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Resonator device for electron spin resonance

  • US 9,841,484 B2
  • Filed: 06/28/2013
  • Issued: 12/12/2017
  • Est. Priority Date: 02/01/2013
  • Status: Active Grant
First Claim
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1. An electron spin resonance (ESR) resonator device comprising:

  • a planar substrate having a substrate surface, and having a ground plane surface opposite the substrate surface;

    a ground plane disposed on the ground plane surface;

    a first terminal that includes first terminal segments disposed on the substrate surface, the first terminal including a first terminal conductor disposed on the substrate surface, the first terminal conductor having a first terminal input side and a first terminal segmented side opposite the first terminal input side, the first terminal segmented side including the first terminal segments, the first terminal including a first branching structure between the first terminal input side and the first terminal segmented side;

    a second terminal that includes second terminal segments disposed on the substrate surface opposite the first terminal segments, the second terminal including a second terminal conductor disposed on the substrate surface, the second terminal conductor having a second terminal input side and a second terminal segmented side opposite the second terminal input side, the second terminal segmented side including the second terminal segments, the second terminal including a second branching structure between the second terminal input side and the second terminal segmented side; and

    resonators between the first and second terminals, the resonators including conductors disposed on the substrate surface, each conductor disposed between one of the first terminal segments and a respective, opposite one of the second terminal segments.

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