Method and apparatus for real-time monitoring of plasma etch uniformity

• US 9,847,262 B2
• Filed: 12/03/2015
• Issued: 12/19/2017
• Est. Priority Date: 12/22/2014
• Status: Active Grant

• Current Assignee: IMEC International, Katholieke Universiteit Leuven
• Original Assignee: IMEC International, Katholieke Universiteit Leuven KU Leuven R&D
• Inventors: Samara, Vladimir, de Marneffe, Jean-Francois
• Primary Examiner(s): Vinh, Lan
• Application Number:
  US14/958,771
• Publication Number:
  US 20160181165A1
• Time in Patent Office: 747 Days
• Field of Search: 438706, 438712, 438714, 438719, 438720, 15634524, 15634525, 15634547, 1563455, 15634551
• CPC Class Codes: G01B 11/30 for measuring roughness or irregularity of surfaces
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01J 37/32972 Spectral analysis
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14

Abstract

A method is provided for in-situ monitoring of etch uniformity during plasma etching, on the basis of the detection of interferometry patterns. The method is applicable to a reactor wherein a plasma is created in the area between the surface to be etched and a counter-surface arranged essentially parallel to the surface to be etched. The occurrence of interference patterns is detected at a location that is placed laterally with respect to the area between the surface to be etched and the counter-surface. The presence of an interference pattern at a particular wavelength is observed through the detection of oscillations of the light intensity measured by an optical detector, preferably by the standard Optical Emission Spectrometry tool of the reactor. When these oscillations are no longer detectable, non-uniformity exceeds a pre-defined limit. The counter surface is arranged such that the oscillations are detected.

Claims

1. A method for monitoring an etch uniformity of a plasma etching process for removing a layer of material from a substrate, wherein the plasma etching process is a capacitively coupled plasma etching process, comprising:

providing a substrate covered by a layer to be etched, wherein the substrate is placed on a powered electrode;

generating a plasma in an area between the layer to be etched and a counter-surface comprising a grounded electrode mounted opposite the layer and substantially parallel to the layer, whereby material is progressively removed from the layer in a plasma etching process, the plasma emitting light, wherein no other light source is provided besides the plasma, wherein light striking a surface of the grounded electrode is partially reflected towards the layer, wherein light striking the layer is partially reflected from a top surface of the layer and partially refracted through the layer towards the substrate, and wherein the refracted light reflects from a substrate surface and is refracted once again at the top surface of the layer, where the refracted light combines with the reflected light to form an interference pattern due to a difference in optical paths of the reflected light and the refracted light, wherein the interference patterns are primarily due to light beams which have undergone multiple reflections off the grounded electrode, wherein a size and a material of the counter-surface, a size and a material of the substrate and the layer, and a distance between the layer and the counter surface are each configured so that the light interference patterns are primarily due to reflections of light beams taking place in the area between the layer and the counter-surface, and wherein the light beams are directed according to a Brewster angle of the material of the counter-surface;

measuring, by an optical emission spectroscopy detector at a lateral location with respect to the area, one or more spectral components of light emitted from the area wherein the emission spectroscopy detector comprises a lens coupled to an optical fiber that is coupled to a spectrometer, wherein the lens is arranged to receive light from a totality of the top surface of the layer from a plurality of directions, wherein the light emitted from the area passes through a polarization filter before entering the optical detector, wherein the filter is configured to admit only light with a given polarization into the optical detector, wherein the polarization filter is configured so that only s-polarized light passes the polarization filter;

arranging the counter-surface relative to the layer so that the optical detector detects oscillations of at least one of the one or more spectral components as a function of time, the oscillations being caused by detected light interference patterns which change due to the progressive removal of the material from the layer; and

deriving, from the oscillations, an indication about an etch uniformity of the plasma etching process.

2. The method of claim 1, wherein deriving, from the oscillations, an indication of the etch uniformity comprises:

determining a moment when oscillations of a particular spectral component are no longer detected by the optical detector or become smaller than 1% of an amplitude at the start of the plasma etching process; and

concluding at the moment that the etch uniformity is unacceptable and interrupting the plasma etching process.

