codes: B01J 15/005 in the presence of catalytically active bodies, e.g. porous plates
• CPC Class Codes: B01J 19/1812 Tubular reactors
• CPC Class Codes: B01J 19/2495 Net-type reactors
• CPC Class Codes: B01J 2219/00132 using electric heating or cooling elements
• CPC Class Codes: B01J 2219/00135 Electric resistance heaters
• CPC Class Codes: C01B 32/16 Preparation
• CPC Class Codes: C23C 14/0605 Carbon
• CPC Class Codes: C23C 14/30 by electron bombardment
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: C23C 14/505 for rotation of the substrates
• CPC Class Codes: C23C 14/541 Heating or cooling of the substrates
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C23C 16/4587 the substrate being supported substantially vertically
• CPC Class Codes: C23C 16/4588 the substrate being rotated
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34

Abstract

A method of growing carbon nanotubes includes following steps. A reactor is constructed, wherein the reactor includes a reactor chamber and a rotating mechanism inside the reactor chamber. A carbon nanotube catalyst composite layer is applied, the carbon nanotube catalyst composite layer is configured to be rotated by the rotating mechanism in the reactor chamber, and the carbon nanotube catalyst composite layer includes a carbon nanotube layer and a number of catalyst particles dispersed in the carbon nanotube layer. The carbon nanotube catalyst composited layer is positioned inside the reactor chamber. A mixture of carbon source gas and carrier gas is introduced into the reactor chamber. The carbon nanotube catalyst composite layer is rotated. The carbon nanotube catalyst composite layer is heated to grow carbon nanotubes.

Claims

1. A method of growing carbon nanotubes comprising:

constructing a reactor comprising a reactor chamber and a rotating mechanism inside the reactor chamber;

making a carbon nanotube catalyst composite layer configured to be rotated by the rotating mechanism in the reactor chamber, and the carbon nanotube catalyst composite layer comprises a carbon nanotube layer and a plurality of catalyst particles dispersed in the carbon nanotube layer;

positioning the carbon nanotube catalyst composited layer inside the reactor chamber;

introducing a mixture of carbon source gas and carrier gas into the reactor chamber;

rotating the carbon nanotube catalyst composite layer; and

heating the carbon nanotube catalyst composite layer.

2. The method of claim 1, wherein the plurality of catalyst particles is deposited on the carbon nanotube layer by electron beam evaporation, thermal chemical vapor deposition, or sputtering method.

3. The method of claim 1, wherein the carbon nanotube catalyst composite layer is heated by applying an electric voltage to the carbon nanotube layer.

4. The method of claim 1, wherein the reactor further comprises a first electrode and a second electrode in parallel with the first electrode, wherein and the carbon catalyst composite layer are electrically connected to the first electrode and the second electrode, and a voltage is applied to the first electrode and the second electrode to heat the carbon nanotube catalyst composite layer.

5. The method of claim 4, wherein the voltage applied between the first electrode and the second electrode is about 40V, and the carbon nanotube catalyst composite layer is heated to about 500°

C. to about 900°

C. for about 30 minutes to about 60 minutes.

6. The method of claim 1, wherein a surface of the carbon nanotube catalyst composite layer is planar.

7. The method of claim 6, wherein an angle between an flow direction of the mixture and the surface of the carbon nanotube catalyst composite layer is greater than 0 degrees and smaller than or equal to 90 degrees.

8. The method of claim 7, wherein the flow direction of the mixture of carbon source gas and carrier gas is substantially perpendicular with the surface of the carbon nanotube catalyst composite layer.

9. The method of claim 7, wherein the mixture of carbon source gas and carrier gas flow penetrate a plurality of apertures and react with the plurality of catalyst particles during rotating the carbon nanotube catalyst composite layer.

10. The method of claim 1, wherein the carbon nanotube layer is a free-standing structure, and the plurality of catalyst particles is directly attached to a surface of the carbon nanotube layer.

11. The method of claim 10, wherein the carbon nanotube catalyst composite layer is fixed on the rotating shaft and rotatable with the rotating shaft.

12. The method of claim 1, wherein a plurality of apertures extends through a thickness of the carbon nanotube catalyst composite layer.

13. The method of claim 12, wherein a size of the plurality of apertures ranges from about 5 nanometers to about 10 nanometers.

14. The method of claim 13, wherein the plurality of catalyst particles is embedded into the plurality of apertures.

15. The method of claim 1, wherein the carbon nanotube layer comprises a carbon nanotube film, and the carbon nanotube film comprises a plurality of carbon nanotubes oriented substantially along an alignment direction, the alignment direction being substantially parallel to the carbon nanotube catalyst composite layer.

16. The method of claim 15, wherein the carbon nanotube layer comprises at least two carbon nanotube films stacked on each other, an angle between the alignment directions of adjacent of the at least two carbon nanotube films ranges from about 0 degrees to about 90 degrees.

17. The method of claim 1, wherein the reactor chamber comprises a rotating shaft, and the carbon nanotube catalyst composite layer is rotated around the rotating shaft.

18. The method of claim 1, further comprising a frame rotatably mounted in the reactor chamber, wherein the carbon nanotube catalyst composite layer is fixed and suspended on the frame.

19. A method of growing carbon nanotubes comprising:

constructing a reactor comprising a reactor chamber and a rotating mechanism inside the reactor chamber;

applying a plurality of carbon nanotube catalyst composite layers configured to be rotated by the rotating mechanism in the reactor chamber, and the plurality of carbon nanotube catalyst composite layers are spaced from each other and aligned along the reactor chamber, each of the plurality of carbon nanotube catalyst composite layers comprises a carbon nanotube layer and a plurality of catalyst particles dispersed in the carbon nanotube layer;

introducing a mixture of carbon source gas and carrier gas into the reactor chamber;

rotating the plurality of carbon nanotube catalyst composite layers; and

heating the plurality of carbon nanotube catalyst composite layers.

20. The method of claim 19, wherein the reactor further comprises a first electrode and a second electrode in parallel with the first electrode, wherein and the plurality of carbon catalyst composite layers are electrically connected to the first electrode and the second electrode, and a voltage is applied to the first electrode and the second electrode to heat the plurality of carbon nanotube catalyst composite layers.