Velocity compensated frequency sweeping interferometer and method of using same
First Claim
1. A velocity-compensated frequency sweeping interferometer comprising:
- a) a single measurement light producing device that produces a coherent light source consisting of a single outgoing light beam;
wherein said single measurement light producing device produces a scanning wavelength light beam;
b) a first distance measurement interferometer comprising;
one or more optics;
whereby said single outgoing light beam is split by a first splitter to produce a first reference beam and a first measurement beam;
whereby said first reference beam is configured to travel a path of fixed distance to and from a first reference reflector;
whereby said first measurement beam is configured to travel to a moveable reflective target of unknown distance and reflect back from said moveable reflective target as a return beam;
whereby said first reference beam and said return beam are combined by an interference optics to produce an interference beam;
c) one or more optoelectronic components that convert said interference beam into one or more first electrical signals;
d) a digitizing electronics feature that produces one or more first digital values of said first electrical signals;
e) a processor coupled to said digitizing electronics feature and said single measurement light producing device;
whereby said processor receives said one or more of first digital values and calculates a distance to said moveable reflective target;
whereby said processor sends frequency control instructions to said single measurement light producing device to change the frequency of said scanning wavelength light beam;
whereby said velocity-compensated frequency sweeping interferometer operates in an absolute distance mode to provide an absolute distance measurement to said moveable reflective target using a frequency scanning interferometer,f) a return frequency measurement device that is a separate device from the first distance measurement interferometer, and comprising;
one or more optics configured in the path of the return beam to produce a return frequency measurement beam;
one or more optics configured in the path of said return frequency measurement beam configured to measure a return beam frequency;
whereby a change in the optical frequency between the single outgoing light beam and the return beam is measured and used to calculate the velocity of the moveable reflective target; and
whereby said processor compensates for the calculated velocity to the moveable target in the calculated distance to said moveable reflective target.
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Accused Products
Abstract
A velocity-compensated frequency sweeping interferometer has a single measurement light producing device that produces a coherent light source consisting of a single light beam. The light producing device produces a scanning wavelength light beam. A primary beam splitter produces a first reference beam and a first measurement beam from said single light beam. The first reference beam travels a fixed path length to a primary reference reflector and the first measurement beam travels to and from a moveable reflective target over an unknown path length. A distance measurement interferometer is created by interfering the first reference beam with the first measurement beam. A return frequency measurement interferometer provides a measure of frequency of the return beam from the target which, when compared with the frequency of the outgoing beam, allows for velocity compensation of the target.
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Citations
22 Claims
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1. A velocity-compensated frequency sweeping interferometer comprising:
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a) a single measurement light producing device that produces a coherent light source consisting of a single outgoing light beam; wherein said single measurement light producing device produces a scanning wavelength light beam; b) a first distance measurement interferometer comprising; one or more optics; whereby said single outgoing light beam is split by a first splitter to produce a first reference beam and a first measurement beam; whereby said first reference beam is configured to travel a path of fixed distance to and from a first reference reflector; whereby said first measurement beam is configured to travel to a moveable reflective target of unknown distance and reflect back from said moveable reflective target as a return beam; whereby said first reference beam and said return beam are combined by an interference optics to produce an interference beam; c) one or more optoelectronic components that convert said interference beam into one or more first electrical signals; d) a digitizing electronics feature that produces one or more first digital values of said first electrical signals; e) a processor coupled to said digitizing electronics feature and said single measurement light producing device; whereby said processor receives said one or more of first digital values and calculates a distance to said moveable reflective target; whereby said processor sends frequency control instructions to said single measurement light producing device to change the frequency of said scanning wavelength light beam; whereby said velocity-compensated frequency sweeping interferometer operates in an absolute distance mode to provide an absolute distance measurement to said moveable reflective target using a frequency scanning interferometer, f) a return frequency measurement device that is a separate device from the first distance measurement interferometer, and comprising; one or more optics configured in the path of the return beam to produce a return frequency measurement beam; one or more optics configured in the path of said return frequency measurement beam configured to measure a return beam frequency; whereby a change in the optical frequency between the single outgoing light beam and the return beam is measured and used to calculate the velocity of the moveable reflective target; and whereby said processor compensates for the calculated velocity to the moveable target in the calculated distance to said moveable reflective target. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification