Micro-electromechanical apparatus utilizing folded spring for rotary element

• US 9,841,281 B2
• Filed: 11/25/2014
• Issued: 12/12/2017
• Est. Priority Date: 03/14/2014
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Su, Chung-Yuan, Tsai, Chun-Yin, Huang, Chao-Ta
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US14/553,595
• Publication Number:
  US 20150260517A1
• Time in Patent Office: 1,113 Days
• Field of Search: 7351438
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0045 Improve properties related to angular swinging, e.g. control resonance frequency
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: Y10T 74/12 Gyroscopes

Abstract

A micro-electromechanical apparatus includes a rotary element, at least one restraint and at least two folded springs. The rotary element is capable of rotating with respect to an axis. The folded springs are symmetrically disposed about the axis. Each folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, and the fixed end is connected to the at least one restraint. The moving end is not located on the axis, and the fixed end is not located on the axis. A moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis. A spring length is defined as a distance between the moving end and the fixed end. The spring length is varied according to the rotation of the rotary element.

Claims

1. A micro-electromechanical apparatus, comprising:

a rotary element, being capable of rotating with respect to an axis;

at least one restraint; and

at least two folded springs disposed symmetrically about the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the rotary element and the fixed end is connected to the at least one restraint, the moving end is not located on the axis and the fixed end is not located on the axis, each of the at least two folded springs includes a plurality of spans which are connected in sequence;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the rotary element;

wherein the restraint is divided into a first part and a second part by a plane having a normal direction parallel to the axis, a central point of the fixed end is on the plane, and the first part and the second part are both stationary relative to the axis;

wherein the fixed distance is greater than half of each width of each of the plurality of spans;

wherein a distance from the fixed end to the rotary element along a direction parallel to the axis is smaller than a length of at least one of the plurality of spans.

2. The micro-electromechanical apparatus according to claim 1, wherein the fixed distance is less than or equal to the moving distance and the spring length is less than or equal to the moving distance.

3. The micro-electromechanical apparatus according to claim 1, wherein a direction of a extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans.

4. The micro-electromechanical apparatus according to claim 3, wherein lengths of at least two of the plurality of the spans are different from each other.

5. The micro-electromechanical apparatus according to claim 4, wherein lengths of all of the plurality of the spans are different from each other, and the lengths of the plurality of the spans are decreased along a direction farther away from the axis.

6. The micro-electromechanical apparatus according to claim 4, wherein lengths of all of the plurality of the spans are different from each other, and the lengths of the plurality of the spans are increased along a direction farther away from the axis.

7. The micro-electromechanical apparatus according to claim 3, wherein lengths of at least two of the plurality of the spans are identical.

8. The micro-electromechanical apparatus according to claim 1, wherein the at least one restraint is a frame.

9. The micro-electromechanical apparatus according to claim 1, wherein the at least one restraint is an anchor.

10. The micro-electromechanical apparatus according to claim 3, further comprising a frame, wherein the rotary element is located inside the frame, and the at least one suspension is connected to the frame.

11. The micro-electromechanical apparatus according to claim 10, wherein the at least one suspension further has a first end and a second end, the first end and the second end are connected to the frame, and the first end and the second end are disposed symmetrically about the axis.

12. The micro-electromechanical apparatus according to claim 1, wherein the fixed distance is less than or equal to the moving distance and the spring length is greater than the moving distance.

13. The micro-electromechanical apparatus according to claim 12, wherein each of the folded springs includes a plurality of spans that are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans.

14. The micro-electromechanical apparatus according to claim 13, wherein lengths of at least two of the plurality of the spans are different from each other.

15. The micro-electromechanical apparatus according to claim 1, wherein the fixed distance is greater than the moving distance and the spring length is less than or equal to the fixed distance.

16. The micro-electromechanical apparatus according to claim 15, wherein each of the at least two folded springs includes a plurality of spans that are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans.

17. The micro-electromechanical apparatus according to claim 16, wherein lengths of at least two of the plurality of the spans are different from each other.

18. The micro-electromechanical apparatus according to claim 1, wherein the fixed distance is greater than the moving distance, and the spring length is greater than the fixed distance.

19. The micro-electromechanical apparatus according to claim 18, wherein each of the folded springs includes a plurality of spans that are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans.

20. The micro-electromechanical apparatus according to claim 19, wherein lengths of at least two of the plurality of the spans are different from each other.

21. A micro-electromechanical apparatus, comprising:

a rotary element, being capable of rotating with respect to an axis;

at least one restraint; and

at least two folded springs disposed symmetrically about the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, the fixed end is connected to the at least one restraint, the moving end is not located on the axis and the fixed end is not located on the axis;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the rotary element;

wherein each of the at least two folded springs includes a plurality of spans which are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans;

wherein the restraint is divided into a first part and a second part by a plane having a normal direction parallel to the axis, a central point of the fixed end is on the plane, and the first part and the second part are both stationary relative to the axis;

wherein the fixed distance is greater than half of each width of each of the plurality of spans;

wherein a distance from the fixed end to the rotary element along a direction parallel to the axis is smaller than a length of at least one of the plurality of spans.

22. The micro-electromechanical apparatus according to claim 21, wherein lengths of at least two of the plurality of the spans are different from each other.

23. The micro-electromechanical apparatus according to claim 22, wherein lengths of all of the plurality of the spans are different from each other, and the lengths of the plurality of the spans are decreased along a direction farther away from the axis.

