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Gyro sensor with spring structures to suppress influence of the same phase mode on a vibration mode

  • US 9,857,174 B2
  • Filed: 02/25/2014
  • Issued: 01/02/2018
  • Est. Priority Date: 03/04/2013
  • Status: Active Grant
First Claim
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1. A gyro sensor comprising:

  • a vibrating body;

    a plurality of first spring structure portions that extend in a direction along a first axis and are connected to the vibrating body, wherein one of the plurality of first spring structure portions is connected on a first side of the vibrating body and another of the plurality of first spring structure portions is connected on a second side of the vibrating body opposite the first side of the vibrating body;

    first and second vibrating portions that are disposed in parallel to each other in the direction along the first axis and are excited and vibrated in an opposite phase to each other; and

    at least one second spring structure portion that extends in the direction along the first axis and is connected to the first and second vibrating portions, wherein the first and second vibrating portions are supported only by the plurality of first spring structure portions and the at least one second spring structure portion connecting the first and second vibrating portions,wherein a first spring constant K1 of one of the plurality of first spring structure portions is smaller than a second spring constant K2 from a middle point at which a length between both ends of one of the at least one second spring structure portion is equally divided into two to one end of the one of the at least one second spring structure portion,wherein the one of the at least one second spring structure is a single continuous spring extending between the first and second vibrating portions, a first end of the one of the at least one second spring structure attaches to the first vibrating portion and a second end of the one of the at least one second spring structure attaches to the second vibrating portion, andwherein the vibrating body is fixed to a base, and wherein the plurality of first spring portions, the at least one second spring portion, the first vibrating portion, and the second vibrating portion extend over a recess in the base, andwherein a ratio γ

    =K2/K1, which is a ratio of the second spring constant K2 to the first spring constant K1, is 2 or more and 4096 or less.

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