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Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same

  • US 9,843,779 B2
  • Filed: 05/23/2016
  • Issued: 12/12/2017
  • Est. Priority Date: 11/30/2015
  • Status: Active Grant
First Claim
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1. A MEMS device, comprising:

  • a fixed structure;

    a mobile structure including a reflecting element;

    a first deformable structure arranged between the fixed structure and the mobile structure; and

    a second deformable structure arranged between the fixed structure and the mobile structure;

    wherein each of the first and second deformable structures comprises a respective number of main piezoelectric elements; and

    wherein the main piezoelectric elements of the first deformable structure are configured to be electrically controlled for causing a first substantially periodic deformation of the first deformable structure and a consequent oscillation of the mobile structure about a first axis; and

    wherein the main piezoelectric elements of the second deformable structure are configured to be electrically controlled for causing a second substantially periodic deformation of the second deformable structure and a consequent oscillation of the mobile structure about a second axis; and

    wherein the first deformable structure comprises a respective number of secondary piezoelectric elements configured to be electrically controlled for causing a second deformation of the first deformable structure and vary a first resonance frequency of the mobile structure about said first axis.

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