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MEMS rotation sensor with integrated electronics

  • US 9,846,175 B2
  • Filed: 01/27/2015
  • Issued: 12/19/2017
  • Est. Priority Date: 12/10/2007
  • Status: Active Grant
First Claim
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1. A rotational sensor comprising:

  • a sense substrate;

    at least two proof masses, each of the at least two proof masses being anchored to the sense substrate via at least one flexure and electrically isolated from each other, wherein the at least two proof masses are configured to rotate in-plane about a Z-axis relative to the sense substrate, and wherein the Z-axis is normal to the sense substrate; and

    a first set of two transducers, wherein each of the first set of two transducers is configured to sense rotation of the each of at least two proof masses with respect to the sense substrate in response to a rotation of the rotational sensor.

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