Surface-enhanced Raman scattering element

• US 9,846,123 B2
• Filed: 08/09/2013
• Issued: 12/19/2017
• Est. Priority Date: 08/10/2012
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Ito, Masashi, Shibayama, Katsumi, Maruyama, Yoshihiro
• Primary Examiner(s): Won, Bumsuk
• Assistant Examiner(s): MADONNA, JEFFREY E
• Application Number:
  US14/420,469
• Publication Number:
  US 20150212002A1
• Time in Patent Office: 1,593 Days
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: Y10S 977/781 Possessing nonosized surface openings that extend partially into or completely through the host material

Abstract

A surface-enhanced Raman scattering element comprises a substrate having a principal surface; a molded layer including a support part formed on the principal surface and a fine structure part formed on the support part; and a conductor layer, deposited on the fine structure part, constituting an optical functional part for generating surface-enhanced Raman scattering. The fine structure part has a plurality of pillars erected on the support part. The support part is provided with a plurality of opposing parts opposing side faces of the pillars. The opposing parts are located on the substrate side relative to leading end parts of the pillars in a projecting direction of the pillars.

Claims

1. A surface-enhanced Raman scattering element comprising:

a substrate having a principal surface;

a molded layer including a support part formed on the principal surface and a fine structure part formed on the support part; and

a conductor layer deposited on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering;

wherein the fine structure part has a plurality of pillars erected on the support part;

wherein the support part is provided with a plurality of opposing parts opposing side faces of the pillars;

wherein the opposing parts are located on a substrate side relative to leading end parts of the pillars in a projecting direction of the pillars, at least some of the opposing parts being located on or near the substrate surface; and

wherein the support part, the pillars, and the opposing parts are integrally formed from same materials.

2. A surface-enhanced Raman scattering element according to claim 1, wherein the pillars are arranged periodically along the principal surface.

3. A surface-enhanced Raman scattering element according to claim 1, wherein the support part is formed with a plurality of depressions;

and wherein the opposing parts are inner surfaces of the depressions.

4. A surface-enhanced Raman scattering element according to claim 1, wherein the opposing part extends along a part of a side face of the pillar when seen in the pillar projecting direction.

5. A surface-enhanced Raman scattering element according to claim 1, wherein the opposing part extends so as to surround the side face of the pillar when seen in the pillar projecting direction.

6. A surface-enhanced Raman scattering element according to claim 1, wherein one of the pillars is provided with a plurality of the opposing parts.

7. A surface-enhanced Raman scattering element according to claim 6, wherein the plurality of opposing parts provided for the one pillar have respective forms different from each other.

8. A surface-enhanced Raman scattering element comprising:

a support part;

a fine structure part formed on the support part; and

a conductor layer deposited on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering;

wherein the fine structure part has a plurality of pillars erected on the support part;

wherein the support part is formed with a plurality of depressions;

wherein the depressions are located on a support part side relative to leading end parts of the pillars in a projecting direction of the pillars;

wherein the depressions are formed so as to surround a side face of the pillar when seen in the pillar projecting direction; and

wherein the support part, the pillars, and the depressions are integrally formed from same materials.

9. A surface-enhanced Raman scattering element according to claim 8, wherein the pillars are arranged periodically when seen in the pillar projecting direction.

10. A surface-enhanced Raman scattering element according to claim 9, wherein the pillars are arranged periodically at a pitch of 250 nm to 800 nm.

11. A surface-enhanced Raman scattering element according to claim 8, wherein the cross-sectional form of the pillar is a circle.

12. A surface-enhanced Raman scattering element according to claim 8, wherein the side face of the pillar is formed with nanoparticles.

13. A surface-enhanced Raman scattering element comprising:

a support part;

a fine structure part formed on the support part; and

a conductor layer deposited on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering;

wherein the fine structure part has a plurality of pillars erected on the support part;

wherein the support part is formed with a plurality of projections;

wherein the projections are located on a support part side relative to leading end parts of the pillars in a projecting direction of the pillars;

wherein the projections are formed so as to surround a side face of the pillar when seen in the pillar projecting direction; and

wherein the support part, the pillars, and the projections are integrally formed from same materials.

14. A surface-enhanced Raman scattering element according to claim 13, wherein the pillars are arranged periodically when seen in the pillar projecting direction.

15. A surface-enhanced Raman scattering element according to claim 14, wherein the pillars are arranged periodically at a pitch of 250 nm to 800 nm.

16. A surface-enhanced Raman scattering element according to claim 13, wherein the cross-sectional form of the pillar is a circle.

17. A surface-enhanced Raman scattering element according to claim 13, wherein the side face of the pillar is formed with nanoparticles.