AM/FM measurements using multiple frequency of atomic force microscopy

• US 9,841,436 B2
• Filed: 09/26/2016
• Issued: 12/12/2017
• Est. Priority Date: 04/23/2014
• Status: Active Grant

• Current Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Original Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Inventors: Proksch, Roger, Bemis, Jason, Labuda, Aleksander
• Primary Examiner(s): STOFFA, WYATT A
• Application Number:
  US15/275,770
• Publication Number:
  US 20170131322A1
• Time in Patent Office: 442 Days
• CPC Class Codes: G01Q 10/04 Fine scanning or positioning
• CPC Class Codes: G01Q 20/00 Monitoring the movement or position of the probe
• CPC Class Codes: G01Q 40/00 Calibration, e.g. of probes
• CPC Class Codes: G01Q 60/24 AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
• CPC Class Codes: G01Q 60/32 AC mode

Abstract

Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

Claims

1. An atomic force microscope, comprising:

a cantilever having a tip at one end and a driving part at its other end;

a cantilever position detector;

a positioning system for controlling a position of the cantilever relative to a sample, the positioning system operating by;

first operating by turning off a drive mechanism and positioning the cantilever at a specified point relative to the sample, and determining a stiffness of the cantilever from a measured thermal spectrum taken far from a surface of the sample and recording information indicative of the stiffness as representing a natural frequency of the cantilever;

second approaching the tip of the cantilever to closer proximity with the sample and turning the drive mechanism on and setting a drive frequency of the cantilever to the natural frequency of the cantilever as measured during said first operating, and approaching the tip of the cantilever to the surface of the sample until contact is established by setting the feedback set point to a desired interaction amplitude that is less than a free oscillation amplitude;

third operating by fully separating the sample from the tip of the cantilever and tuning the cantilever using the drive frequency using a first relationship acquired; and

after said tuning, turning off the drive mechanism and acquiring an additional thermal spectrum of the cantilever that is obtained during conditions that are closer to imaging conditions; and

repeating said first operating, and second operating using the additional thermal spectrum.

2. The microscope as in claim 1, wherein said repeating comprises said positioning system using a simple harmonic oscillator model and data from the additional thermal spectrum to define a new natural frequency of the cantilever and determine a phase-to-drive-frequency relationship of the cantilever;

turning on the drive mechanism and choosing a drive frequency based on measured cantilever parameters;

choosing a drive amplitude which achieves a desired cantilever free oscillation amplitude; and

setting a driver phase from a result of said simple harmonic oscillator model.

3. The microscope as in claim 2, wherein said measured cantilever parameters are equal either to the new natural frequency of the cantilever or to a local amplitude maximum of the cantilever near a cantilever resonant frequency.

4. The microscope as in claim 1, wherein said Cantilever position detector includes a photodetector.

5. The microscope as in claim 1, wherein said positioning system include a coarse and fine positioning system and a controller, where said approaching and an inspection is determined by optical inspection of the tip and the sample using the coarse-positioning system.

6. The microscope as in claim 1, wherein the position detector includes a laser and a photodetector.

7. The microscope as in claim 1, wherein said tuning the cantilever comprises by either setting the drive frequency to the natural frequency of the cantilever as determined from the thermal spectrum or setting the drive frequency to a local amplitude maximum of the cantilever near a cantilever resonant frequency.