24. The micro-electromechanical apparatus according to claim 22, wherein lengths of all of the plurality of the spans are different from each other, and the lengths of the plurality of the spans are increased along a direction farther away from the axis.

25. A micro-electromechanical apparatus, comprising:

a rotary element, being capable of rotating with respect to an axis;

at least one restraint; and

at least two folded springs disposed symmetrically about the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, and the fixed end is connected to the at least one restraint;

wherein the moving end is not located on the axis and the fixed end is not located on the axis;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the rotary element;

wherein each of the folded springs includes a plurality of spans which are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, and lengths of at least two of the plurality of the spans are different from each other.

26. The micro-electromechanical apparatus according to claim 25, wherein the fixed distance is less than or equal to the moving distance, and the spring length is less than or equal to the moving distance.

27. The micro-electromechanical apparatus according to claim 25, wherein the fixed distance is less than or equal to the moving distance, and the spring length is greater than the moving distance.

28. The micro-electromechanical apparatus according to claim 25, wherein the fixed distance is greater than the moving distance, and the spring length is less than or equal to the fixed distance.

29. The micro-electromechanical apparatus according to claim 25, wherein the fixed distance is greater than the moving distance, and the spring length is greater than the fixed distance.

30. A micro-electromechanical apparatus, being adapted to detect angular velocity, comprising:

a mass, being capable of rotating with respect to an axis;

a frame, being capable of oscillation;

at least one restraint, connected to the frame; and

at least two folded springs disposed symmetrically with respect to the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the mass, and the fixed end is connected to the at least one restraint, the moving end is not located on the axis and the fixed end is not located on the axis, each of the at least two folded springs includes a plurality of spans which are connected in sequence;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the mass;

wherein the fixed distance is less than or equal to the moving distance, and wherein the spring length is less than or equal to the moving distance;

wherein the restraint is divided into a first part and a second part by a plane having a normal direction parallel to the axis, a central point of the fixed end is on the plane, and the first part and the second part are both stationary relative to the axis;

wherein the fixed distance is greater than half of each width of each of the plurality of spans;

wherein a distance from the fixed end to the mass along a direction parallel to the axis is smaller than a length of at least one of the plurality of spans.

31. The micro-electromechanical apparatus according to claim 30, wherein direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans.

32. The micro-electromechanical apparatus according to claim 31, wherein lengths of at least two of the plurality of the spans are different from each other.

33. The micro-electromechanical apparatus according to claim 32, wherein lengths of all of the plurality of the spans are different from each other, and the lengths of the plurality of the spans are decreased along a direction farther away from the axis.

34. The micro-electromechanical apparatus according to claim 31, wherein a mass is located inside the frame.

35. The micro-electromechanical apparatus according to claim 34, wherein the at least one suspension further has a first end and a second end, the first end and the second end are connected to the frame, and the first end and the second end are disposed symmetrically about the axis.

36. A micro-electromechanical apparatus, comprising:

a rotary element, being capable of rotating with respect to an axis;

at least one restraint; and

at least two folded springs disposed symmetrically about the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the rotary element and the fixed end is connected to the at least one restraint, the moving end is not located on the axis and the fixed end is not located on the axis;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the rotary element;

wherein the fixed distance is less than or equal to the moving distance and the spring length is less than or equal to the moving distance;

wherein each of the at least two folded springs includes a plurality of spans which are connected in sequence, a direction of a extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans;

wherein lengths of all of the plurality of the spans are different from each other, and the lengths of the plurality of the spans are decreased along a direction farther away from the axis.

37. A micro-electromechanical apparatus, comprising:

a rotary element, being capable of rotating with respect to an axis;

at least one restraint; and

at least two folded springs disposed symmetrically about the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the rotary element and the fixed end is connected to the at least one restraint, the moving end is not located on the axis and the fixed end is not located on the axis;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the rotary element;

wherein the fixed distance is less than or equal to the moving distance and the spring length is greater than the moving distance;

wherein each of the folded springs includes a plurality of spans that are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans;

wherein lengths of at least two of the plurality of the spans are different from each other.

38. A micro-electromechanical apparatus, comprising:

a rotary element, being capable of rotating with respect to an axis;

at least one restraint; and

at least two folded springs disposed symmetrically about the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the rotary element and the fixed end is connected to the at least one restraint, the moving end is not located on the axis and the fixed end is not located on the axis;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the rotary element;

wherein the fixed distance is greater than the moving distance and the spring length is less than or equal to the fixed distance;

wherein each of the at least two folded springs includes a plurality of spans that are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans;

wherein lengths of at least two of the plurality of the spans are different from each other.

39. A micro-electromechanical apparatus, comprising:

a rotary element, being capable of rotating with respect to an axis;

at least one restraint; and

at least two folded springs disposed symmetrically about the axis, wherein each of the at least two folded spring has a moving end and a fixed end, the moving end is connected to the rotary element and the fixed end is connected to the at least one restraint, the moving end is not located on the axis and the fixed end is not located on the axis;

wherein a moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis, a spring length is defined as a distance between the moving end and a reference point of the fixed end, and the spring length is varied according to rotation of the rotary element;

wherein the fixed distance is greater than the moving distance, and the spring length is greater than the fixed distance;

wherein each of the folded springs includes a plurality of spans that are connected in sequence, direction of extension of the plurality of the spans is parallel to direction of the axis, the at least one restraint is at least one suspension, and a width of the at least one suspension is greater than a width of at least one of the plurality of the spans;

wherein lengths of at least two of the plurality of the spans are different from each other.