Methods and systems for point of use removal of sacrificial material

• US 9,852,919 B2
• Filed: 04/01/2015
• Issued: 12/26/2017
• Est. Priority Date: 01/04/2013
• Status: Active Grant

• Current Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Original Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Inventors: Inman, Christina E., Mastroianni, Alexander, Hinz, Wolfgang, Li, Shifeng, Benson, Scott C.
• Primary Examiner(s): CHAUDHARI, CHANDRA P
• Application Number:
  US14/676,697
• Publication Number:
  US 20150206762A1
• Time in Patent Office: 1,000 Days
• Field of Search: 438 49
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
• CPC Class Codes: H01L 21/31105 Etching inorganic layers
• CPC Class Codes: H01L 21/31144 using masks

Abstract

A method of manufacturing a sensor, the method including forming an array of chemically-sensitive field effect transistors (chemFETs), depositing a dielectric layer over the chemFETs in the array, depositing a protective layer over the dielectric layer, etching the dielectric layer and the protective layer to form cavities corresponding to sensing surfaces of the chemFETs, and removing the protective layer. The method further includes, etching the dielectric layer and the protective layer together to form cavities corresponding to sensing surfaces of the chemFETs. The protective layer is at least one of a polymer, photoresist material, noble metal, copper oxide, and zinc oxide. The protective protective layer is removed using at least one of sodium hydroxide, organic solvent, aqua regia, ammonium carbonate, hydrochloric acid, acetic acid, and phosphoric acid.

Claims

1. A method of manufacturing a sensor, the method comprising:

forming an array of chemically-sensitive field effect transistors (chemFETs);

depositing a dielectric layer over the chemFETs in the array;

depositing a protective layer over the dielectric layer;

etching the dielectric layer and the protective layer together to form cavities corresponding to sensing surfaces of the chemFETs; and

removing the protective layer to form a plurality of sensors having one or more exposed cavities that provide sensing surfaces of the chemFETs while protecting one or more unexposed surfaces.

2. The method of claim 1, further comprising patterning a photosensitive etch mask on the protective layer and wherein the etching of the dielectric layer and the protective layer is a photolithographic process.

3. The method of claim 1, wherein the protective layer is at least one of a polymer, photoresist material, noble metal, copper oxide, and zinc oxide.

4. The method of claim 1, wherein the protective layer is removed using at least one of an acid, a base, and an oxidizing solution.

5. The method of claim 1, wherein the protective layer is removed using at least one of sodium hydroxide, organic solvent, aqua regia, ammonium carbonate, hydrochloric acid, acetic acid, and phosphoric acid.

6. The method of claim 2, wherein the removing the protective layer includes removal of photoresist residue contamination resulting from the etching step.

7. The method of claim 1, wherein the dielectric layer includes at least one of silicon oxide, silicon nitride and silicon oxynitride.