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Structure and system for simultaneous sensing a magnetic field and mechanical stress

  • US 9,851,417 B2
  • Filed: 07/28/2015
  • Issued: 12/26/2017
  • Est. Priority Date: 07/28/2015
  • Status: Active Grant
First Claim
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1. A magnetic field sensor comprising:

  • a substrate having a bottom surface and a top surface;

    an epitaxial layer disposed over the top surface of the substrate, the epitaxial layer having a top surface and a bottom surface, the bottom surface of the epitaxial layer proximate to and parallel to the top surface of the substrate; and

    a dual Hall element, comprising;

    a first planar Hall element disposed within or over the epitaxial layer, the first planar Hall element having a first plurality of pickups with a first center between the first plurality of pickups; and

    a second planar Hall element disposed within or over the epitaxial layer, the second planar Hall element having a second different plurality of pickups with a second center between the second plurality of pickups, wherein a line intersecting the first and second centers is perpendicular to the top surface of the epi layer,wherein the first planar Hall element has a first sensitivity to a magnetic field and a first sensitivity to mechanical stress in the substrate, the first planar Hall element for generating a first output signal responsive to the magnetic field, the first magnetic field sensitivity, mechanical stress in the substrate, and the first mechanical stress sensitivity,and wherein the second planar Hall element has a second sensitivity to the magnetic field and a second sensitivity to mechanical stress in the substrate, the second planar Hall element for generating a second output signal responsive to the magnetic field, the second magnetic field sensitivity, the mechanical stress in the substrate, and the second mechanical stress sensitivity.

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