3. The method of claim 2, wherein deriving, from the oscillations, an indication about an etch uniformity of the plasma etching process further comprises determining an estimation of a degree of non-uniformity at the moment.

4. The method of claim 1, wherein arranging the counter-surface relative to the layer comprises placing the counter surface at a pre-defined distance from the layer at which oscillations are detected by the optical detector.

5. The method of claim 1, further comprising determining an estimation of an etch rate based on a time span between two consecutive oscillations.

6. The method of claim 1, wherein the optical detector is configured for detecting chemical species of etch products.

7. The method of claim 1, wherein the distance between the layer to be removed and the counter-surface is between 2 cm and 4 cm.

8. The method of claim 1, wherein the material of the counter-surface is the same as the material of the substrate.

9. The method of claim 1, wherein the plasma etching process takes place in a plasma reactor configured for capacitively coupled plasma etching, the reactor comprising a powered electrode and a grounded electrode, wherein the substrate is mounted on the powered electrode and wherein the counter-surface is a surface of the grounded electrode.

10. The method of claim 1, wherein the plasma etching process takes place in a plasma reactor configured for inductively coupled plasma etching, and wherein the counter-surface is formed by a surface of the coupling window of the plasma reactor.

11. The method of claim 1, wherein deriving, from the oscillations, an indication of the etch uniformity comprises:

determining a moment when oscillations of a particular spectral component are detected by the optical detector or are larger than 1% of an amplitude at the start of the plasma etching process; and

concluding at the moment that the etch uniformity is acceptable and continuing the plasma etching process.

12. The method of claim 1, wherein an estimation of a level of non-uniformity for the layer is obtained by monitoring spectral components having wavelengths including a smallest wavelength and a highest wavelength, wherein a loss of interference at the smallest wavelength indicates an acceptable degree of non-uniformity, and wherein a loss of interference at the highest wavelength indicates and unacceptable degree of non-uniformity.

13. The method of claim 1, wherein an estimation of etch rate is obtained by applying a fast Fourier transform to an interferogram to obtain a curve with a main peak corresponding to a main etch, wherein the main peak is proportional to the etch rate corresponding to a thickness D of the layer removed in a time span T.

14. The method of claim 1, wherein an inter-electrode distance between the powered electrode and the grounded electrode is between 2 and 4 cm, and wherein a material of the substrate and the material of the grounded electrode is the same.

15. An apparatus for plasma etching, comprising:

a holder configured for holding a substrate, the substrate comprising a layer to be etched;

a counter-surface arranged opposite and facing the layer, when the substrate is mounted on the holder;

a device configured for creating a plasma in an area between the layer and the counter-surface; and

an optical detector configured for measuring, at a lateral location with respect to the area, one or more spectral components of light emitted from the area;

wherein the apparatus is further provided with a device configured for monitoring an etch uniformity of a plasma etching process by applying the method of claim 1.

16. The apparatus of claim 15, wherein the apparatus is a plasma reactor configured for capacitively coupled plasma etching, the plasma reactor comprising a powered electrode and a grounded electrode, wherein the holder is mounted on the powered electrode, and wherein a surface of the grounded electrode forms the counter surface.

17. The apparatus of claim 15, wherein the apparatus is a plasma reactor configured for inductively coupled plasma etching, the plasma reactor comprising a coupling window facing the holder, wherein the counter-surface is formed by a surface of the coupling window.

18. The apparatus of claim 15, wherein the monitoring device comprises a signal processor and an analyzer configured for manipulating and analyzing signals detected by the optical detector, and an output device configured for producing an output signal, the output signal being translatable into an intervention in the plasma etching process.

19. The apparatus of claim 18, further comprising a polarization filter configured to admit only light with a given polarization into the optical detector.

20. The apparatus of claim 19, wherein the polarization filter is configured so that only s-polarized light passes the filter.