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Biosensors based on optical probing and sensing

  • US 9,846,126 B2
  • Filed: 10/27/2009
  • Issued: 12/19/2017
  • Est. Priority Date: 10/27/2008
  • Status: Active Grant
First Claim
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1. A sensing device based on optical probing and sensing, comprising:

  • a tunable laser that produces a laser beam of probe light and operates to tune a wavelength of the probe light over different wavelengths;

    a chip platform that holds at least one sensor chip under measurement, the sensor chip comprising a substrate, one or more optical sensors formed on the substrate, an input optical coupler formed on the substrate to receive incoming probe light and to direct the probe light to a respective optical sensor, and an output optical coupler formed on the substrate to couple light from the respective optical sensor out of the substrate as returned probe light, the output coupler being configured to output the returned probe light in a direction that is different than the direction of the specular reflection of the incoming probe light from the sensor chip and that is along a reciprocal path of the incoming probe light;

    an optical system that projects and scans the probe light over the chip platform to optically interrogate optical sensors on the sensor chip, the optical system comprising one or more scanning mirrors connected to one or more corresponding actuators that move the one or more scanning mirrors, the one or more actuators being in communication with a controller configured to provide one or more control signals which cause the one or more actuators to move the one or more scanning mirrors so as to direct the incoming probe light toward, or to receive the returned probe light from, the one or more optical sensors, the optical system further comprising an objective lens oriented relative to the chip platform to deliver the incoming probe light to the input coupler at an angle to render specular reflection of the probe light from the sensor chip outside an optical aperture of the objective lens and to receive the returned probe light from the sensor chip at the direction that is different from the specular reflection of the probe light from the sensor chip; and

    an optical detector in communication with the optical system to receive a portion of the returned probe light and to detect responses of the one or more optical sensors on the sensor chip over different wavelengths of the tunable laser.

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