Micro-gyroscope for detecting motions
First Claim
1. A gyroscope comprising:
- a substrate;
a central anchor fixed on the substrate;
a plurality of sample masses, the plurality of sample masses being disposed around the central anchor and driven radially relative to the central anchor;
a first anchor spring positioned between the central anchor and a first sample mass from the plurality of sample masses, the first anchor spring configured to allow the first sample mass to be deflected radially in a first plane and out of the first plane;
a second anchor spring positioned between the central anchor and a second sample mass from the plurality of sample masses, the second anchor spring configured to allow the second sample mass to be deflected radially in the first plane and out of the first plane;
a plurality of drive elements coupled to the plurality of sample masses, the plurality of drive elements configured to cause the plurality of sample masses to generate Coriolis forces when the substrate is rotated; and
a first sensor mass disposed on the first sample mass, the first sensor mass configured to deflect within a first deflection plane and orthogonal to a first radial drive direction of the first sensor mass.
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Abstract
The invention relates to a micro-gyroscope for detecting motions relative to an X and/or Y and Z axis, particularly as a 3D, 5D, or 6D sensor. Sample masses are disposed uniformly about an anchor and can be driven radially relative to the central anchor. Anchor springs are disposed to attach the sample masses to a substrate, and these sample masses can be deflected both radially within and out of the X-Y plane. A sensor mass is disposed on one-of the sample masses by means of sensor springs, and the sensor springs allow deflection of the sensor mass within the plane of the sample mass, and orthogonal to the radial drive direction of the sample masses. Drive elements oscillate these sample masses in the X-Y plane, and sensor elements captures the defection of the sample masses due to the Coriolis forces generated when the substrate is rotated.
7 Citations
19 Claims
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1. A gyroscope comprising:
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a substrate; a central anchor fixed on the substrate; a plurality of sample masses, the plurality of sample masses being disposed around the central anchor and driven radially relative to the central anchor; a first anchor spring positioned between the central anchor and a first sample mass from the plurality of sample masses, the first anchor spring configured to allow the first sample mass to be deflected radially in a first plane and out of the first plane; a second anchor spring positioned between the central anchor and a second sample mass from the plurality of sample masses, the second anchor spring configured to allow the second sample mass to be deflected radially in the first plane and out of the first plane; a plurality of drive elements coupled to the plurality of sample masses, the plurality of drive elements configured to cause the plurality of sample masses to generate Coriolis forces when the substrate is rotated; and a first sensor mass disposed on the first sample mass, the first sensor mass configured to deflect within a first deflection plane and orthogonal to a first radial drive direction of the first sensor mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for detecting a rate of rotation, the method comprising:
- driving a plurality of sample masses to radially oscillate relative to a central anchor on a substrate, the radial oscillation at least partially controlled by at least one anchor spring coupled between a first sample mass from the plurality of sample masses and the central anchor;
deflecting the first sample mass from the plurality of sample masses, wherein the deflecting is allowed by the at least one anchor spring and occurs radially in a first plane and out of the first plane;
sensing a first deflection of a first sensor mass disposed relative to the first sample mass, the first deflection the occurs within a first deflection plane and orthogonal to a first radial drive direction of the first sensor mass; and
deriving a rate of rotation of the substrate about a first axis based on the first deflection. - View Dependent Claims (16, 17, 18, 19)
- driving a plurality of sample masses to radially oscillate relative to a central anchor on a substrate, the radial oscillation at least partially controlled by at least one anchor spring coupled between a first sample mass from the plurality of sample masses and the central anchor;
Specification