Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same
First Claim
1. A MEMS device, comprising:
- a fixed structure;
a mobile structure including a reflecting element;
a first deformable structure arranged between the fixed structure and the mobile structure; and
a second deformable structure arranged between the fixed structure and the mobile structure;
wherein each of the first and second deformable structures comprises a respective number of main piezoelectric elements; and
wherein the main piezoelectric elements of the first deformable structure are configured to be electrically controlled for causing a first substantially periodic deformation of the first deformable structure and a consequent oscillation of the mobile structure about a first axis; and
wherein the main piezoelectric elements of the second deformable structure are configured to be electrically controlled for causing a second substantially periodic deformation of the second deformable structure and a consequent oscillation of the mobile structure about a second axis; and
wherein the first deformable structure comprises a respective number of secondary piezoelectric elements configured to be electrically controlled for causing a second deformation of the first deformable structure and vary a first resonance frequency of the mobile structure about said first axis.
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Accused Products
Abstract
A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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Citations
27 Claims
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1. A MEMS device, comprising:
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a fixed structure; a mobile structure including a reflecting element; a first deformable structure arranged between the fixed structure and the mobile structure; and a second deformable structure arranged between the fixed structure and the mobile structure; wherein each of the first and second deformable structures comprises a respective number of main piezoelectric elements; and wherein the main piezoelectric elements of the first deformable structure are configured to be electrically controlled for causing a first substantially periodic deformation of the first deformable structure and a consequent oscillation of the mobile structure about a first axis; and wherein the main piezoelectric elements of the second deformable structure are configured to be electrically controlled for causing a second substantially periodic deformation of the second deformable structure and a consequent oscillation of the mobile structure about a second axis; and wherein the first deformable structure comprises a respective number of secondary piezoelectric elements configured to be electrically controlled for causing a second deformation of the first deformable structure and vary a first resonance frequency of the mobile structure about said first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A MEMS projector system, comprising:
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a MEMS device comprising; a fixed structure; a mobile structure including a reflecting element; a first deformable structure arranged between the fixed structure and the mobile structure; and a second deformable structure arranged between the fixed structure and the mobile structure; wherein each of the first and second deformable structures comprises a respective number of main piezoelectric elements; and wherein the main piezoelectric elements of the first deformable structure are configured to be electrically controlled for causing a first substantially periodic deformation of the first deformable structure and a consequent oscillation of the mobile structure about a first axis; and wherein the main piezoelectric elements of the second deformable structure are configured to be electrically controlled for causing a second substantially periodic deformation of the second deformable structure and a consequent oscillation of the mobile structure about a second axis; and wherein the first deformable structure comprises a respective number of secondary piezoelectric elements configured to be electrically controlled for causing a second deformation of the first deformable structure and vary a first resonance frequency of the mobile structure about said first axis; a first a.c. generator configured to apply a first a.c. voltage to the main piezoelectric elements of the first deformable structure; a second a.c. generator configured to apply a second a.c. voltage to the main piezoelectric elements of the second deformable structure, the second a.c. voltage having a frequency different from a frequency of the first a.c. voltage; and at least one first d.c. generator configured to apply a first d.c. voltage to the secondary piezoelectric elements of the first deformable structure. - View Dependent Claims (17, 18, 19, 20, 21)
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22. A MEMS device, comprising:
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a fixed structure; a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure; a respective number of main piezoelectric elements mounted to each of the first and second deformable structures, said main piezoelectric elements configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively; and a respective number of secondary piezoelectric elements mounted to the first deformable structure, said secondary piezoelectric elements mounted to the first deformable structure configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis. - View Dependent Claims (23, 24, 25, 26, 27)
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Specification